Presentation is loading. Please wait.

Presentation is loading. Please wait.

Dolan Bridge Zoom Show. Optical Bridge Zoom Show.

Similar presentations


Presentation on theme: "Dolan Bridge Zoom Show. Optical Bridge Zoom Show."— Presentation transcript:

1 Dolan Bridge Zoom Show

2

3

4

5

6

7

8

9

10 Optical Bridge Zoom Show

11

12

13 Post Liftoff Zoom Show

14

15

16

17

18 Working Optical Dolan Bridge Process 7-16-03 Spin on LOR20B 3000 rpm 45 s Bake 150 C for 2 minutes on hotplate Spin on S1813 3000 rpm 45 s Bake 115 C for 1 minute on hotplate Expose for 17 s with mask Develop with 1:2 MF312:DI for 105 seconds Rinse in running DI for 15 seconds Blow off with nitrogen

19 Working Optical Dolan Bridge Process (continued) Double angle ±50° Aluminum evaporation Liftoff in 60° Nano Remover PG for 15-45 minutes Spray with methanol to clean off solvent Blow off with canned air


Download ppt "Dolan Bridge Zoom Show. Optical Bridge Zoom Show."

Similar presentations


Ads by Google