1. North America Environmental, Health, and Safety Committee
April 2011

2. Leadership and Schedule
Committee Leaders
Committee Co-chairs
Chris Evanston / Salus Engineering
Sean Larsen / Cymer
Eric Sklar / Safety Guru, LLC
James Beasley / ISMI
Technical Architect
Technical Editors
Meeting Schedule
Last Meeting:
2011/03/31 at NA Spring 2011 Mtngs Applied Materials Santa Clara, CA
Next Meeting:
2011/07/14 at SEMICON West San Francisco, CA
April 2011
NA EHS Liaison Report

3. Organization Chart
North America Environmental, Health, and Safety Committee
Manufacturing Equipment Safety Subcommittee (MESSC)
AMHS Safety TF
S6 Revision TF
Ergonomics (S8) TF
S7 Evaluator Qualifications TF
S2 3.3 Limitations TF (NEW)
Fire Protection (S14) TF
S13 NA Support TF (Inactive)
FPD Safety System Liaison TF (Inactive)
S2 Chemical Exposure TF
S18 Support TF
S2 Interlock Reliability TF
Lifting Equipment TF (Inactive)
S22 (Safe Electrical Design) TF
S2 Ladders & Steps TF
S1 Update TF (Inactive)
S25 Revision TF (NEW)
S2/Mach. Dir. Mapping TF (Inactive)
S3 Revision TF
E34 Rvsn TF (Disbanded)
S2 Non-Ionizing Radiation TF
Abate. Systems (F5) TF (Disbanded)
S12 Rvsn TF (Disbanded)
April 2011
NA EHS Liaison Report

4. Notable / New Activities
S2 3.3 Limitations Task Force
Leaders: Lauren Crane (Applied Materials), Cliff Greenberg (Nikon Precision)
Intended result: correction of text in 3.3 of SEMI S2
S25 Revision Task Force
Leaders: Jean-Marie Collard (Solvay), Steve Dobson (Solvay), Eric Sklar (Safety Guru, LLC)
Intended result: line item revisions to S25
April 2011
NA EHS Liaison Report

5. Published for 0211 Revised: S2-0310b
Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions related to electrical safety) S
Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination (Miscellaneous minor corrections)
S a
Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revisions related to S2, transformers)
Withdrawn:
S (Withdrawn 0211)
Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment That Have Been Moved to SEMI S22
April 2011
NA EHS Liaison Report

6. Committee Activities Ballot Results [1/2]
4316H
(1 LI)
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S , Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revision Related to Safe Electrical Design)
FAILED
4605D
(4 LIs)
Line Item Revisions to SEMI S , Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revisions on Multiple Topics)
1: FAILED 2: APPROVED
3: APPROVED
4: FAILED
4683
(3 LIs)
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Chemical Exposure)
All Line Items FAILED
APPROVED ballots forwarded for Procedural Review
FAILED ballots returned to task force unless noted
April 2011
NA EHS Liaison Report

7. Committee Activities Ballot Results [2/2]
4774
(6 LIs)
Delayed Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revisions Related to Non-Ionizing Radiation)
1: FAILED
2: APPROVED
3: APPROVED
4: APPROVED
5: APPROVED
6: FAILED
4931A
Revision to SEMI S7-0310, Safety Guideline for Evaluation Personnel and Evaluating Company Qualifications
FAILED
5109
Reapproval of SEMI S , Safety Guideline for Hydrogen Peroxide Storage & Handling Systems
FAILED and transferred to S25 Revision TF
APPROVED ballots forwarded for Procedural Review
FAILED ballots returned to task force unless noted
April 2011
NA EHS Liaison Report

8. Committee Activities New and Updated TFOFs/SNARFs
Correction of text in 3.3 of SEMI S2
S2 3.3 Limitations TF
5-year review of SEMI S25
S25 Revision TF
5170
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Revisions Related to Section 3.3)
5171
Revision to SEMI S , Safety Guideline for Hydrogen Peroxide Storage & Handling Systems
5172
Withdrawal of SEMI F , Test Method (SF6 Tracer Gas) for Enclosures Has Been Moved to SEMI S6
NA EHS TC
Updated
5110
Line Item Revisions to SEMI S3-0306, Safety Guidelines for Process Liquid Heating System, and SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
S3 Revision TF
April 2011
NA EHS Liaison Report

9. Committee Activities Upcoming Ballots [1/2]
Cycle 3-11
5172
Withdrawal of SEMI F , Test Method (SF6 Tracer Gas) for Enclosures Has Been Moved to SEMI S6
NA EHS TC
Either Cycle 3-11 or Cycle 4-11
3560M
New Safety Guideline: Safety Guideline for Semiconductor Manufacturing Equipment Robots, Automation, and Load Ports
AMHS Safety TF
4774A
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Non-Ionizing Radiation)
S2 Non-Ionizing Radiation TF
5000
Line Item Revisions to SEMI S (Delayed Revisions Related to Reliability Requirements)
S2 Interlock Reliability TF
5110
Line Item Revisions to SEMI S3-0306, Safety Guidelines for Process Liquid Heating System, and SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
S3 Revision TF
5171
Revision to SEMI S , Safety Guideline for Hydrogen Peroxide Storage & Handling Systems
S25 Revision TF
April 2011
NA EHS Liaison Report

10. Committee Activities Upcoming Ballots [2/2]
Cycle 4-11
4316I
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S , Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revision Related to Safe Electrical Design)
S22 TF
4449C
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Work at Elevated Locations)
S2 Ladders & Steps TF
4605E
Line Item Revisions to SEMI S , Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment (Delayed Revisions on Multiple Topics)
4683A
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Delayed Revisions Related to Chemical Exposure)
S2 Chemical Exposure TF
April 2011
NA EHS Liaison Report

11. Committee Activities Subcommittees & Task Forces (1/3)
MESSC
Discussed various topics, included text of paragraph 3.3 in S2 and the definitions of “fault-tolerant” and “fail-safe”.
AMHS Safety TF
Completed review of responses to Doc. 3560L; planning to ballot Doc. 3560M in C3-11 or C4-11.
Ergonomics TF
New leader: Paul Schwab (TI) replaces Mark Harralson (Intel).
Continuing work to merge the SESC checklist with the SESC RI section in S8.
Fire Protection TF
Continuing work on content related to audiovisual notifications.
S2 3.3 Limitations TF
Starting work on updated text for paragraph 3.3 of S2.
April 2011
NA EHS Liaison Report

12. Committee Activities Subcommittees & Task Forces (2/3)
S2 Chemical Exposure TF
Issued Doc in C2-11; reviewing responses to failed line items and planning to ballot Doc. 4683A in C4-11.
S2 Interlock Reliability TF
Planning to ballot Doc (addition of an RI on interlock reliability to SEMI S2) in C3-11 or C4-11.
S2 Ladders & Steps TF
Continuing to review responses to Doc. 4449B; planning to ballot Doc. 4449C in C4-11 if possible.
S2 Non-Ionizing Radiation TF
Issued Doc in C2-11; reviewing responses to failed line items and planning to ballot Doc. 4774A in C3-11 or C4-11.
S3 Revision TF
Continuing work on line items to revise S3; expanded scope to include line items to revise affected content in S2. Planning to ballot Doc in C3-11 or C4-11.
April 2011
NA EHS Liaison Report

13. Committee Activities Subcommittees & Task Forces (3/3)
S6 Revision TF
Continuing to develop line item revisions to S6 and new content for S6 addressing gas detectors.
S7 Evaluator Qualifications TF
Document 4931A (add business continuity-related criteria to S7) failed; ballot to be re-worked and re-issued.
S18 Support TF
Continuing to support S18 Revision TF in Japan.
S22 (Safe Electrical Design) TF
Some line items of Doc. 4605D (misc. line item revisions to S22) approved. Reviewing responses to failed items and Doc. 4316H (alignment of criteria in S2 and S22). Planning to ballot Docs. 4316I and 4605E in C4-11.
S25 Revision TF
Reviewing responses to S25 reapproval ballot; starting work on revisions to S25. Planning to ballot Doc in C4-11.
FPD System Safety Liaison, Lifting Equipment TF, S1 Update, S2 Machinery Directive Mapping, and S13 Support – nothing to report or inactive.
April 2011
NA EHS Liaison Report

14. Regional Staff Contact Information
Name
Ian McLeod
Phone
Office Address
SEMI Headquarters (San Jose)
Committees etc.
Compound Semiconductor Materials Environmental, Health, and Safety Flat Panel Display (inactive) Liquid Chemicals Metrics Physical Interfaces & Carriers Membership
April 2011
NA EHS Liaison Report