1. Status of ALD on (8”x8”) MCPs/Substrates Jan 17 2012
Anil Mane, Jeffrey Elam
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2. Issues: No. Items Comments 1 Process uniformity Resolved 2 Rs tuning
On going 3
Deposition time
6-7 hrs 4
Precursor consumption
Need constant baby sitting 5
Bare MCP substrate cleaning
TBD 6
Bare MCP Rs measurement
(if electrode deposited)
1 hrs 7
ALD MCP Rs measurement
1-2 hrs

3. MCP photo after chem. -2 thickness NU issue resolved
Technically: Right range of Rs
To conducting recipe
Looks very uniform deposition appearance
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4. MCP photo after chem. -2 thickness NU issue resolved
When measured fully shows conducting?
MCP cut and re-measured (electrode ?)

5. MCP photo after chem. -2 thickness NU issue resolved
When measured fully shows conducting?
Pore arrangement, corner pores

6. MCP photo after chem. -2 thickness NU issue resolved
When measured fully shows conducting?
MCP cut and re-measured (electrode ?)

7. IV data Dimension = 6.5”x6” MCP cut and re-measured (electrode ?)
Resistance = 17.8 M for 251cm2 MCP
11 M for 400cm2 MCP
MCP area = 251 cm2

8. IV data Courtesy: UCB Resistance = 17.8 M for 251cm2 MCP
Resistivity = 3.8e8 -cm
11 M for 400cm2 MCP
I think we are going in right range of Rs for MCP
Try more and more depositions