1. Europe Gases & Liquid Chemicals Committee Report
March 20, 2012

2. Leadership Committee Co-Chairs Non-Voting Co-Chair:
Jean-Marie Collard, Solvay Chemicals
Gordon Ferrier, Air Products
Non-Voting Co-Chair:
Gummaar De Vos, FujiFilm Electronic Materials

3. Committee Organization
EU Liquid Chemicals & Gases Committee
C: Jean-Marie Collard (Solvay Chemicals)
C: Gordon Ferrier (Air Products)
VC: Gummaar De Vos (FFEM)
Precursor Specifications TF
NEW L: Paul Williams (SAFC Hitech)
Solvents in Advanced Processes TF
L: Gummaar DeVos (FFEM)

4. Meeting Information Last Meeting Next Meeting
October 12, 2011 at SEMICON Europa, Dresden, Germany
Next Meeting
(Tentatively) June 13-14, 2012 at Intersolar Europe, Munich, Germany

5. Ballot Results

6. New SNARFs

7. Upcoming Ballots for cycle 3 and 4-2012
Doc. 5324, New Standard: Guide for Cyclopentanone
Doc. 5326, New Standard: Guide for Methyl Isobutyl Carbinol (MIBC) or 4-Methyl 2-Pentanol
Doc. 5325, New Standard: Guide For Dimethyl Dimethoxy Silane (DMDMOS)
Doc. 5328, New Standard: Guide forTetrakis(Dimethylamino) Silane (TDMAS)
Doc. 5329, New Standard: Guide for Tris(Dimethylamino) Silane (3DMAS)

8. Precursor Specifications Task Force [1/2]
Leader: Rajesh Odedra (SAFC Hitech)
Rajesh lefts the company.
Paul Williams returns to take over.
Standards published
SEMI C Guide for Hafnium Amides
SEMI C Guide for Zirconium Amides
SEMI C Guide for Hafnium Tetrachloride
SEMI C Guide for Hafnium t-Butoxide
SEMI C Guide for Tetrakis(Dimethlyamino)Titanium (TDMAT)
SEMI C Guide for Zirconium t-Butoxide

9. Precursor Specifications Task Force [2/2]
List of next candidates for standardization:
TiCl4 – Air Liquide ?
ZrCl4 (per end-user request) – need leader
PDMAT [Ta(N(CH3)2)5] – need leader
OMCTS/TMCTS – Air Liquide ?
Others : see ITRS Precursors table (JMC or Andreas Neuber)
New SNARFs
Dimethyl Dimethoxy Silane (DMDMOS) - FFEM
Monomethyl Silane – Perm Chemicals
Tetrakis(Dimethylamino) Silane (TDMAS) – SAFC Hitech
Tris(Dimethylamino) Silane (3DMAS) – SAFC Hitech

10. Solvents in Advanced Processes TF
Leader: G. De Vos (FFEM)
Doc. 4816: Guide for PGME/PGMEA/mixture
Published as SEMI C
Target list :
EG : Ethylene Glycol (following recommendation from ITRS) – need leader
Updating HMDS (hexamethyldisilazane) : on going (lead by NA)
New SNARFs
Guide for Cyclopentanone - FFEM
Guide for Methyl Isobutyl Carbinol (MIBC) or 4-Methyl 2-Pentanol - FFEM

11. Thank you! For more information, please contact:
Yan Guillou , SEMI Europe
James Amano, SEMI HQ