Microelectronic Engineering Rochester Institute of Technology Dr. Lynn Fuller, page 1 SSI Process Backup using the SVG Lilah Cook MCEE 550 Fall 2013 Factory Improvement Project Dr. Lynn Fuller Revised:

Microelectronic Engineering Rochester Institute of Technology Dr. Lynn Fuller, page 2 SSI & SVG Coat SSI Coat Experiment 2 Wafers coated using Coat.rcp with Oir620 resist Coat.rcp breakdoawn –Acceleration: 15 krpm –Oven 1 temp: 140 (60s) –Oven 2 temp: 90 (60s) –SpinSteps rpm (5s) rpm (5s) rpm (25s) –Automatic dispense SVG Coat Experiment 2 Wafers coated using SVG track with Oir630 resist Created program 6 on SVG track 1b to emulate the spin steps from the SSI –Check oven 1 temp ~140 –Change oven 2 temp ~90 Remove lid on cover for manual dispense Select program 1 on track 1a for the standard prime Select program 6 on track 1b Start 1a then 1b Manually dispense resist when wafers reach spin coater

Microelectronic Engineering Rochester Institute of Technology Dr. Lynn Fuller, page 3 Coat Comparison SVG Wafer 1: A Std 0.36% Wafer 2: A Std 1.00% SSI Wafer 1: A Std 0.92% Wafer 2: A Std 0.81% Spectramap 49 Point Resist Measurements:

Microelectronic Engineering Rochester Institute of Technology Dr. Lynn Fuller, page 4 Pattern and Develop Lightly scribed the back of the SVG wafers and placed all four wafers into the ASML for level 1 and JG n well patterning SSI Develop –Wafers went through the develop.rcp recipe with no problem SVG Develop –SVG track has NO post exposure bake oven so replication would be impossible –Created Program 6 on track 2 which doubles the standard 60 second develop found in the SSI track Needed to be broken up into two steps as max input in SVG in 99 seconds –Wafers developed with 60 seconds develop ad a 15 second rinse Waiting for approval to add program steps to manual

Microelectronic Engineering Rochester Institute of Technology Dr. Lynn Fuller, page 5 Develop Comparison

Microelectronic Engineering Rochester Institute of Technology Dr. Lynn Fuller, page 6 Conclusions The above optical images shows that the nwell pattern has fully been developed SVG tracks can be used to emulate the SSI track when patterning large features –Track 1a: Program 1 (standard Prime) –Track 1b: Program 6 (SSI Coat replica) –Track 2 : Program 6 (Oir620 Develop) Working with SMFL staff to add program descriptions and recipes to the SVG manual