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Presentation transcript:

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate Add nitride

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate Add Poly0

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate Patterning through 1st level mask (Poly0) using Photolithography Photoresist Patterned Photoresist

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate Patterned Photoresist Removal of Unwanted Poly0 using Reactive Ion Etching

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate 1st Oxide Deposition using LPCVD

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate Patterning through 2nd level mask (Dimple) using Photolithography... Photoresist and Deep RIE

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate Patterning through 3rd level mask (Anchor) using Photolithography Photoresist and Deep RIE

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate Blanket un-doped polysilicon deposition(Poly1) using LPCVD... followed by PSG deposition and annealing

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Silicon Substrate Patterning through 4th level mask (Poly1) using Photolithography... Photoresist and Deep RIE

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Deposition of 2nd Oxide Layer Silicon Substrate

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Patterning through 5th level mask using photolithography and deep RIE Silicon Substrate

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Patterning through 6th level mask using photolithography and deep RIE Silicon Substrate

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Deposition of undoped polysilicon, Silicon Substrate followed by PSG hardmask layer, then anneal

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Patterning through 7th level mask using photolithography and deep RIE Silicon Substrate

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Patterning through 8th level mask using photolithography and liftoff, followed by removal of unwanted resist and metal in solvent bath Silicon Substrate

Click mouse or hit space bar to advance slides All slides property of Cronos, all rights reserved Release of structures using HF Silicon Substrate