1. Japan TC Chapter of Information & Control Global Technical Committee Liaison Report
April 1, 2015
R.0.2a
To: North America TC Chapter of Information & Control Global Technical Committee

2. Outline Leadership and Structure Change
I&CC Japan TC Chapter Leadership
Current I&CC Japan TC Chapter Structure
Document Review Summary
Approved SNARFs
Upcoming Ballots
Task Force Updates
Meeting Information
Japan Chapter of I&C TC

3. Leadership and Structure Change
PCL TF was merged into GEM300 TF
PCL TF’s activity and members are transferred to GEM 300 TF
GEM300 TF
TFOF is modified to cover PCL TF activity
Yuko Toyoshima (Hitachi High-Technologies) is newly appointed as the co-leader
Yoshihisa Takasaki (SCREEN Semiconductor Solutions) remained.
PCL TF
The co-leaders, Terry Asakawa (Tokyo Electron) and Yuko Toyoshima (Hitachi High-Technologies), stepped down.
Japan Chapter of I&C TC 3

4. I&CC Japan TC Chapter Leadership
I&CC Japan TC Chapter Co-chairs
Takayuki Nishimura / SCREEN Semiconductor Solutions
Mitsuhiro Matsuda / Hitachi Kokusai Electric
Advisor
Mitch Sakamoto / Self
Technical Architect
Hiroshi Kondo / Murata Machinery
Tadashi Mochizuki / Tokyo Electron
Technical Editor
TBA
Japan Chapter of I&C TC 4 4

5. Current I&CC Japan TC Chapter Structure
Advisor
M. Sakamoto (Self)
I&CC Japan TC Chapter
T. Nishimura (SCREEN Semiconductor Solutions)
M. Matsuda (Hitachi Kokusai Electric)
Technical Architect
H. Kondo (Murata Machinery)
T. Mochizuki (Tokyo Electron)
Technical Editor
TBA
Equipment Information System Security (EISS) TF
M. Sakamoto (Self)
JA I&CC Maintenance TF
M. Matsuda (Hitachi Kokusai Electric)
H. Ogihara (Reno Sub-Systems)
Fiducial Mark Interoperability TF
I&C Committee: M. Matsuda (Hitachi Kokusai Electric)
PI&C Committee: S. Mashiro (Tokyo Electron)
Silicon Wafer Committee: T. Nakai (SUMCO) Packaging Committee: S. Masuchi (DISCO)
Traceability Committee: H. Tsunobuchi (KEYENCE)
Predictive Carrier Logistics (PCL) TF
T. Asakawa (Tokyo Electron)
Y. Toyoshima (Hitachi High-Technologies)
PCL TF was merged into GEM300 TF.
各々の説明を入れる
SEMICON/J の委員会で ・・・ これらのTFは活動がないので解散することにしました。
Sensor Bus TF
H. Ogihara (Reno Sub-Systems)
GEM 300 TF
Y. Takasaki (SCREEN Semiconductor Solutions)
Y. Toyoshima (Hitachi High-Technologies)
Japan Chapter of I&C TC
New 5

6. Document Review Summary at Japan Standards Winter 2014 Meetings in conjunction with SEMICON Japan 2014 (1)
Cycle
Doc #
Description
Japan Chapter Action
5730
Line Item Revision to SEMI E , “Specification for Production Recipe Cache (PRC)”
LI 1
Improve Convention
Passed as balloted
LI 2
Delete section 9 (Section 8 in E ), and add a section for ‘Conceptual Description’
LI 3
Add explicit expressions to the protection requirements of ‘Recipe Queue Space’ and ‘Recipe Execution Space’
LI 4
Add Cache Management Rules
LI 5
Add automatic Clear PRC function by equipment upon host communication establishment
LI 6
Adjust access (R/W) definitions of attributes and variables
LI 7
Improvement of wordings and explanations
Japan Chapter of I&C TC

7. Document Review Summary at Japan Standards Winter 2014 Meetings in conjunction with SEMICON Japan 2014 (2)
Cycle
Doc #
Description
Japan Chapter Action
5731
Revision to add a New Subordinate Standard “Specification for SECS-II Protocol for Production Recipe Cache” to SEMI E “Specification for Production Recipe Cache (PRC)”
Passed as balloted
5735
Line Item Revision to SEMI E , “Specification for Predictive Carrier Logistics (PCL)”
LI 1
Elimination of PEC while preserving Carrier Flow management capability
LI 2
Improvement of convention on optional expressions and state report clarifications
LI 3
Add explanations to Appendix
LI 4
Rename prediction related mnemonics and add explanations as needed
LI 5
Improve / correct wordings and add explanations as needed
LI 6
Add internal buffer scenarios
Japan Chapter of I&C TC

8. Document Review Summary at Japan Standards Winter 2014 Meetings in conjunction with SEMICON Japan 2014 (3)
Cycle
Doc #
Description
Japan Chapter Action
5778
Revision to add a New Subordinate Standard for “Specification for SECS-II Protocol” for SEMI E “Specification for Predictive Carrier Logistics”
Passed with editorial changes
5779
Line Item Revision to SEMI E , “Guide for Equipment Information System Security”
LI 1
Correct expressions in the sections and
Passed as balloted
Japan Chapter of I&C TC

9. Approved SNARF at Japan Standards Winter 2014 Meetings in conjunction with SEMICON Japan 2014
Doc #
Description TF
5828
Line Item Revision to SEMI E170-mmyy “Specification for Production Recipe Cache (PRC)” (Doc. 5730) and SEMI E170.1-mmyy “Specification for SECS –II Protocol for Production Recipe Cache” (Doc.5731)
GEM300 TF
5829
Line Item Revision to SEMI E171-mmyy “Specification for Predictive Carrier Logistics (PCL)” (Doc. 5735) and SEMI E171.1-mmyy “Specification for SECS-II Protocol for Predictive Carrier Logistics” (Doc. 5778)
Japan Chapter of I&C TC 9

10. Ongoing Ballots to be reviewed at Japan Standards Spring 2015
Cycle
Doc #
Description TF
5828
Line Item Revision to SEMI E170-mmyy “Specification for Production Recipe Cache (PRC)” (Doc. 5730) and SEMI E mmyy “Specification for SECS –II Protocol for Production Recipe Cache” (Doc.5731)
GEM300 TF
Japan Chapter of I&C TC 10

11. Upcoming Ballots Cycle 4 or 5-2015 5601A 5829 Doc # Description TF
New Standard: “Specification for Wafer Object Model”
GEM300 TF
5829
Line Item Revision to SEMI E171-mmyy “Specification for Predictive Carrier Logistics (PCL)” (Doc. 5735) and SEMI E mmyy “Specification for SECS-II Protocol for Predictive Carrier Logistics” (Doc. 5778)
Japan Chapter of I&C TC 11

12. Task Force Updates [1/8]
Equipment Information System Security (EISS) TF
#5779: Line Item Revision to SEMI E : “Guide for Equipment Information System Security”
Including one line Item
Line Item 1 passed as balloted at the Japan TC Chapter meeting on Dec. 5, 2014 in conjunction with SEMICON Japan 2014, and also passed at A&R in Feb., 2015.
Japan Chapter of I&C TC

13. Task Force Updates [2/8] Fiducial Mark Interoperability TF
Ballot document #5752 ( submitted Cycle )
Revision of SEMI T (Reapproved 0709), Specification for Back Surface Marking of Double-Side Polished Wafers with a Two-Dimensional Matrix Code Symbol
TF is assigned to prepare TF recommendation for adjudication by Traceability GCS
Passed with editorial changes at Japan TC Chapter meeting of Traceability Global TC on Dec. 5 in conjunction with SEMICON Japan 2014 and also passed at A&R in Feb., 2015.
TF is assigned to following ballot of #5752
Revisit T7 purpose and scope
Modify Figure 3 to align with M1
M20 coordinate system
To be discussed following items related to Information & Control
Fiducial Mark Reading Condition Report
Japan Chapter of I&C TC

14. Task Force Updates [3/8] GEM 300 TF (1)
Approved the revised TFOF of GEM300 TF for merging PCL TF into GEM300 TF
The charter of this task force is;
1) to maintain and improve the following SEMI equipment automation software standards:
E4, E5, E30, E37, E39, E40, E87, E90, E94, E116, E157, E170, E171
Co-Leaders
Yuko Toyoshima (Hitachi High-Technologies) is newly appointed.
Yoshihisa Takasaki (SCREEN Semiconductor Solutions) remained.
Japan Chapter of I&C TC

15. Task Force Updates [4/8] GEM 300 TF (2)
#5601: “Specification for Wafer Object Model (WOMS)”
Introduce Wafer Object and its behavior.
Ballot 5601A to be balloted for Cycle 4 or Cycle 5.
#5730: Line Item Revision to SEMI E “Specification for Production Recipe Cache (PRC)”
All seven(7) line items passed as balloted at the Japan TC Chapter meeting on Dec. 5, in conjunction with SEMICON Japan 2014, and also passed at A&R in Feb., Published as SEMI E
#5731: Revision to add a New Subordinate Standard for “Specification for SECS-II Protocol for Production Recipe Cache” to SEMI E “Specification for Production Recipe Cache (PRC)”
Passed as balloted at the Japan TC Chapter meeting on Dec. 5, 2014 in conjunction with SEMICON Japan 2014, and also passed at A&R in Feb., Published as SEMI E
Japan Chapter of I&C TC 15

16. Task Force Updates [5/8] GEM 300 TF (3)
#5828: Line Item Revision to SEMI E “Specification for Production Recipe Cache (PRC)” (Doc. 5730) and SEMI E “Specification for SECS –II Protocol for Production Recipe Cache (PRC)” (Doc.5731)
SNARF was approved at the Japan TC Chapter meeting on Dec. 5, 2014 in conjunction with SEMICON Japan 2014.
The document is now balloted for Cycle 3 and to be adjudicated at the Japan TC Chapter Meetings on April 23.
#5829: Line Item Revision to SEMI E171-mmyy “Specification for Predictive Carrier Logistics” (PCL) (Doc. 5735) and SEMI E171.1-mmyy “Specification for SECS-II Protocol for Predictive Carrier Logistics (PCL)” (Doc. 5778)
Ballot to be submitted for Cycle 4 or Cycle 5
Japan Chapter of I&C TC 16

17. Task Force Updates [6/8] JA I&CC Maintenance
#5615: Revision to SEMI E98: “Provisional Specification for Object-Based Equipment Model” and SEMI E98.1 “Provisional Specification for SECS-II Protocol for The Object-Based Equipment Model”
To remove “provisional”.
Work in progress and ballot submission to be decided.
The activity of revision to SEMI E99 and SEMI E99.1 to be assigned to Japan I&CC Maintenance Task Force for reviewing the documents and the preparation of a SNARF
SEMI E E (Reapproved 0710) “The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services” and SEMI E (Reapproved 0710) “Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer Functional Standard”
The activity of SEMI E (Reapproved 0710) “Specification of Electric Failure Link Data Format for Yield Management System”
Hideaki Ogihara (Reno Sub-Systems) was assigned to this activity.
Japan Chapter of I&C TC

18. Task Force Updates [7/8] Predictive Carrier Logistics (PCL) TF
This task force was merged into GEM300 TF, which was approved at the Japan TC Chapter meeting on Dec. 5, 2014 in conjunction with SEMICON Japan 2014
#5735: Line Item Revision to SEMI E : “Specification for Predictive Carrier Logistics (PCL)”
All six (6) line items passed as balloted at the Japan TC Chapter meeting on Dec. 5, 2014 in conjunction with SEMICON Japan 2014, and also passed at A&R in Feb., 2015.
#5778: Revision to add a New Subordinate Standard for “Specification for SECS-II Protocol” for SEMI E “Specification for Predictive Carrier Logistics (PCL)”
Passed with editorial changes at the Japan TC Chapter meeting on Dec. 5, in conjunction with SEMICON Japan 2014, and also passed at A&R in Feb., 2015.
Japan Chapter of I&C TC

19. Task Force Updates [8/8] Sensor Bus TF No activity
Japan Chapter of I&C TC 19

20. Meeting Information - Japan TC
Last Meeting – Japan Winter 2014 Meetings:
In conjunction with SEMICON Japan 2014
Friday, December 5, :00-17:00
@ Tokyo Big Sight Conference Tower, Tokyo, Japan
Next Meeting – Japan Spring 2015 Meetings:
Thursday, April 23, :30-17:00
@ SEMI Japan Office, Tokyo, Japan
Japan Chapter of I&C TC 20

21. Schedule for I&CC Japan TC Chapter Meetings
Spring in April 2015
Summer in June 2015
Fall in September 2015
Winter in December 8, 2015 (tentative)
in conjunction with SEMICON Japan 2015
Japan Chapter of I&C TC

22. End of I&CC Japan TC Chapter Liaison Report Thank You!
For more information, please contact Chie Yanagisawa at SEMI Japan
Japan Chapter of I&C TC 22