SEMICONDUCTOR TECHNOLOGY -CMOS- Fire Tom Wada 2018/11/22 System Arch 2007 (Fire Tom Wada)

What is semiconductor and LSIs Huge number of transistors can be integrated in a small Si chip. The size of the chip is roughly the size of nails. Currently, 10M transistors can be integrated. 1000 times integration comparing to 20 yrs ago. The cost of the chip is roughly same. All electronic equipments are powered by LSIs. PCs, Cellular phones, 3D graphics, Internet. 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) PC mother board Large Scale Integration 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) SONY PLAYSTATION 2 MAINBOARD Rendering LSI Graphics LSI High Speed Memory Direct RDRAM 2018/11/22 System Arch 2007 (Fire Tom Wada)

Mobile Phone Mainboard Memory, Logic, Analog 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) Key device is LSI INTEL Pentium III module 2018/11/22 System Arch 2007 (Fire Tom Wada)

This is a packaged LSI -Pentium III 300MHz Cache LSI- 20 mm 15 mm 2018/11/22 System Arch 2007 (Fire Tom Wada)

Si chip is molded in the package. 2 million transistor Chip is connected to the pins thru wires. 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) 6 inches Si wafer 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) 8 inches Si wafer Hundreds of Chips on a Si Wafer 2018/11/22 System Arch 2007 (Fire Tom Wada)

Several hundreds of chips are fabricated on a wafer simultaneously. 2018/11/22 System Arch 2007 (Fire Tom Wada)

Chip photo - Motion Estimation Chip for HDTV camera - 9.1 mm Your small finger’s nail size. 200M transistors. 8.6 mm 2018/11/22 System Arch 2007 (Fire Tom Wada)

Scanning Electron Microscope photo - Cross-section of the LSI - 2018/11/22 System Arch 2007 (Fire Tom Wada) 0.5 micron

System Arch 2007 (Fire Tom Wada) Structure Of CMOS LSI Isolation PN-Isolation, Local oxidation Si Substrate Bulk, epitaxial , SOI Well Structure N-type well in P-type Substrate Latch Up PNP Bipolar Transistor and NPN Bipolar Transistor Fabrication Process Technology 2018/11/22 System Arch 2007 (Fire Tom Wada)

Cross-section of the LSI Metal wiring Poly-silicon Poly-silicon N+ N+ P+ P+ P-type MOS transistor N-type MOS transistor N-type well P-type Si substrate Si wafer 2018/11/22 System Arch 2007 (Fire Tom Wada)

Advanced Process Development Multi-level Metalization Module （BEP) 65nm Transistor module （FEP) Lithography(VUV, EPL) Mask Fine Cu interconnect SiGe/Metal gate Low κ interdielectric High κ Gate insulator CMPplanarization Low Resistance Ultra shallow junction Low Resistance Contact with High Aspect ratio Low stress Shallow Trench Isolation 2018/11/22 System Arch 2007 (Fire Tom Wada)

LSI integration trend - Moore’s law - 10B DVD-RAM Digital HDTV receiver DVD player DVD recorder 1B DVD-ROM 100M 10M The number of transistors are increasing by 58% per year. - Moore’s Law - Number of transistors on a chip Wide-TV, PHS phone 1M 100K 0.8 0.5 0.3 0.18 0.13 10K CHANNEL LENGTH (MICRON) Source: SEMATEC 1K 2018/11/22 81 83 85 87 System Arch 2007 (Fire Tom Wada) 89 91 93 95 97 99 01 03 05 07 09

Communications and Consumer Products Drive Semiconductor 45% Cellular Phones Digital Camera 40% Set-Top Box DVD Player 35% Internet Game Consoles Smart Cards/Kiosks 30% Application Market Growth Smart Appliance-Phone Advanced Desktop PC and Workstation 25% CAGR % (1997-2002) Multimedia PC Automotive Applications/GPS 20% Portable Computing Switching & LAN 1st Generation 15% Video Camera HDTV 2nd Generation 3rd Generation 10% Car Radio Color TV 5% Semiconductor Industry 0% 0% 5% 10% 15% 20% 25% 30% 35% 40% 45% 50% 55% SC Content (As % of Equipment Cost) Sources: Applied Materials Corporate Marketing estimates, Dataquest 2018/11/22 System Arch 2007 (Fire Tom Wada)

Fabrication Process Issues 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) Ultra Clean Room 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) Basic LSI process Layer Deposition SEM photo of Logic LSIs M1 M2 M3 M4 M5 M6 M7 lithography etching cleaning 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) Light Source Lens A Mask Lens Si Wafer A A A A A A A A A A A A A A A A A A A A A A A A A Stage Y X Projection 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) Packaging & Test Wafer Test Remove Process defect Chips Wafer Testing Functional Test，DC Test Pre Test Final Test I scribing Functional Test，DC/AC Test Chips Burn-In Mounting Ex.)Vcc:7V，Temp.:125℃, 24～42hrs Assembly Flow Bonding Final Test II Shipping Test Functional Test(at Speed)，DC/AC Test Enclosing Sample marking 2018/11/22 System Arch 2007 (Fire Tom Wada)

Large Scale Integration NMOS , PMOS and Wiring All Logic Function can be made Memory Element Can be made Billions of Transistors and wiring make LSI! 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) CMOS NOT (Inverter) 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) CMOS NAND と NOR A B f 1 A B f 1 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) Classification Of LSI Logic LSI: Micro Processor, Digital Signal Processor (DSP), FPGA Memory LSI: RAM (DRAM, SRAM), ROM (Flash Memory) Analog LSI: ADC, DAC, Filter, Amplifier Micro Processor (PC’s central processing Unit) Perform Digital computation according to the program in Memory Integration in 7000 times in 25 years, (Moor’s Law) Clock Speed : 700 times in 25 years Memory LSI:　 Dynamic Random Access Memory: Main memory for Computer, 4-times density in 4 years Static Random Access Memory : work memory for mobile equipments Flash Memory : Nonvolatile memory , Digital Camera Storage Analog LSI: Used for interface, high speed RF interface, Analog to Digital Conversion, Digital to Analog Conversion 2018/11/22 System Arch 2007 (Fire Tom Wada)

Analog to Digital Conversion Sample the analog wave Convert to Digital format in Binary Same as f(t) to An Continuous time Discrete time ADC LSI 2018/11/22 System Arch 2007 (Fire Tom Wada)

System Arch 2007 (Fire Tom Wada) Chip photo SoC Flash Memory 2018/11/22 System Arch 2007 (Fire Tom Wada)