1. NEW SENSING DEVICES FOR IMPROVING THE QUALITY OF LIFE Interest in FP 6 call: 'Nanotechnologies and nanosciences, knowledge-based multifunctional materials and new production processes and devices - FP6-2004-NMP-TI-4 Thematic area: NMP-2004- 3.4.1.1 Towards converging technologies - new solutions to improve the quality of life e.g. by helping to alleviate the effect of disabilities or creating new types of nanotransducers - research at the frontiers of knowledge addressing nanoscience approaches together with biotechnologies and information technologies jointly with social, cognitive and/or neurosciences. Laboratory of microsystems for bio-medical and environmental applications National Institute for R&D in Microtechnologies - IMT Bucharest http://www.imt.ro

2. Expertise in: Microsystems fabrication – design, simulation, technology, testing for chemo and biosensors: Pressure sensors; Concentration vapour sensors; Biosensors; Microelectrodes for recording neural activity; Bulk and surface micromachining; Polymeric sensitive layers for chemical and biological sensors Process development: Wet and Electrochemical Anisotropic Etching of Silicon; Silicon Wafer Bonding; Double side alignment; Thin layers deposition (Si3N4, SiON, Polysilicon, PSG, BPSG, CVD); Spin deposition of thin film sensitive polymers National Institute for R&D in Microtechnologies - IMT Bucharest http://www.imt.ro

3. http://www.imt.ro Projects examples: Microprobe for recording/stimulation of the electrical activity of cells and tissues: - Stimulating probes for many prosthetic applications should be able to deliver constant current pulses into the tissue through multiple sites precisely spaced on a substrate. - The extracellular potential recording permits the investigation of the central nervous activity - The compatibility between the materials used in the semiconductor fabrication and the human body was analysed. Microprobe photo with the optical microscope SEM Microprobe photo

4. National Institute for R&D in Microtechnologies - IMT Bucharest http://www.imt.ro Projects examples: Calorimetric Microsensor for Methane detection based on Alumina thin Film: - Ceramics: Alumina - Incorporated materials in Alumina: Platinum, palladium; - Deposition methods for thin films: spinning, sol-gel; - Characterisation methods: X-ray, AFM, SEM - Applications: thin layers alumina used for the fabrication of integrated sensors polymer layers with controlled film characteristics for Chemo sensors; Detection of flammable gases (e.g. methane) - domestic applications, mining industry, chemical industry and many more. Design and technological steps presentation for the calorimetric sensor

5. National Institute for R&D in Microtechnologies - IMT Bucharest http://www.imt.ro Projects examples: Gas sensor SnO 2 based, on alumina substrate : - The rounded shape of the heating resistor gives an uniform temperature distribution, with the maximum temperature in the center of the circle. - By applying voltages on the pads, the resistor heats up to 400 degrees Celsius Full layout 3D Model

6. National Institute for R&D in Microtechnologies - IMT Bucharest http://www.imt.ro Contact person for the Laboratory of microsystems for bio- medical and environmental applications Laboratory of microsystems for bio- medical and environmental applications: Dr. Carmen Moldovan E-mail: cmoldovan@imt.ro Tel: 021 490 82 12 Fax: 021 490 82 38 http://www.imt.ro