1. MINIATURE MODULAR SAMPLE SYSTEMS – FROM CONCEPT TO REALITY David M. Simko, Swagelok Company Pittcon®2002 New Orleans, March 20, 2002

2. 2 nd GENERATION IGC TECHNOLOGY

3. SYSTEM CONFIGURATOR SOFTWARE EASIER TO DESIGNEASIER TO ASSEMBLE

4. TRADITIONAL VS. MINIATURE MODULAR MEASUREMENT OF PPM H2O AND O2 IN A HIGH PURITY HYDROCARBON STREAM - MINIATURIZED

5. A REAL SYSTEM

6. TRANSFER CONSIDERATIONS SEMICONDUCTOR Quantifiable volume of ultrapure gas to point of use. Few functional components Metal interface seal Basic control requirements SAMPLE SYSTEMS Minimal properly conditioned sample to an analyzer Large variety of functional components Elastomeric interface seal Complex control requirements

7. CONVERSION REQUIREMENBTS Change the substrate Modify the flow components Add additional down mount functional components

8. PRELIMINARY SERVICE TEST RESULTS Easy to design, assemble, install, operate, and monitor Leak-tight No evidence of cross contamination of multiple streams Increased response time

9. NeSSI EVOLUTION GENERATION I Modular, established feasibility GENERATION II Smart, fully automated, intelligent control

10. GENERATION II CHARACTERISTICS CPAC GENERATION II SPECIFICATION Integrates electrical components into Generation I designs Addresses safety requirements for use in hazardous areas Both functional and conceptual

11. SMALL, SMART SAMPLE SENSOR SYSTEMS “Provide plug-and-play hardware components and software which: Tracks reliability and Self-adjusts for optimal performance under variable conditions operations metrics Provides an intuitive self-diagnostic GUI”

12. THE FUTURE Hardware development Full selection of down mount functional components Intelligent components Required sensors Intrinsically safe actuators Agreement on communication protocol Intrinsically safe protection solutions