1. Capacitive-Resistive Spacers by ALD Jeffrey Elam, Qing Peng, Anil Mane, Joe Libera Argonne National Laboratory May 4, 2010

2. Capacitive-Resistive Spacers 2 Spacers C and R are provided by spacers between detector elements

3. ALD spacers 3 Use Incom capillary array as substrate for ALD – high surface area to achieve high capacitance start with small disc of Incom array D=5 mm (e.g.)

4. ALD to For Capacitance and Resistance 4 2. ALD metal 1. Substrate 4. ALD insulator3. Protect 5. ALD metal6. Unprotect7. Electrodes8. Resistive coating