© 2004 Swagelok Company igc ™ II Modular Surface-mount Design Design.

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Presentation transcript:

© 2004 Swagelok Company igc ™ II Modular Surface-mount Design Design

© 2004 Swagelok Company Features of Modular Gas Systems Reduces Space Requirements Facilitates Easy Assembly and Maintenance Reduces Inventory

© 2004 Swagelok Company igc ™ II Simplifies Design and Assembly Reduces Potential Leak Points Reduces Panel Weight Complies with SEMI-PR3.1 Supported by Local Swagelok Distributors Competitive Cost of Ownership

© 2004 Swagelok Company Modular Technology (38.9 mm) 1.53 in in. (31.2 mm)

© 2004 Swagelok Company Open Architecture Surface-mount C-ring Gaskets 3 port 2 port 1 port Surface-mount Seals C-ring Gasket Assembly For Drop-down components

© 2004 Swagelok Company igc ™ II Construction Igc Panel

© 2004 Swagelok Company igc ™ II Construction Substrate Assemblies

© 2004 Swagelok Company igc ™ II Construction Surface-mount Components

© 2004 Swagelok Company Substrate Flow Components Substrate Channel igc ™ II Construction

© 2004 Swagelok Company igc ™ II Construction Substrate Assemblies

© 2004 Swagelok Company igc ™ II Construction Igc Panel

© 2004 Swagelok Company igc ™ II Construction Manifold Flow Components

© 2004 Swagelok Company igc ™ II Construction Mounting Components Base Plate

© 2004 Swagelok Company Substrate Layer Substrate Assembly

© 2004 Swagelok Company Substrate Layer Surface-mountComponents

© 2004 Swagelok Company Substrate Flow Components Drop-down Surface-mountConnector MFC Connectors Substrate End Connector

© 2004 Swagelok Company Substrate Component Substrate Clip Substrate Channel Substrate Layer

© 2004 Swagelok Company Substrate Layer Lock-down plate Substrate Channel

© 2004 Swagelok Company Substrate Layer C-ring Gasket Substrate Channel

© 2004 Swagelok Company Substrate Layer Surface-mount Component Substrate Channel

© 2004 Swagelok Company Substrate Layer

© 2004 Swagelok Company Substrate Layer Load Bearing Insert

© 2004 Swagelok Company Manifold Channel Manifold Component Manifold Clip Manifold Layer

© 2004 Swagelok Company Manifold Assembly Manifold Layer

© 2004 Swagelok Company Manifold Layer Butt Weld End Connection Connection

© 2004 Swagelok Company Manifold Layer Manifold Ports

© 2004 Swagelok Company Manifold Layer Manifold Plug

© 2004 Swagelok Company Manifold Layer Cap

© 2004 Swagelok Company Manifold Clip Manifold Component Cap Screws Manifold Channel Substrate Channel Manifold Layer

© 2004 Swagelok Company Locating Rib Manifold Layer

© 2004 Swagelok Company Manifold Layer Parallel Manifold

© 2004 Swagelok Company Manifold Layer Parallel Manifold Jumper Component

© 2004 Swagelok Company Support Layer Mid-line Support Block Foot Block

© 2004 Swagelok Company AccessoriesAccessories Cartridge Style Heater Clip

© 2004 Swagelok Company AccessoriesAccessories Mass Flow Controller Conversion Plates Cap Vertical Port

© 2004 Swagelok Company igc ™ II