1. Semi-conductor Detectors HEP and Accelerators Geoffrey Taylor ARC Centre for Particle Physics at the Terascale (CoEPP) The University of Melbourne

2. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Outline Semiconductor Detectors Semiconductor Detectors A Brief Overview A Brief Overview Radiation Damage Radiation Damage Silicon Strip Detectors Silicon Strip Detectors Pixel Detectors Pixel Detectors Hydrid Pixel Detectors Hydrid Pixel Detectors Integrated Devices Integrated Devices MAPS MAPS DEPFET DEPFET HV-CMOS and HR-CMOS HV-CMOS and HR-CMOS 3D geometry 3D geometry Diamond Detectors Diamond Detectors LHC LHC SuperKEKB SuperKEKB Outlook Outlook 2

3. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Basics 3 Kemmer Process (eg. NIM 226 (1984) 89-93) Basic Semiconductor materials: SiliconGeGaAsCdTeCdZnTeDiamond Silicon Carbide, …

4. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Semiconductor Detectors Semiconductor Diode detectors have been used, and highly evolved for decades. Semiconductor Diode detectors have been used, and highly evolved for decades. Technology highly developed but high specialised. Technology highly developed but high specialised. 4

5. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Sophisticated integration … 5

6. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Double-sided Silicon Detectors 6

7. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 n-side (back-side) n-side (back-side) positive (fixed) charge at SiO 2 - Si interface attracts electrons to n-side. positive (fixed) charge at SiO 2 - Si interface attracts electrons to n-side. Electron accumulation shorts n-side electrodes Electron accumulation shorts n-side electrodes p + “isolation” required p + “isolation” required 7 e - accumulation layer Oxide layer

8. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Radiation Damage Three main macroscopic effects are seen in high- resistivity diodes following energetic hadron irradiation: Change of the doping concentration with severe consequences for the operating voltage needed for total depletion. Fluence proportional increase in the leakage current, caused by creation of recombination/generation centres Deterioration of charge collection efficiency due to charge carrier trapping leading eventually to a reduction in the signal height produced by mip’s. 8

9. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Defect Engineering Defect Engineering Thin detectors Thin detectors High Bias Operation High Bias Operation 9

10. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 10

11. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Effect of Temperature Strong current reduction with reduced temperature. Strong current reduction with reduced temperature. (also Current Annealing) (also Current Annealing) Reverse Annealing of Effective Carrier concentration Reverse Annealing of Effective Carrier concentration 11

12. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Hybrid Pixel Detectors Electronics chip and sensor chip independently produced, bump bonded Electronics chip and sensor chip independently produced, bump bonded 12

13. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Integrated Pixel Detectors - MAPS Electronics and detector element on a single substrate Electronics and detector element on a single substrate 13

14. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Silicon Drift Detectors Positive Electrodes set up Drift Potential Positive Electrodes set up Drift Potential Electrons drifted to readout anode pads. Electrons drifted to readout anode pads. Time/position -> 2D position. Time/position -> 2D position. 14 F. Hartmann, Springer, 2009

15. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Integrated Pixel Detectors - DEPFET Belle II Pixel detector Belle II Pixel detector 15

16. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Thinning of silicon detectors eg. Belle II PXD eg. Belle II PXD Rather complicated process. Rather complicated process. Major benefits Major benefits 16

17. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Integrated Pixel Detectors: HV-CMOS and HR-CMOS With a High Resistivity Substrate, the deplection region can be increase over that of the MAPS detectors. With a High Resistivity Substrate, the deplection region can be increase d over that of the MAPS detectors. CMOS processing widely available, adaptable to HV and HR modification CMOS processing widely available, adaptable to HV and HR modification 17

18. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 HR-CMOS Options 18 Drift structure Triple Well Structure Simple well structure

19. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Integration Possibilities, HV-CMOS/HV-CMOS Hybrid Pixel Development Amplifier / Discriminator (~100 transistors) per Pixel, Bonded to Digital R/O Chip (>100M transistors) Amplifier / Discriminator (~100 transistors) per Pixel, Bonded to Digital R/O Chip (>100M transistors) 19 Long-term aim: full integration on single, depleted substrate: Long-term aim: full integration on single, depleted substrate: F.Hugging, Bonn - AIDA-2 15/4/2014

20. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 20

21. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 ATLAS Diamond Beam Condition Monitor and Beam Loss Monitor 21

22. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Diamond Beam Monitor 22 Diamond offers advantages: Diamond offers advantages: radiation hardness radiation hardness fast signal response fast signal response simple processing simple processing

23. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Diamond Detectors 23 Diamond Beam Monitor IBL Pixel Layer

24. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Si/Diamond as Cryogenic BLM Both seem capable of operation at LHe temperatures Both seem capable of operation at LHe temperatures Suggest operation of BLM within magnet cryostat Suggest operation of BLM within magnet cryostat 24 Kurfurst et al., NIM A782 (2015) 149

25. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 LHC Diamond detectors in beam monitoring. Diamond detectors in beam monitoring. 3-D Detectors in ATLAS vertex detector 3-D Detectors in ATLAS vertex detector 25

26. From talk, J. Lange, ATLAS 3D Group RD50 Workshop 22-24 June, 2015

28. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 “Forward” Physics Detectors Very small angle proton scattering: Very small angle proton scattering: Good spatial resolution (~10um) Good spatial resolution (~10um) Sensitivity close to edge. Sensitivity close to edge. Good radiation intolerance. Good radiation intolerance. 3D detectors very promising. 3D detectors very promising. 28

29. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 29 J. Lange et al., JINST 10 (2015) C03031

30. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 SuperKEKB - Diamond Beam Monitor Belle II Pixel and Strip Vertex Detector (VXD) Abort monitors Belle II Pixel and Strip Vertex Detector (VXD) Abort monitors 30

31. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Belle II PXD Beam Abort 31

32. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 – Based on experience from Belle, BaBar, CDF, LHC – scCVD diamond sensors, measurement of currents: - typical pCVD sensor @ 500V: 1nA = 7 mrad/s = 70 μGy/s - Noise a few pA, in current measurements 32

33. Geoffrey Taylor - HEP Semiconductor Detectors IBIC2015 Outlook Silicon and Diamond detectors effective for both HEP detectors and Beam Monitoring / Beam Loss role. Silicon and Diamond detectors effective for both HEP detectors and Beam Monitoring / Beam Loss role. Pixel devices essential for high rate / high luminosity environments (SuperKEKB, LHC, HL- LHC) Pixel devices essential for high rate / high luminosity environments (SuperKEKB, LHC, HL- LHC) Si and Diamond capable of cryogenic operation Si and Diamond capable of cryogenic operation HR-CMOS, HV-CMOS offer future technology for significant integration options. HR-CMOS, HV-CMOS offer future technology for significant integration options. 33