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End-Spoiling of Electrodes from Photonis June, 24 th 2010 Qing Peng, Anil U. Mane, Jeffery W. Elam ALD Research Program, Process Technology Research Group.

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Presentation on theme: "End-Spoiling of Electrodes from Photonis June, 24 th 2010 Qing Peng, Anil U. Mane, Jeffery W. Elam ALD Research Program, Process Technology Research Group."— Presentation transcript:

1 End-Spoiling of Electrodes from Photonis June, 24 th 2010 Qing Peng, Anil U. Mane, Jeffery W. Elam ALD Research Program, Process Technology Research Group Energy Systems Division.

2 SEM of Endspoiling_ one end of 20 um MCP 2 MCP NiCr Electrode is 10um into pore

3 EDX of Endspoiling_ one end 3 NiCr Ni Al O Na Si

4 SEM of Endspoiling_ other end of 20 um MCP 4 MCP NiCr

5 EDX of Endspoiling_ other end of 20 um MCP 5 NiCr Ni Al O NaSi

6 Summary The endspoiling from Photonis is good The penetration of NiCr is around 10um and consistent with theoretical value 10 um if 45 degree angle is used. 6


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