Applications: CO Gas Sensor

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Presentation transcript:

Applications: CO Gas Sensor CSE 495/595: Intro to Micro- and Nano- Embedded Systems Prof. Darrin Hanna

CO Gas Sensors many gas sensors operate by adsorption of gas molecules to surface resistance of a metaloxide changes . adsorbed gas molecules interact with the surface one or more conduction electrons get trapped reduces surface conductivity resistance is inversely proportional to a fractional power of the gas concentration class of sensor materials include the oxides of tin (SnO2), titanium (TiO2), indium (In2O3), zinc (ZnO), tungsten (WO3), and iron (Fe2O3).

CO Gas Sensors Each metal oxide is sensitive to different gases tin oxide -- detecting alcohol, hydrogen, oxygen, hydrogen sulfide, and carbon monoxide indium oxide -- ozone (O3) zinc oxide -- detecting halogenated hydrocarbons humidity variations in material properties require individual calibration

CO Gas Sensors The MiCS series of carbon monoxide sensors from MicroChemical Systems a tin-oxide, thin-film sense resistor over a polysilicon resistive heater

CO Gas Sensors heater maintains the sensor at an operating temperature between 100° and 450ºC, reduces effects of humidity The sense resistor and heater reside over a 2-µm-thick silicon membrane to minimize heat loss through the substrate.

CO Gas Sensors only 47 mW is sufficient to maintain the membrane at 400ºC! four electrical contacts two connect to the tin-oxide resistor two connect to the polysilicon heater flow a constant current through the sense element and record the output voltage

CO Gas Sensors

CO Gas Sensors Sample Fabrication form heavily doped, p-type, 2-µm-thick layer epitaxial growth or ion implantation deposit silicon nitride CVD to deposit a polysilicon film shape into heater polysilicon film is doped during the CVD process

CO Gas Sensors Sample Fabrication deposit oxide layer and etch contact holes electrically isolate the polysilicon heater from the tin-oxide tin-oxide layer is deposited by sputtering tin and oxidize pattern tin-oxide layer and etched in the shape of the sense element sputter and pattern aluminum for contacts

CO Gas Sensors Sample Fabrication etch from the back side in potassium hydroxide thin membrane by stopping on the p-type layer a masking layer (e.g., silicon nitride) on the back side of the substrate and protection of the front side are necessary.

CO Gas Sensors Specification apply to the heater a 5-V pulse for 5s, followed by a 1-V pulse lasting 10s 400ºC during the first interval decreasing to 80ºC during the second pulse resistance measurement at 9.5s into the second 10-s long pulse demonstrates a response from 10 to 1,000 parts per million (ppm) of carbon monoxide (CO) humidity range of 5 to 95%. output signal shows a square-root dependence on CO concentration, with little dependence on humidity for CO concentrations above 60 ppm.