1. Japan TC Chapter of Information & Control Global Technical Committee Liaison Report
As of October 30, 2015

2. Outline I&CC Japan TC Chapter Leadership
Current I&CC Japan TC Chapter Structure
Document Review Summary
SNARFs and Ballots
Task Force Updates
Meeting Information
Japan TC Chapter of I&C GTC

3. I&CC Japan TC Chapter Leadership
Co-chairs
Takayuki Nishimura / SCREEN Semiconductor Solutions
Mitsuhiro Matsuda / Hitachi Kokusai Electric
Advisor
Mitch Sakamoto / Self
Technical Architect
Hiroshi Kondo / Murata Machinery
Tadashi Mochizuki / Tokyo Electron
Technical Editor
TBA
Japan TC Chapter of I&C GTC 3

4. Current I&CC Japan TC Chapter Structure
Advisor
M. Sakamoto (Self)
I&CC Japan TC Chapter
T. Nishimura (SCREEN Semiconductor Solutions)
M. Matsuda (Hitachi Kokusai Electric)
Technical Architect
H. Kondo (Murata Machinery)
T. Mochizuki (Tokyo Electron)
Technical Editor
TBA
Equipment Information System Security (EISS) TF
M. Sakamoto (Self)
JA I&CC Maintenance TF
M. Matsuda (Hitachi Kokusai Electric)
H. Ogihara (Reno Sub-Systems)
Fiducial Mark Interoperability TF
I&C Committee: M. Matsuda (Hitachi Kokusai Electric)
PI&C Committee: S. Mashiro (Tokyo Electron)
Silicon Wafer Committee: T. Nakai (SUMCO) Packaging Committee: S. Masuchi (DISCO)
Traceability Committee: H. Tsunobuchi (KEYENCE)
Sensor Bus TF
H. Ogihara (Reno Sub-Systems)
各々の説明を入れる
SEMICON/J の委員会で ・・・ これらのTFは活動がないので解散することにしました。
GEM 300 TF
Y. Takasaki (SCREEN Semiconductor Solutions)
Y. Toyoshima (Hitachi High-Technologies)
Japan TC Chapter of I&C GTC

5. Document Review Summary at Japan Standards Spring 2015 Meetings
Cycle
Doc #
Description
Japan Chapter Action
5828
Line Item Revision to SEMI E “Specification for Production Recipe Cache (PRC)” and SEMI E “Specification for SECS –II Protocol for Production Recipe Cache”
LI 1
Introduce Secured Recipe Space and revise messages
Passed as balloted
LI 2
Passed as balloted Superclean
LI 3
Clarify MaxNumber and MaxTime
LI 4
Change APPENDIX 1 to related information
*Doc. #5828 had been published as E and E
Japan TC Chapter of I&C GTC

6. Document Review Summary at Japan Standards Fall 2015 Meetings
Cycle
Doc #
Description
Japan Chapter Action
5829
Line-item Revision to SEMI E : SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL) and SEMI E SPECIFICATION FOR SECS-II PROTOCOL FOR PREDICTIVE CARRIER LOGISTICS
LI 1
Correct editorial errors in Table 24 ‘CLJ State Transition Table’
Passed as balloted
LI 2
Correct editorial errors in Table 16 ‘CFJ State Transition Table’
LI 3
Improve expression of CFJ Event definition
Failed and returned to TF for rework
LI 4
Improve CLJ Event definition
LI 5
Correct Table A2-1 ‘Transitions and States’
Passed as balloted Superclean
LI 6
Align mnemonics used in E171.1 to E171
LI 7
Remove ObjType of CLJ from CFJ Event parameters
Japan TC Chapter of I&C GTC

7. Approved SNARF by GCS on June 2, 2015
Doc #
Description TF
5888
Revision to SEMI E “Specification for Production Recipe Cache (PRC)” and SEMI E “Specification for SECS –II Protocol for Production Recipe Cache (PRC)”
GEM300 TF
Japan TC Chapter of I&C GTC

8. Approved Revised SNARF at Japan Standards Summer 2015 Meetings
Doc #
Description TF
5829
Line Item Revision to SEMI E “Specification for Predictive Carrier Logistics (PCL)” and SEMI E “Specification for SECS-II Protocol for Predictive Carrier Logistics”
GEM300 TF
Japan TC Chapter of I&C GTC

9. Approved SNARF revision by GCS on October 14, 2015
Doc #
Description TF
5601
New Standard: Specification for Wafer Job Management
GEM300 TF
Japan TC Chapter of I&C GTC

10. Ballots to be reviewed at Japan Standards Winter 2015 Meetings in conjunction with SEMICON Japan 2015
Cycle
Doc #
Description TF
5829A
Line Item Revision to SEMI E “Specification for Predictive Carrier Logistics (PCL)” and SEMI E “Specification for SECS-II Protocol for Predictive Carrier Logistics”
GEM300 TF
5888
Revision to SEMI E “Specification for Production Recipe Cache (PRC)” and SEMI E “Specification for SECS –II Protocol for Production Recipe Cache (PRC)”
Japan TC Chapter of I&C GTC

11. Task Force Updates [1/6]
Equipment Information System Security (EISS) TF
Access control with RBAC (Role Based Access Control) is now discussing.
The discussion items:
Access Control General Discussion
RBAC - Issues
SEMI Standards - Issues
Japan TC Chapter of I&C GTC

12. Task Force Updates [2/6] Fiducial Mark Interoperability TF T7 issues
Traceability Japan TC Chapter assigned following up activity for T7 to Fiducial Mark Interoperability TF
Section 2.1 (T7 adoption of non-silicon materials)
Figure 3 small modification
M20 coordinate system (based on negative to 5752 [withdrawn])
TF decided to delete all position specifications from SEMI T7 because position specifications are also described on SEMI M1 and other related Silicon Standard.
SNARF was approved by GCS. (SNARF 5890)
Document 5890 to be adjudicated at the next JA TC Chapter meeting of Traceability TC in conjunction with SEMICON JAPAN 2015.
Others
Silicon: Give up to develop new Standard for 450mm Development Wafer with fiducial mark
Assembly and Packaging: Discussing backend alignment issues with introducing fiducial mark wafer.
Japan TC Chapter of I&C GTC

13. Task Force Updates [3/6] GEM 300 TF
#5829: Line Item Revision to E171 and E171.1
Draft Document #5829 was reviewed at the Japan Fall TC Chapter Meeting
Line item #1,#2, #5, #6 and #7 were passed
Line Item #3 and #4 was failed and sent to TF for rework
Draft Document #5829A is submitted to 2015 Cycle 8
Re-Ballot modified line item #3 and #4
Some small changes are added as new line items.
To be Reviews at the next Japan TC Chapter meeting conjunction with SEMICON Japan.
Japan TC Chapter of I&C GTC 13

14. Task Force Updates [4/6] GEM 300 TF (cont’d)
#5888: Revision to E170 and E171
Submitted to 2015 Cycle 8
To be adjudicated at the next Japan TC Chapter meeting in conjunction with SEMICON Japan.
#5601: New Standards for “Wafer Job Management”
Change concept “Wafer Object” to “Wafer Job”
Revision SNARF is approved by GCS.
Plan to submit #5601A at 2016 Cycle 1 or Cycle 2.
Japan TC Chapter of I&C GTC 14

15. Task Force Updates [5/6] JA I&CC Maintenance
#5615: Revision to SEMI E98: “Provisional Specification for Object-Based Equipment Model” and SEMI E98.1 “Provisional Specification for SECS-II Protocol for The Object-Based Equipment Model”
To remove “provisional” and work in progress
SEMI E “Specification for AMHS SEM (AMHS SEM)”
Technical revision is not required by review
Pending due to SML and SML notation issue
SEMI E E (Reapproved 0710) “The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services” and SEMI E (Reapproved 0710) “Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer Functional Standard”
SNARF to be prepared
The activity of SEMI E (Reapproved 0710) “Specification of Electric Failure Link Data Format for Yield Management System”
Action is now considering. (Revision / INACTIVE / …)
Japan TC Chapter of I&C GTC

16. Task Force Updates [6/6] Sensor Bus TF No activity
Japan TC Chapter of I&C GTC 16

17. Meeting Information - Japan TC
Last Meeting – Japan Fall 2015 Meetings:
Wednesday, September 16, :30-17:00
@ SEMI Japan Office, Tokyo, Japan
Next Meeting – Japan Winter 2015 Meetings in conjunction with SEMICON Japan 2015:
Friday, December 18, :00-17:00
@ Tokyo Big Sight Conference Tower, Tokyo, Japan
Japan TC Chapter of I&C GTC 17

18. Schedule for I&CC Japan TC Chapter Meetings
Winter in December 18, 2015 (tentative)
in conjunction with SEMICON Japan 2015
Spring in April 2016
Summer in June 2016
Fall in September 2016
Japan TC Chapter of I&C GTC

19. End of I&CC Japan TC Chapter Liaison Report Thank You!
For more information, please contact Chie Yanagisawa at SEMI Japan
Japan TC Chapter of I&C GTC 19