The PGL Nanoruler Scans a Small Beam of Fringes Across a Large Substrate. SBIL – Scanning-Beam Interference Lithography VPSBIL – Variable Period SBIL

PGL Proprietary Information 910mm x 420mm Grating Substrate loaded onto the Nanoruler Current maximum size is about 96 cm x 60 cm

PGL Proprietary Information Improvement in Gold Gratings

PGL Proprietary Information 4 Hybrid Gratings (Metal with dielectric over-layers) have been produced in small samples. Duty cycle versus Grating Depth (Height) Hafnium Oxide/SiO2/Gold Hybrid grating provide challenges in fabrication but may provide a higher laser damage threshold. A SEM of a hybrid grating (Hafnia/Silica/Gold)

PGL Proprietary Information MLD Grating Improvements Etched Photoresist LFEX – Osaka 2 beamlines are populated with gratings → Goal for MLDs is to produce grating structures which are tall and thin to minimize e-field exposure for high LDT

PGL Proprietary Information 1.5 to 2 meters gratings – Current technologies are scalable 2 – meter Bar mirror Simple Light-weighted Substrate Wavefront improvements rely mostly on improving metrology before and after measurements, thermal control (use fused silica!), and mounting inprovements during imprinting. Imprinting accuracy is high (< 10nm) – at right is a 280 nm period resist grating written in between an oxide grating to produce a 140 nm grating!