1. ALD on MCPs updates LAPD group meeting presentation 10/16/2012
Anil Mane and Jeffrey Elam
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2. Recent Sample Delivered
4x 10cmx10cm MCPs ( with ALO SEE layer)
2x 33mm commercial MCPs (Half and full SEE layer)
1x 8”x8” MCP with flip after ½ deposition
Additional:
Biweekly brainstorming meeting (Weekly/biweekly)
Proposal for observer team for ALD work(?) (HEP division)
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3. Learning’s so far with large 8”x8”MCPs
High gain (106), Low background counts, ps resolution, good spatial resolution
High non-uniformity in one direction
Precursor diffusion along the pores
Uneven supply of precursor on substrate and reaction by product
Resistive layer NU vs. SEE layer NU?
ALD on Large MCPs are very challenging :
MCP geometry
Suitable ALD reactor configuration
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4. Our next 3 months plan on MCPs?
Action Items
Oct
Nov
Dec
remark
2nd Generation new HW testing
Installation done Process qualification is in progress
ALD optimization on 8”x8” MCPs
Rs coating
8”x8” MCPs production
Aiming good MCPs (4-5 pairs)
Grid spacers coating
4.45mm ordered (?)
Paper write-up
3 papers are pending
3nd Generation new HW testing
Design is in progress
Required resources:
Bare MCPs, Vacuum Oven and Manpower (technician)
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5. Where we are on large area MCPs?
Issue: Non-uniformity
Designed and fabricated new ALD hardware (reaction chamber)
Capable of more uniform precursor flux and effective purging
Compatible with both commercial tool and lab tool
Installation of new HW is in progress
Don’t know how life testing behavior of 8”x8”?
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