1. Europe Gases & Liquid Chemicals Committee Report
March 2011

2. Leadership Committee Co-Chairs Non-Voting Co-Chair:
Jean-Marie Collard, Solvay Chemicals
Gordon Ferrier, Air Products
Non-Voting Co-Chair:
Gummaar De Vos, FujiFilm Electronic Materials

3. Committee Organization
EU Liquid Chemicals & Gases Committee
C: Jean-Marie Collard (Solvay Chemicals)
C: Gordon Ferrier (Air Products)
VC: Gummaar De Vos (FFEM)
Precursor Specifications TF
L: open
Solvents in Advanced Processes TF
L: Gummaar DeVos (FFEM)

4. Meeting Information Last Meeting Next Meeting
October 20, 2010 at SEMICON Europa, Dresden, Germany
Next Meeting
May 26, 2011 – Brussels, Belgium

5. Precursor Specifications Task Force
Leader: Paul Williams left SAFC Hitech, new leader needed
Hafnium amides document (4701D) and Zirconium amides document (4702D)
Balloted in Cycle
Tetramethylsilane (4MS) document abandoned – not used in large quantities by industry

6. Precursor Specifications Task Force
4 new ballots issued in Cycle
Guide for Hafnium Tetrachloride (4993)
Guide for Hafnium t-Butoxide (4994)
Guide for Tetrakis(Dimethlyamino)Titanium (4995)
Guide for Zirconium t-Butoxide (4996)
List of next candidates for standardization:
TiCl4
ZrCl4 (per end-user request)
PDMAT [Ta(N(CH3)2)5]
3DMAS [HSi(N(CH3)2)3]
TDMAS [Si(N(CH3)2)4]

7. Solvents in Advanced Processes TF
Leader: G. De Vos (FFEM)
1st activity : guide for PGME/PGMEA/mixture
Ballot 4816 issued in Cycle
Target list :
EG : Ethylene Glycol (following recommendation from ITRS)
PGME : propylene glycol methyl ether
PGMEA : propylene glycol methyl ether acetate
updating HMDS (hexamethyldisilazane) SEMI Std

8. Standards past due for 5-year review
Leaders are reviewing the below Standards, originated by the European Gases and Liquid Chemicals Committee, to determine if they should be revised, reapproved, or withdrawn.
Committee
Standard
Gases
SEMI C Standard for Tungsten Hexafluoride, % Quality
SEMI C Specification for Diborane Mixtures
SEMI C Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders
Liquid Chemicals
SEMI C Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]

9. Thank you! For more information, please contact:
Carlos Lee, SEMI Europe
Ian McLeod, SEMI NA