1. EU Silicon Wafer Committee Liaison Report
Updated November 2, 2010

2. Event, Venue information
Meeting Information
Last Meeting
October 20, 2010 in conjunction with SEMICON Europa, Dresden, Germany
Next Meeting
To be determined, check calendar of event for latest update
11/23/2018
Event, Venue information

3. EU Silicon Wafer Committee
Committee Co-chairs
W. Bergholz,
Jacobs University Bremen
P. Wagner
11/23/2018
Event, Venue information

4. Task Forces with European Participation
Int. Advanced Wafer Geometry (AWG) TF
Leaders: P. Langer, N. Poduje, W. Baylies, S. Akiyama, Raytex, M. Yoshise, KLA-Tencor, F. Passek, Siltronic AG
Int. Advanced Surface Inspection (ASI) TF
Leaders: J. Stover, TSW, G. Kren, KLA-Tencor, H. Ohta, Hitachi
Terminology TF
Leaders: M. Bullis, Materials & Metrology, T. Nakai, Sumco
Test Methods TF
Leaders: D. Gupta, STQ, M. Watanabe, NuFlare Technology, P. Wagner
11/23/2018
Event, Venue information

5. Int. Advanced Wafer Geometry TF
Meeting in Dresden on October 20, 2010
3335D, Guide for Determining Nanotopography
Published as SEMI M
Current activities
Doc 4813, Revision to M49, addition of new technology generations and ERO metrics, on ballot
Presentation by T. Fukuda, Fujitsu: Impact of edge profile on wafer breakage
Presentation by J. Hager, KT: 450 Transition Considerations
F. Passek, Siltronic AG: QFD regarding the ranking of criteria for 450 mm flatness measurement
New: Questionnaire regarding EE for ERO metrics for 450 mm wafers
11/23/2018
Event, Venue information 5

6. Event, Venue information
Int. 450 mm Wafer TF
Meeting in Dresden, October 20
Leaders: M. Goldstein, Intel, M. Watanabe, NuFlare
Si industry update: inspection tools coming on-line , wafer geometry: Kuroda, Kobelco, E&H
450 mm wafers benchmarking: LLS (Nanophotonics, > 90 nm), SIRD (JenaWave), wafer shape, SFQR, surface metals (Balasz)
Supply line in good shape
11/23/2018
Event, Venue information 6

7. Event, Venue information
Int. Terminology TF
No meeting in Dresden
Contributions to on-going activities regarding SEMI M59, Terminology for Silicon Technology. Goal is to collect all definitions and acronyms in M59 and to remove them subsequently from the originating standards
11/23/2018
Event, Venue information 7

8. Event, Venue information
Int. Test Methods TF
No Meeting in Dresden
11/23/2018
Event, Venue information 8

9. Event, Venue information
Int. ASI TF
No Meeting in Dresden
11/23/2018
Event, Venue information 9

10. PV Committee - EU PV Silicon Materials TF
Leader: Peter Wagner
Several PV silicon producers, represented by the European Photovoltaic Industry Association (EPIA) support the activity: Dow Corning, Elkem Solar, Hemlock, PV Crystalox Solar Silicon, Wacker Chemie, REC, Siliken and Sunicon.
Charter: Develop and maintain standards regarding specifications for bulk silicon materials used in manufacturing solar cells.
Identify missing standardized test methods for PV Silicon Materials
Define and develop common understanding of terms used in PV industry
Educate industry about new standards
Current Activity: Doc. 4805B Specification For Virgin Silicon Feedstock Materials For Photovoltaic Applications (To be balloted in cycle 1-11 for review at PV Fab Managers Forum March, 2011)
11/23/2018
Event, Venue information

11. Event, Venue information
Contact
For more information, please contact Kevin Nguyen at
11/23/2018
Event, Venue information