1. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 1 Introduction to Electronic Circuit Design Richard R. Spencer Mohammed S. Ghausi

2. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 2 Figure 3-1 CMOS inverter

3. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 3 Figure 3-2 Cross section of the final CMOS integrated circuit. The PMOS transistor is shown on the left and the NMOS device is on the right. Remember that the bulk, or substrate, of each device is tied to its source (not shown in this cross section)

4. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 4 Figure 3-4 Mask #1 patterns the photoresist. The Si 3 N 4 layer is removed by dry etching where it is not protected by the photoresist. Following initial cleaning, an SiO 2 layer is thermally grown on the silicon substrate. An Si 3 N 4 layer is then deposited by LPCVD. Photoresist is spun on the wafer to prepare for the first masking operation. The result of the first masking operation is shown below in Figure 3-4.

5. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 5 Figure 3-6 Photoresist is used to mask the regions where PMOS devices will be built using Mask #2. A boron implant provides the doping for the P wells for the NMOS devices. After the photoresist is stripped, the field oxide is grown. Then the Si 3 N 4 layer is stripped off and a new layer of photoresist is spun on prior to Mask #2 being used. The result of using Mask #2 is shown in Figure 3-6 below.

6. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 6 Figure 3-7 Photoresist is used to mask the regions where NMOS devices will be built using Mask #3. A phosphorus implant provides the doping for the N wells for the PMOS devices. The wells are then driven in by further high temperature processing.

7. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 7 Figure 3-9 After photoresist is spun onto the wafer, Mask #4 is used to define the NMOS transistors. A boron implant adjusts the N- channel V th.

8. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 8 Figure 3-10 After photoresist is spun onto the wafer, Mask #5 is used to define the PMOS transistors. An arsenic implant adjusts the P- channel V th.

9. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 9 Figure 3-13 Photoresist is applied, and Mask #6 is used to define the regions where MOS gates are located. The polysilicon layer is then etched by means of plasma etching. After Mask #5, the thin oxide is etched back to bare silicon and a new gate oxide is grown. A layer of polysilicon is deposited and implanted with phosphorous to make it conductive. Then, Mask #6 is used to define the gates as shown in Figure 3-13 below.

10. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 10 Figure 3-14 Mask #7 is used to cover the PMOS devices. A phosphorus implant is used to form the tip or extension (LDD) regions in the NMOS devices. After removal of the patterned resist and spinning on a new layer of photoresist, Mask #7 is used to produce the structure shown in Figure 3-14 below.

11. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 11 Figure 3-15 Mask #8 is used to cover the NMOS devices. A boron implant is used to form the tip or extension (LDD) regions in the PMOS devices. After removal of the patterned resist and spinning on a new layer of photoresist, Mask #8 is used to produce the structure shown in Figure 3-15 below.

12. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 12 Figure 3-18 After a thin “screen” oxide is grown, photoresist is applied and Mask #9 is used to protect the PMOS transistors. An arsenic implant then forms the NMOS source and drain regions. After removal of the patterned photoresist, SiO2 is deposited and anisotropically etched to leave sidewall spacers along the edges of the polysilicon.

13. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 13 Figure 3-19 After photoresist is applied, Mask #10 is used to protect the NMOS transistors. A boron implant then forms the PMOS source and drain regions.

14. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 14 Figure 3-24 Photoresist is applied and Mask #11 is used to define the regions where TiN local interconnects will be used. The TiN is then etched. After Mask #10, a high-temperature drive in activates all the implanted dopants and diffuses junctions to their final depths. An unmasked then removes the oxide from the source and drain regions and from the top of the polysilicon. Titanium is then sputtered onto the surface and is reacted in an N 2 ambient to form TiS 2 where it contacts silicon or polysilicon and TiN elsewhere.

15. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 15 Figure 3-27 Photoresist is spun onto the wafer. Mask #12 is used to define the contact holes. The deposited SiO 2 layer is then etched to allow connections to the silicon, polysilicon, and local interconnect regions. After Mask #11 is used, the photoresist is stripped, a conformal oxide layer is deposited by LPCVD, and chemical-mechanical polishing (CMP) is used to planarize the surface.

16. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 16 Figure 3-29 Aluminum is deposited on the wafer by sputtering. Photoresist is spun onto the wafer, and Mask #13 is used to define the first level of metal. The Al is then plasma etched. A thin TiN barrier-adhesion layer is deposited on the wafer by sputtering, followed by deposition of a W layer by CVD.

17. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 17 Figure 3-30 The steps to form the second level of Al interconnect follow those in Figures 3-25 through 3-29. Mask #14 is used to define via holes between metal 2 and metal 1. Mask #15 is used to define metal 2. The last step in the process is the deposition of a final passivation layer, usually Si 3 N 4 deposited by PECVD. The last mask (#16) is used to open holes in this mask over the bonding pads.

18. Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 18 Figure 3-31 Junction-isolated bipolar transistors. (a) A vertical npn transistor. (b) A lateral pnp transistor.