Resistive coating on spacers by ALD 082310 Anil Mane, Qing Peng, Jeffrey Elam Go to ”Insert (View) | Header and Footer" to add your organization, sponsor, meeting name here; then, click "Apply to All"

Background work Experimental details Objective: To coat these spacers uniformly, conformally with “right resistance range” by ALD

Photographs of the spacers 3 different spacers loaded in fine mesh bags for ALD Before ALD R2 R3 Before ALD R1=0.5mm R2=1mm R1 R3=2.5mm Before ALD After ALD After ALD After ALD Prior to ALD 5min ultrasonic acetone clean 3 different spacers coated simultaneously by ALD Uniform and conformal deposition on all three spacers Both end of spacer has rough surface and need fine polishing

Spacers resistance after ALD Resistance measured without electrodes (Do we need electrodes?) Resistance of spacer has apparent size dependent behavior Need individual ALD process optimization Ran out spacers samples Coatings on spacers look splotchy, while same coatings on quartz and silicon witness substrates look uniform – need better procedure for cleaning the glass spacers (e.g. piranha) Next Plan: Once spacers available ALD process optimization for desired resistance