1. North America Information & Control Technical Committee Chapter
Liaison Report
April 2017
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2. Outline Leadership Organization Chart Meetings Information
Ballot Results
Upcoming Ballots / Ballots to be Reviewed during SEMICON West TC Meeting
SNARF(s) Approved by GCS in between TC Chapter Meetings
Old Business (5 Year Review and 3 Year SNARFs)
TF Reports
Proposed Meeting Schedule

3. Leadership Committee Co-chairs Leadership Changes
Brian Rubow (Cimetrix)
Jack Ghiselli (Ghiselli Consulting)
James Moyne (AMAT/University of Michigan)
Leadership Changes
DDA Task Force new TF leader:
Albert Fuchigami (PEER Group)
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4. N.A. I&Cs TC Updated Organization Chart
Legend
C Chair/Co-Chair
L Task Force Leader
TF Task Force
North America
Information & Control
Technical Committee Chapter
C: Brian Rubow (Cimetrix)
C: Jack Ghiselli (Ghiselli Consulting)
C: James Moyne (AMAT/UMICH)
Diagnostic Data Acquisition (DDA) TF
L: Brian Rubow (Cimetrix)
L: Albert Fuchigami (PEER Group)
Sensor Bus TF
L: James Moyne (AMAT/UMICH)
Energy Saving Equipment Communication (ESEC) TF
L: Mike Czerniak (Edwards)
L: Andreas Neuber (AMAT)
Process Control Systems (PCS) Architecture TF
L: James Moyne (AMAT/UMICH)
L: Chris Maloney (Intel)
GEM300 TF
L: Brian Rubow (Cimetrix)
L: TBD
Graphical User Interfaces (GUI) TF
L: Frank H. Summers (ISGI)
NOTE: Italics means group is currently inactive.

5. Meeting Information Last meeting Next meeting
April 5, N.A. Standards Spring 2017 Meetings
SEMI Headquarters, Milpitas California
Next meeting
July 12, SEMICON West 2017 Meetings
San Francisco, California
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6. Ballot Results Cycle 1&2- 2017
Doc.#
Document Title
Action
6026A
Line Item Revision to SEMI E , Specification for Reticle and Pod Management (RPMS)
Passed
6066A
Line Item Revision to SEMI E R, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E R, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
6068A
Line Item Revision to SEMI E E, Specification for Equipment Performance Tracking and SEMI E116.1 Specification for SECS-II Protocol for Equipment Performance Tracking
5872
Line Item Revision to SEMI E , Specification for SECS Equipment Data Dictionary (SEDD)
Failed
5549A
Revision to SEMI E , Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
5738
Revision to SEMI E , Specification for SECS-II Protocol for Carrier Management (CMS)
6064A
Line Item Revision to SEMI E , Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
6067A
Reapproval for SEMI E (Reapproved 1111) Specification for Sensor/Actuator Network Specific Device Model for an in Situ Particle Monitor Device
6116
Reapproval for SEMI E , Specification of Sensor/Actuator Network for A-LINK
*Failed
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* NA I&C Chapter voted to transfer ownership of SEMI E54.17 to Japan I&C TC

7. Ballots to be Issued for N.A. SEMICON West 2017 Meetings Adjudication
Doc.#
Document Title
Voting Period
5716
Revisions to SEMI E R, Specification for Automated Process Control Systems Interface and SEMI E R, Provisional Specification for XML Messaging for Process Control Systems (PSC)
Cycle
TBD
Line Item revision to SEMI E54.9, Specification for Sensor/Actuator Network Communication for Modbus/TCP over TCP/IP
5872C
Line Item Revision to SEMI E , Specification for SECS Equipment Data Dictionary (SEDD)
6114
Line Item Revision to SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Reapproval to SEMI E (Reapproved 0612), Specification for Interbay/Intrabay AMHS SEM (IBSEM)
Reapproval to SEMI E (Reapproved 0612), Specification for AMHS Storage SEM (Stocker SEM)
Line Item Revision to SEMI E (Reapproved 0612), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) to correct nonconforming title to: Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
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8. SNARF(s) Approved by GCS in between TC Chapter Meetings
Revision to SEMI E , Specification for Human Interface for Semiconductor Manufacturing Equipment.
Approved by GCS 12/22/2016
SNARF #6124

9. SNARFs 3 Year Status
None needed extension.
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10. 5-Year Review – Reapproval Ballots Issued in H-2 2016
Name
Due
Title
Status
SEMI E E
7/1/2012
Specification for Equipment Performance Tracking
Passed TC, pending A&R.
SEMI E
Specification for SECS-II Protocol for Equipment Performance Tracking (EPT)
SEMI E (Reapproved 0710)
7/1/2015
Specification for Prober Specific Equipment Model for mm Environment (PSEM300)
SEMI E (Reapproved 0710)
Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
SEMI E
11/1/2015
Specification for Reticle and Pod Management (RPMS)
SEMI E (Reapproved 1111)
11/1/2016
Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
*SEMI E
3/1/2017
Specification for SECS-II Protocol for Carrier Management (CMS)
Updated 3/30/17
*SEMI E : Activity transferred from Korea I&C TC to NA I&C TC GEM300 TF (SNARF #5738) via GCS approval process on 08/24/2016.

11. 5-Year Review – Reapproval Ballots to be Issued in H1 2017
Name
Due for Review
Title
Status
SEMI E (Reapproved 1106)
11/1/2016
Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
Passed TC, pending A&R.
SEMI E
3/1/2017
Specification for Substrate Tracking
To be issued Cycle 7-17
**SEMI E (Reapproved 0612)
6/1/2017
SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
To be issued Cycle 5-17
SEMI E (Reapproved 0612)
Specification for Interbay/Intrabay AMHS SEM (IBSEM)
SEMI E (Reapproved 0612)
Specification for AMHS Storage SEM (Stocker SEM)
Updated 3/30/17
** Subject for "Nonconforming Title" review. Please refer to the Procedure Manual Appendix 4 (page 76)

12. 5 Year Review – Inactive Standards
Standards to receive Inactive status
SEMI E (Reapproved 1211), Specification for Sensor/Actuator Network Communications for LonWorks

13. Task Force Reports [1/5]
Diagnostic Data Acquisition (DDA) - Task Force
New Co-Chair
Albert Fuchigami from PEER Group
An additional co-chair might be added next meetings
Meeting Discussion
EDA freeze 3 plan discussions
Coordination with the Korea DDA Task Force
Ballot Adjudication
FAILED - None
PASSED A - Superclean
New/Updated SNARF(s)
None
Ballot Plans Next Cycles

14. Task Force Reports [2/5]
Energy Saving Equipment Communication (ESEC) – Task Force
Activities resumed at Standards Spring 2017 Meetings
Proposed SNARF for Line Items Revision to SEMI E167. Key points in provisional SNARF Draft:
Situation: The original standard was up to now not implemented in any fab. Besides that the communication standard between tool and subfab components has been released.
Purpose: It has to be checked whether the terminology and logic aligns between the two standards. Besides that it has to be reviewed whether there are any obstacles for implementation.
Simplify the state diagram so that it aligns with SEMI E175.
Make forecast available by Host to production equipment on energy-saving opportunities in the near future (e.g. for the next 2 hours or definable period of time).
Availability forecast should be chamber-specific (optional).
Clean-up the standard regarding detailed requirements; remove or make optional.
Distinguish between equipment and chamber states.
Plan submit SNARF for approval at Semicon West 2017 meeting
Next Step: plan to review SEMI E175 in 2018

15. Task Force Reports [3/5]
Generic Equipment Model 300 (GEM300) - Task Force
Seeking Co-Chair;
Ballot Adjudication
FAILED
5872A E172 SEDD Update
PASSED
6066A-1, 6066A-2 E130 minor edit, E130.1 reapproval
6068A-1, 6068A-2 E116 minor edit, E116.1 reapproval
6026A E109, Line-item revision
5738 E87.1 Major Revision to remove Provisional status
With 2 Editorial Change
5549A GEM E30 title change/conformance organization
With 2 Editorial Changes
New/Updated SNARF(s)
None
Ballot Plans Cycle 5
5872C E172 SEDD Update
6114 New Simple Large Recipe

16. Task Force Reports [4/5] Process Control Systems (PCS) - Task Force
Ballots adjudicated
Ballot 6067A (reapproval)
Passed
Authorized ballots
Revisions to SEMI E133 and SEMI E133.1 for Cycle 5-17 submission
Sensor Bus (SB) - Task Force
No leadership changes
Ballot 6116 (reapproval)
Withdrawn & to be referred to Japan sister task force
New business
New SNARF for adding a GENSen SDM mapping into E54.9.
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17. Task Force Reports [5/5] Graphical User Interfaces (GUI) – Task Force
No leadership changes
SNARF6124, Revision to SEMI E R, Specification for Human Interface for Semiconductor Manufacturing Equipment
Reviewed and discussed the specification to be reorganized and expanded
Discussed challenges related to small screen device displays and operating systems, i.e., tablet and smart phone form factors
First step, how the information displayed in the E95 Title Panel can be represented across all form factors
Ballot Adjudication
None
Ballot Plans Next Cycles
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18. Next Meeting Schedule Monday, July 10, 2017, San Francisco, CA
The next N.A. Information & Control Standards Meetings are tentatively scheduled* for July 10-12, 2017 at San Francisco, California in conjunction with the N.A. Standards SEMICON West 2017 Meetings. Exact meeting date and details will be announced when finalized and available at
Monday, July 10, 2017, San Francisco, CA
NA I&C Leadership (12:00 Noon – 1:00 PM)
DDA (1:00 PM – 3:00 PM)
PCS (3:00 PM – 5:00 PM)
I&C GCS (5:00 PM – 5:30 PM)
Tuesday, July 11, 2017, San Francisco, CA
I&C GUI TF (9:00AM – 12:00 noon)
Energy Saving Equipment Communication (9:00 AM – 12:00 noon)
GEM300 (1:00 PM – 4:00 PM)
Sensor Bus (4PM – 6:00 PM)
Wednesday, July 12, San Francisco, CA
I&C Committee (8:00 AM – 14:00 PM)
*All times are in Pacific Time. Times and dates are subject to change without notice.
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19. Thank you. For more information or to participate in N. A
Thank you! For more information or to participate in N.A. Information & Control TC activities, please contact Inna Skvortsova at SEMI
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