IIIV Cleanroom Induction

Laminar flow downwards Cleanroom technology? A room in which the airborne particle level is controlled to a specific limit This limit is generally defined as the ‘classification’ of the room Three standards exist -US Federal, British and European. Clean air in – temp/hum Fan filter units Plenum Return air Laminar flow downwards Cleanroom Sub Fab

U.S. Federal Standard 209(E) Classification is maintained by regulating a) the air supply b) air distribution c) filtration of the air supply d) materials of construction and e) operating procedures Ballroom – Class 10,000 …currently ~100 particles/cu. ft Yellow room – Class 100 …currently ~10 particles/cu. ft

What is a particle? Minute quantity of dust, or other material, not visible to the human eye Human hair 50 microns Dust 25 microns Other 0.5 microns Device yield and/or reliability can be affected by particles smaller than 1/10 of the minimum feature size Ballpoint pen Skin Flake

Particle sources Process equipment Processing environment, including people in the environment Raw materials People Skin Flakes Hair Saliva Perspiration Clothes Fingerprints Handling Cosmetics Smokers – tar particles Particle emissions by humans

Gowning procedure Enter the gowning area by using your swipe card. Immediately inside the door, pull on blue overshoes over your street shoes. Walk on the tak-mat with both feet. If you are a smoker you must drink the equivalent of a cup of water from the cooler. Gowns are stored on hangers, boots in the cubby holes. Frequent users will have a named hanger. Do not take gowns from the storage bins only from the hangers. Put on the cleanroom garments in the following order. If you have a beard or moustache, put on a beard mask or a yashmak. Put on the hood, the fasteners at the neck of the hood should be fully closed. Then put on the gown, ensuring to close the fasteners at the wrist and neck. Put on the boots, pulling them up outside the legs of the gown, tie by tightening the adjustable buckle. Lastly fit a pair of disposable gloves and a pair of safety glasses - You must provide your own safety glasses.

(cont) On leaving the cleanroom take off the cleanroom garments in reverse order, boots, gown and hood. Return the gown to the correct hanger, and boots to correct cubby hole. On the way out of the cleanroom place the disposable items in the bin by the door, gloves, beard mask and overshoes. The swipe card will open the door.

Entering the cleanroom Walk with both feet on the tak-mat in front of the airshower door. Open the airshower door, no more than two people should enter the airshower together. Step into the airshower, close the door and stand between the air nozzles. The shower will activate automatically, turn around at least once in the air stream, arms should be held out from the body. After the airstream has ceased, push open the inner door to enter the cleanroom. Leaving the cleanroom Pull open the airshower door and enter. Allow the door to close then push open the exit door and proceed to the gowning area.

Evacuation If an alarm sounds while you are working in the cleanroom, leave immediately via the nearest exit. Once safely outside please remove your over boots and carry in your hands as concrete damages the soles. Walk around to the assembly area on the Mardyke. When you return to the building please bring all cleanroom garments back to the gowning area and place in the laundry locker. Clean suits will be provided to replace.

Geography Emergency exit Emergency exit Block C Atrium Emergency exit

IIIV wet benches – CG.06 Wave etch tool Equipment bench Chemical Thinning Plating Etch / Aqueous Lift-off / solvent Emergency shower Hexafluorine & Diphoterine Emergency shower

IIIV wet benches – Lithography CG.11 Full face visors must be worn at all times when working at wet benches. Hexafluorine for HF/BOE exposure. Diphoterine for all other chemicals. Dispose of chemicals and rinse out glassware after use. Wear thick rubber gloves and apron when using acids or bases (includes BOE), nitrile for solvents. Hexafluorine & Diphoterine Emergency shower/eyewash Develop / Aqueous Spin coat / solvent

Prohibited materials Toolboxes other than those kept inside the fab by the maintenance group. Aerosols. Brushes. Pencils/Erasers. Chalk. Sandpaper. Polishing compounds. Lubricants other than those approved. (Approved lubricants are silica based grease specifically for use in cleanrooms). Velcro. Cardboard/Wood/Paper (other than approved cleanroom paper). Drills/Sanders/Cutting Tools, other than by special arrangement. Tissues. Dirty wafer or sample boxes. Dry chemicals

Prohibited Activities Removing cleanroom garments inside the cleanroom. Bringing prohibited materials into the room. Removing items from beneath cleanroom garments while inside the cleanroom, e.g. mobile phone. Wearing of any cosmetics. Drinking, eating, or smoking. Wearing dirty cleanroom garments. Bringing uncleaned tools or equipment into the room. Wearing cleanroom garments outside the cleanroom. Placing tools on product work surfaces or tables Entering the cleanroom by routes other than through the air shower

Safety eyewear to be worn at all times except at microscopes. Cleanroom procedures Safety Alarms Fire and/or high level gas – voice evac – leave cleanroom and building. Gas low level - siren/blue flashing beacon – leave cleanroom. DI water quality – green flashing beacon. Safety eyewear to be worn at all times except at microscopes. Full face protection must be worn at all chemical wetbenches. Emergency showers, Hexafluorine, Diphoterine, as in 1.05. First aid kit in gowning area. New chemicals must be approved by Dan O’Connell before being brought into cleanroom. MSDS must be given to Dan. The chemical must be labelled with your name and expiry date. All accidents must be reported to the Fab manager or Safety Officer. Risk assessments for chemicals & equipment are available in the Material zone.

Bringing samples into the cleanroom Clean down sample container in gowning area with IPA before entering the fab. Do not open container unless processing/measuring sample. If in doubt – ask. Bringing items, tools, fittings into the cleanroom All items, tools, and fittings must be wiped down with IPA wipes prior to being brought into the cleanroom, this must be done on each occasion. If power tool then the cable and plug must also be cleaned down. A tub of wipes is available in the gowning area. Wear disposable gloves when wiping down. The Material zone and service chases still require full gowning at all times and compliance with cleanroom disciplines.

Cleanroom procedures No paper! Includes labels on sample boxes, lab books, etc. Manuals available in material zone. Cannot enter cleanroom from material zone, wipe down area, or service chase, you must pass through airshower. Any manual scribing or wafer breaking to be done in clean air hood. No grinding in cleanroom, can be done in material zone. Chemical thinning on thinning wet bench. Hotplates must not be left on and unattended. Clean up equipment after use such as spinners. Do not leave chemicals in beakers etc., rinse out and leave to dry. Clean up all minor spills yourself. Repeated abuse of procedures will mean suspension of access. Access to the fab will be suspended after the third warning.

Contamination issues – Microsystems & IIIV sharing same space, therefore no traffic from IIIV tools to Microsystem tools, includes wet benches! Tweezer protocols – tweezers are tool specific not person specific. Microsystems tweezers are teflon coated (green). Glassware Do not use Microsystem’s glassware for IIIV processing. MS glassware is marked. IIIV glassware not be used for substrates that may be processed on Microsystem tools-use MS glassware. Wafer boxes Do not use Microsystem’s wafer boxes for IIIV substrates. MS wafer boxes are marked blue or with blue sticker. Chemical storage Do not use chemicals from MS either wet bench or storage. Storage marked accordingly.

Facility usage charge Currently €657/month Or daily €62/day Full list of charges available on \\File1vs\Documents\john.pike\My Documents\Shared You must log your usage of the Lithography and/or daily use Three pc’s in cleanroom that run the lab database can be used for logging usage, accessing your process details etc. Please return the logon to casper.user (Pa$$w0rd). Form ‘Tyndall-035F16’ needs to be completed before access can be granted. Finally – if in doubt ask first!

LIMS Laboratory management system Web based, easy to use Data is stored offsite Initially will be used for equipment booking, training, etc. Aim – will replace current system and be used for lab charges. LIMS currently on a trial basis You must be a ‘user’ to log on and book equipment or request training Start here … http://lims.tyndall.ie

Changes in lab charges All tools now charged by hour (previously by run) Lithography charged by tool Charges will be by booked slots 1st April for charging Projects current over the last two months are in the system. Please notify me of any new projects.