1. Digital PECVD Machine Design and Construction Zlatan Ceric William Edwards Timothy Gurtler David Ogden Quan Tran Date:10/25/2010

2. Project Overview Contracted by Microelectronics Research Center Convert existing RIE to PECVD machine Automation of process will eliminate the need for constant human monitoring Cost of Hardware: $35,000 Building base model for MiRC modification

3. Final Product

4. Design Objectives Continuously monitor chamber vacuum pressure, RF power, and gas flow rate Automate the polymer deposition process Allow for future process modification through HMI

5. RIE to PECVD Conversion Removal of turbo pump Use of one chamber pressure sensor instead of two Removal of old chamber heater Remapping of wires to integrate new design Editing PLC and HMI code to reflect all changes

6. System Hierarchy

7. Chassis Construction Gator Jaw is the material used to build the stand It is customizable and easily changed if needed Plates can be mounted to the frame to provided a surface for components to mount to

8. Component Mounting Din Rail provides a simple mounting solution Standard 35mm width used widely in industrial control systems PLC was designed to mount onto this type of Rail Power supply and terminal blocks also mount to it

9. Centralized Signal Testing Over 70 signals are required for the PLC to manage Having terminal blocks gives a convenient location to test the signals Mounting them onto the din rail gives a clean look for the machine Future manipulations of the machine will also be more convenient

10. PLC Operational Flow Chart

11. HMI Screen Capture

12. Subsystems Interaction Subsystems need a way to interact with each other and PLC Require customized cables Designed 25 pins D-sub type connector for RF power supply Design serial connector for pressure sensors

13. Cable Design 25 pins D-subSerial

14. Testing Challenges Unable to test subsystems individually – Supervisor advised not to turn on components until fully assembled PLC program can isolate subsystem from the whole system to test – Sensor testing scheduled to finish by 11/10 – MFC testing scheduled to finish by 11/15 – RF power testing scheduled to finish by 11/22

15. Current Solution Test customized cables – Verify for coupling and short Benefit of testing cables – Narrow down scope for determine defective components in future system malfunction – Reduce time getting the system working

16. Hardware Schedule Mass Flow Controllers 11/5 Pneumatic Valves 11/8 Touch-Screen HMI 11/10 Wiring Components to Terminal Blocks 11/13

17. Software Schedule PLC Programming 11/5 HMI Programming 11/8 Loading Software 11/10

18. Upcoming construction targets Mounting the bottom of the plasma chamber Requires special supervision - Proper hermetic seal - Surface aberration

19. Phase II Construction MFC must be mounted Plan to test as many subsystems as possible prior to mounting.

20. Budget and Cost Project is exclusively design for Ga Tech MiRC and cannot be used for mass production Parts are donated, salvaged, and funded by: – Ga Tech MiRC – Rockwell Automation A conservative estimate cost of $135,000 including hardware and labor/testing for completed project

21. Cost Breakdown Labor & Testing Assume average GT ECE graduate earns $65K annually Project includes 5 design and implementation members Estimated labor and testing of $100K Hardware Plasma Chamber$2,500 RF Power Supply$6,500 Frame$2,000 MFC x4$8,000 Throttle Valve$5,000 Major components

22. Questions or Comments?