1. Plans for ALD on Large Substrates (8”x8”) July 5, 2011
Anil Mane, Jeffrey Elam
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2. Timeline ALD development for large area MCPs on Beneq:
Nos.
Items
May11
June 11
July 11
Aug. 11
Sept. 11
Oct. 11 1
Installation of reactive gases and line
Done 2
New 2D chamber HW testing 3
Dummy recipes
Going on 4
Rs process testing and optimization on 33mm MCPs x 5
Batch processing test for 33mm MCPs (uniformity Thickens & Rs) 6
Process testing on 8”x8” MCP 7
Batch 8”x8” (2-4) MCPs) processing 8
Grid spacer depositions
Requirements:
8”x8” MCPs with electrode (20 micron)
Handling, cleaning and storage items
Electrical measurement set-up for 8”x8” MCPs
MCP transfer set-up