P. Lechner IWORID 2002 Peter Lechner MPI Halbleiterlabor & PNSensor GmbH 1 X-ray imaging spectrometers in present and future satellite missions

P. Lechner IWORID 2002 MPI Semiconductor Lab X-ray Astronomy pnCCDXMM-Newton Framestore pnCCDROSITA Active Pixel SensorXEUS Conclusion 100 % personally biased apologies! 1 X-ray imaging spectrometers in present and future satellite missions

P. Lechner IWORID 2002 MPI semiconductor laboratory common institution of the Max-Planck-Institutes for Physics and for Extraterrestrial Physics founded in scientists, engineers, technicians, students strip detectors for ALEPH/CERN development of novel detectors  high energy physics ALEPH, CERN HERA-B, DESY  astrophysics XMM-Newton, XEUS, ROSITA, MEGA, SVOM  related fields synchrotron radiation experiments  technology transfer Silicon Drift Detectors for X-ray spectroscopy industrial applications 2 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 pnCCD camera for XMM-Newton development of novel detectors  high energy physics ALEPH, CERN HERA-B, DESY  astrophysics XMM-Newton, XEUS, ROSITA, MEGA, SVOM  related fields synchrotron radiation experiments  technology transfer Silicon Drift Detectors for X-ray spectroscopy industrial applications 2 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion MPI semiconductor laboratory common institution of the Max-Planck-Institutes for Physics and for Extraterrestrial Physics founded in scientists, engineers, technicians, students

P. Lechner IWORID 2002 Silicon Drift Detector Array for EXAFS, X-ray holography development of novel detectors  high energy physics ALEPH, CERN HERA-B, DESY  astrophysics XMM-Newton, XEUS, ROSITA, MEGA, SVOM  related fields synchrotron radiation experiments  technology transfer Silicon Drift Detectors for X-ray spectroscopy industrial applications 2 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion MPI semiconductor laboratory common institution of the Max-Planck-Institutes for Physics and for Extraterrestrial Physics founded in scientists, engineers, technicians, students

P. Lechner IWORID 2002 Silicon Drift Detector modules for X-ray fluorescence analysis and electron microprobe analysis development of novel detectors  high energy physics ALEPH, CERN HERA-B, DESY  astrophysics XMM-Newton, XEUS, ROSITA, MEGA, SVOM  related fields synchrotron radiation experiments  technology transfer Silicon Drift Detectors for X-ray spectroscopy industrial applications KETEK GmbH 2 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion MPI semiconductor laboratory common institution of the Max-Planck-Institutes for Physics and for Extraterrestrial Physics founded in scientists, engineers, technicians, students

P. Lechner IWORID 2002 MPI semiconductor laboratory... with modern, custom made facilities for a full 6-inch silicon process line800 m² cleanroom up to class 1... mounting & bondingtest & qualificationsimulation, layout & data analysis 3 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 X-ray astronomy 4 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion access to hot matter and energetic processes  supernovae  X-ray bursters  neutron stars  X-ray binaries  pulsars  black holes  quasars

P. Lechner IWORID 2002 X-ray astronomy - instrumentation 5 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion telescope collimator, coded mask mirror telescope ´Wolter-I´ grazing angle reflection (microchannel plate) XMM mirrors

P. Lechner IWORID 2002 X-ray astronomy - instrumentation 5 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion telescope collimator, coded mask mirror telescope ´Wolter-I´ grazing angle reflection (microchannel plate) focal plane proportional counter CCD ASCA, Chandra, XMM-Newton APS XEUS (high-Z semiconductors, cryogenic detectors) XMM-Newton Chandra

P. Lechner IWORID 2002 pnCCD principle MOS-CCD (´video CCD´) MOS transfer gates buried channel partial depletion frontside illumination serial readout 6 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 pnCCD principle MOS-CCD (´video CCD´) MOS transfer gates  implanted pn-junctions buried channel  deep transfer partial depletion  full depletion frontside illumination  back entrance window serial readout  1 preamp / channel pnCCD 6 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 pnCCD performance largest monolithic CCD 6 x 6 cm² 384 x 400 pixel 150 µm pixel fast readout 5 msec full frame low noise 4 el. rms high quantum efficiency 90 % radiation hard 400 Mp/cm² 7 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 pnCCD performance 7 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion largest monolithic CCD 6 x 6 cm² 384 x 400 pixel 150 µm pixel fast readout 5 msec full frame low noise 4 el. rms high quantum efficiency 90 % radiation hard 400 Mp/cm²

P. Lechner IWORID 2002 pnCCD performance 7 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion largest monolithic CCD 6 x 6 cm² 384 x 400 pixel 150 µm pixel fast readout 5 msec full frame low noise 4 el. rms high quantum efficiency 90 % radiation hard 400 Mp/cm²

P. Lechner IWORID 2002 pnCCD performance 7 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion largest monolithic CCD 6 x 6 cm² 384 x 400 pixel 150 µm pixel fast readout 5 msec full frame low noise 4 el. rms high quantum efficiency 90 % radiation hard 400 Mp/cm²

P. Lechner IWORID 2002 pnCCD vs. MOS-CCDs backside illumination full depletion large pixels, parallel readout 8 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 XMM-Newton – the satellite 3 imagers 2 MOS-CCD + RGS 1 pnCCD pointing at one source energy range keV Wolter-I telescopes 58 nested mirror shells eff. area0,5 m² (1 keV) focal length7,5 m FOV30 arcmin resolution15 arcsec highly excentric orbit 48 h perigee: km apogee: km 9 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 XMM-Newton – integration & launch 10 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion mounting of pnCCD camera satellite integration mirror system

P. Lechner IWORID MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion launch by ARIANE-V from Kourou 10–Dec–1999 XMM-Newton in orbit XMM-Newton – integration & launch

P. Lechner IWORID 2002 XMM-Newton – first light large Magellanic cloud supernova remnant 1987A 11 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 XMM-Newton - observations remnant of supernova observed by Tycho Brahe in 1572 energy [keV] relative intensity element distribution 12 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 XMM-Newton - observations Lockman hole: a look into deep space first observation of ´green´ and ´blue´ hard x-ray sources no diffuse background? 12 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 pnCCD – performance in space perfect imaging since launch 500 revolutions > 1000 observations no significant change of energy resolution and charge transfer efficiency few pixels lost in rev. 156 impact of micro-meteorite? effect reproduced on ground using a dust accelerator 13 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 pnCCD - limitation charge transfer speed limited by the time needed for readout ´out of time´ events pnCCD: ~ 6 % 14 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 framestore pnCCD frame store area  separation transfer / readout  reduction of out-of-time events 6 % (XMM)  0.4 % prototypes under test  smaller pixels (75 µm)  improved performance 15 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 ROSITA ROSITA - ROentgen Survey with an Imaging Telescope Array point sources diffuse background 16 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 XEUS – X-ray Evolving Universe Spectroscopy 17 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion X-ray telescope with large aperture energy range 100 eV keV scientific aim: investigation of the universe at an early evolution stage two spacecrafts - mirror spacecraft Wolter-I telescope effective area: 6 m² (30 1keV - detector spacecraft focal plane instrumentation - 2 narrow field imagers - 1 wide field imager

P. Lechner IWORID 2002 XEUS WFI vs. XMM-Newton XMMXEUS WFI energy range keV keVthickness 300 µm  500 µm focal length7.5 m50 m angular resolution15 arcsec2 arcsec focal plane res.36 µm / arcsec250 µm / arcsecpixel size150 µm  75 µm field of view30 arcmin5 arcmindetector area6 x 6 cm²  7.6 x 7.6 cm² collection area 1keV0.5 m²6 m² (30 m²)readout speed time resolution70 msec msecreadout speed operating temp.130 K> 180 K Active Pixel Sensor  1 integrated preamp / pixel  random accessible pixels  no charge transfer within silicon 18 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 DEPFET DEPFET – DEpleted P-channel Field Effect Transistor 19 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion p-FET (JFET or MOSFET) on depleted n-Si bulk local potential minimum for electrons  ‘internal gate‘ current change prop. to number of charges in the ‘internal gate‘  I > 200 pA / electron nondestructive readout charge integration and storage in ON and OFF state reset through clear contact, supported by clear gate backside illuminated

P. Lechner IWORID 2002 DEPFET – simulation 20 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 DEPFET – active pixel sensor 21 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 DEPFET – active pixel sensor 22 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 DEPFET – active pixel sensor BioScope for autoradiography (University Bonn) 23 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 DEPFET – status test of isolated pixel JFET-based DEPFET L = 5 µm, W = 50 µm time-continuous filter ______________________ production of APS prototypes 64 x 64 new readout chip under test new control chip submitted 24 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion

P. Lechner IWORID 2002 Conclusion 25 MPI laboratory X-ray astronomy pnCCD framestore pnCCD active pixel sensor conclusion X-ray astronomy  driving force in semiconductor detector development novel detectors  new view to the X-ray sky... no end in sight...

P. Lechner IWORID 2002 Thanks L. Andricek, D. Hauff, P. Klein*, G.Lutz, R.H. Richter, M. Schnecke, P. Solc* Max-Planck-Institut für Physik, Munich, Germany H. Bräuninger, S. Bonerz, U. Briel, K. Dennerl, J. Englhauser, G. Hartner, G. Hasinger, T. Johannes*, S. Kemmer*, J. Kollmer, N. Krause*, N. Meidinger, E. Pfeffermann, E. Ruttkowski, G. Schaller, F. Schopper, D. Stötter*, L. Strüder, J. Treis, J. Trümper Max-Planck-Institut für extraterrestrische Physik, Garching, Germany R. Eckard, R. Hartmann, K. Heinzinger, P. Holl, P. Lechner, H. Soltau, U. Weichert PNSensor GmbH, Munich, Germany N. Findeis*, J. Kemmer, S. Krisch*, R. Stötter, U. Weber* KETEK GmbH, Munich, Germany E. Kendziorra, K. Kramer, R. Staubert Astronomisches Institut Tübingen, Tübingen, Germany P. Fischer, W. Neeser*, I. Peric, M. Trimpl, J. Ulrici, N. Wermes University of Bonn, Bonn, Germany W. Buttler Ingenieurbüro Buttler, Essen, Germany E. Gatti, A. Longoni, M. Sampietro Politecnico di Milano, Milan, Italy P. Rehak Brookhaven National Laboratory, Upton, NY, USA 26