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EasyCluster 2.0 EasyCluster™ 2.0 EasyCluster™ 2.0 Product and Technology Summary Easy, Fast and Reliable Equipment Control Solution.

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Presentation on theme: "EasyCluster 2.0 EasyCluster™ 2.0 EasyCluster™ 2.0 Product and Technology Summary Easy, Fast and Reliable Equipment Control Solution."— Presentation transcript:

1 EasyCluster 2.0 EasyCluster™ 2.0 EasyCluster™ 2.0 Product and Technology Summary Easy, Fast and Reliable Equipment Control Solution

2 EasyCluster 2.0 What is EasyCluster ?  EasyCluster is a framework used to build control systems for various types of equipment - cluster,track and standalone tools - easily, quickly and economically.  EasyCluster is composed of EasyCTC, EasyTMC, EasyPMC and EasyGEM which can be flexibly combined according to target equipment.  EasyCluster can be used for development of new equipment and retrofit of used equipment. CTC PMC TMC Intra-tool Network HOST FAB Network Machine I/F

3 EasyCluster 2.0 Advantages  Easy and cheap to assemble control system hardware : User selectable general H/W and S/W, No 3rd party S/W license  Easy to get skilled engineers : Use of popular S/W tool (C/C++)  Easy to develop applications in a short time : Easily configured engines, abundant application examples, multiple vendor device drivers  Easy to maintain and re-use : Object-oriented component-based S/W  Easy to distribute/combine hardware : Modular S/W structure  Easy to operate : Well-organized GUI and navigation following Sematech Guidelines

4 EasyCluster 2.0 S/W Product History RPCluster ClusterLinkClusterLink3 ClusterPro RPCoreControlPro EasyCluster RPI TechwareBrooks Kornic EasyCluster2.0 EquipeSoft PRI SEMI/MESC CV Java TI ControlWorks ACT DOSNT merged

5 EasyCluster 2.0 System Requirements - H/W  CTC (User selectable)  Pentium III or Higher, min. 128 MB RAM  Monitor : SVGA (1,024  768)  CD ROM Driver  Input Device : Touchscreen, Mouse, Light pen  LAN Card  TMC/PMCs (User selectable)  Pentium III or higher, min. 64 MB RAM  Monitor : SVGA (can be shared with other module controllers)  CDROM Driver  Real time embedded controller (Plug in board for real time control)  DSP CPU(TMS320C32), 12 ch. A/I, 12 ch. A/O  Communication with PMC via DPRAM

6 EasyCluster 2.0 System Requirements - S/W  Operating System  Windows NT4.0 Workstation, Windows 2000, Windows XP  Supported Language : English, Japanese, Korean  S/W Development Tools  Visual C/C (Microsoft)  Paintbrush or Adobe Photoshop  EasyCTC, EasyTMC, EasyPMC, EasyGEM (Kornic) Windows NT EasyTMC CTC Application Windows NT EasyTMC CTC Application Windows NT EasyCTCEasyGEM CTC Application Windows NT EasyTMC TMC Application Windows NT EasyPMC PMC Application Ethernet

7 EasyCluster 2.0 Software architecture (CTC - Module Controller Interface) CTC Main GUIUser Module Controller User Local GUI I/O Manager Sequence Code for Event Full Duplex I/O Controller Real Equipment Command Response Post Recovery TCP/IP Screen Handling I/O Handling Recipe Editor Scheduler Datalog Management I/O Manager (Server) Event Manager Alarm Manager Recipe Analyzer Alarm Handler

8 EasyCluster 2.0 Software Architecture (within Module Controller) Local Graphic User Interface Sequence Manager Alarm Handler Remote Interface Module Application Code CTC Driver Module Real Equipment Robot Cassette Digital I/O Analog I/O User Written #1 User Written #2 I/O Manager Interlocks

9 EasyCluster 2.0 Software Architecture

10 EasyCluster 2.0 FEATURES Standard Implementation S/W and H/W are both distributed. Good for multi-PM cluster tools with complicated TM Each module can have local graphic user interface. System Example 1 CTC PMC TMC Intra-tool Network Machine

11 EasyCluster 2.0 FEATURES Economical implementation CTC/TMC share H/W, PM’s are distributed. Good for cluster or batch tools with simple transport requirements. Each module can have local graphic user interface. System Example 2 PMC Intra-tool Network Machine CTC/TMC

12 EasyCluster 2.0 System Example 3 FEATURES Very cheap implementation All Control S/W on single PC Good for simple standalone type systems, proof of concept/pilot tools with minimal cycling CTC/TMC/PMC Machine

13 EasyCluster 2.0  Framework for CTC Software  System Definition through text configuration files  Dynamic Scheduler  Recipe Management  Graphic User Interface  Alarm Handling  Datalogging (Event, Alarm, Data) & Plotting  Access Control  Factory Communication CTC

14 EasyCluster 2.0  Object Oriented Style System Definition  Support For:  Wafer Transfer Systems  AFE: EFEMs,FOUPs, Atmospheric Robots, Aligners  Vacuum Platforms : LoadLocks, Coolers, Vacuum Robots (Multiple configurations)  I/O: Serial, Devicenet, TCP/IP  Process Modules  Up to 32 Process Modules  Cooler System Definition

15 EasyCluster 2.0  Supports Dual Arm & Dual Finger Robot  Finds Optimal Path for Robot Motion  Sets Priority for Wafer Exchange (Pick & Place)  Supports Active & Passive Wafer Handoff  Supports Serial & Parallel Chamber Processing  Hierarchical Recipe Structure (Lot/Cluster/Process)  Dual Lot Processing  Residence Control  Supports up to 32 Process Modules and 3 Transport Modules Dynamic Scheduler

16 EasyCluster 2.0  Recipe Editor  Text Based Recipe Editor Setup  Look and Feel can be customised  Parameter / Single Recipe / Multi Step Recipe Engine  Display of several steps at Same Screen  Step Operation & File Handling Support ( New / Load / Save(as) / Cancel / Delete ) Recipe Management

17 EasyCluster 2.0 PM1 Process Recipe 1 PM1 Process Recipe 2 PM1 Process Recipe 3 PM1 Process Recipe 4 PM2 Process Recipe 1 PM2 Process Recipe 2 PM2 Process Recipe 3 PM2 Process Recipe 4 PM3 Process Recipe 1 PM3 Process Recipe 2 PM3 Process Recipe 3 PM3 Process Recipe 4 LOT RECIPE CLUSTER RECIPE PROCESS RECIPE Wafer … 25 Wafer … 25 PathPM1 PM2 PathPM1 PM2 PathPM1 PM2 PM3 PathPM1 PM2 PM3 Recipe Hierarchy

18 EasyCluster 2.0  GUI Interface by GUI Definition Files  Completely customizable  Object Oriented Symbols  Includes Standard Background (DLL)  Includes Standard Image Library (DLL)  User can edit/add libraries using VC++  Font Property Definition (Text)  Palette Property Definition(Text)  Text Property Definition (Text)  Page Setup (Text) Graphical User Interface

19 EasyCluster 2.0 Alarm Handling  Subsystems post alarm when exception occurs (Local/Remote)  Alarm manager displays alarm details and recovery actions  Operator selects recovery action, Auto-recovery action executed.  Alarm is cleared if successful recovery  Alarm and recovery status is logged Alarm Manager TMC, PMCs Alarm Post Display Alarm Message, Recovery Actions Action 3 Action 2 Action 1 Call Alarm Clear CTC Select … Log

20 EasyCluster 2.0  Includes Data logging Engine ( Lot / Process / History / Alarm )  User can add or delete items to be logged  Plotting Engine for current and historical trend  Minimum logging interval : 0.5 sec  Number of items to be logged : Max. 128  Number of items to be plotted at same screen : Max. 8  Datalogging by CTC and PMC  Able to view logs by wafer, PM, Lot or Job Data Logging and Plotting

21 EasyCluster 2.0 Access Control  User Account Management  User ID  Password  User Level  Access Limitation according to User level  Activate/Deactivate Buttons

22 EasyCluster 2.0  SEMI Communication Supported SECS I(RS232C) / HSMS-SS (Ethernet) SECS II GEM : All streams and functions (Standard & Custom) 300mm FA Supported : OSS(Object Service Standards), RMS(Recipe Management Service), PJM(Process Job Management), CJM(Control Job Management), STS(Substrate Service), CMS(Carrier Management )  FA pre-test Tool SECSim Pro™ (GW Associates) FAB Automation SECSim Pro EasyCluster HOSTCTC LAN

23 EasyCluster 2.0  Framework for TMC/PMC S/W Development Integration with CTC IO Configuration Function Management Interlocks (Setpoint, Value) TMC/PMC

24 EasyCluster 2.0  Direct & Automatic Alarm Integration  IO Integration  Function Integration CTC Sends Message CTC Sends Message Local User Written Code Local User Written Code  Message Binding CTC Send Event + Data CTC Send Event + Data Translate Event & Data Translate Event & Data Local Module Function Local Module Function Module ControllerCTC Module ControllerCTC Integration with CTC

25 EasyCluster 2.0  Text-based I/O channel definition  I/O channels  Digital (Real/Virtual)  Analog (Real/Virtual), (Linear/Lookup Table)  String  I/O Devices  Direct I/O Boards (A/I, A/O, D/I, D/O)  Serial I/O Board  DeviceNet  Special Devices with Win32 Drivers I/O Configuration

26 EasyCluster 2.0 Function Management  Unit level functions coded in C - Example : Robot_Fcn(Motion, Stn, Slot)  Distributed Architecture with higher level functions calling lower level functions - Example : Move_Wfr(Srce, Slot, Dstn, Slot) { Slot_Vlv(CM, Open) Robot_Fcn(Pick, CM, 1) Slot_Vlv(PM1, Open) Robot_Fcn(Place, PM1, 1) …. }  Parameters are given to the called function as a message  All functions registered in the Function Definition File  Individual function management (kill, compile, reload), able to upgrade portions of the application without shutting down.

27 EasyCluster 2.0 Interlocks  Setpoint Interlocks Before output action, several input values must be checked. Example action( VAT_Valve == Close ) { condition( Robot_Arm == Retracted ) $alarm = 115; }  Value Interlock If certain input meet a certain condition, several output channel must be set to pre-defined value immediately. Example if ( Pump_Status == Error ) { Forln_Vlv = Close; $alarm = 105; }

28 EasyCluster 2.0 Real-time Controller  Available Kornic I/O board for Real Time Control  Temperature Control for RTP, Furnace, etc (SISO, MIMO)  Precise valve timing Control for ALD  End Point Detection for Etching  Embedded Controller Spec.  CPU : DSP (TMS320C32, 50MHz)  I/F with PMC : DPRAM or RS232C  I/O : A/I : 14-bit resolution, 12 ch. A/O : 12-bit resolution. 12 ch. DIO : 24 ch.

29 EasyCluster 2.0 Remote Monitoring CTC PMC TMC Intra-tool Network HOST HSMS/SECS/GEM Machine I/F System Monitoring using HSMS/SECS (Fab Network) or EasyCluster, Faster (Optional Network) Diagnosis Paging Service Office TCP/IP

30 EasyCluster 2.0 Application Example (300mm Asher) System Spec. 300mm Asher Two batch Processing chambers Dual-arm, Dual-pan Robot Two FOUP Openers Dual-arm ATM Robot Cooling and Pre-heating Buffer Stations 300mm Asher Two batch Processing chambers Dual-arm, Dual-pan Robot Two FOUP Openers Dual-arm ATM Robot Cooling and Pre-heating Buffer Stations

31 EasyCluster 2.0 Application Example (200mm Track) System Spec. 200mm Track 5 Process Modules Two Robots Four Cassette Stages One Buffer Station 200mm Track 5 Process Modules Two Robots Four Cassette Stages One Buffer Station

32 EasyCluster 2.0 Application Example (200mm Track) System Spec. 200mm Track 16 Process Modules Four Robots Four Cassette Stages Three Buffer Station 200mm Track 16 Process Modules Four Robots Four Cassette Stages Three Buffer Station

33 EasyCluster 2.0 Application Example (200mm ALD) System Spec. 200mm ALD Cluster Tool 2 Batch Process Modules Brooks MX-700 Platform 200mm ALD Cluster Tool 2 Batch Process Modules Brooks MX-700 Platform

34 EasyCluster 2.0 Application Example (300mm CVD) System Spec. 300mm UHVCVD Cluster Tool 3 Process Modules Brooks GX-6000 Platform 300mm UHVCVD Cluster Tool 3 Process Modules Brooks GX-6000 Platform

35 EasyCluster 2.0 Application Example (200mm CVD) System Spec. 200mm HDPCVD Cluster Tool 2 Process Modules Brooks IX Series Platform 200mm HDPCVD Cluster Tool 2 Process Modules Brooks IX Series Platform

36 EasyCluster 2.0 Application Example (300mm CVD) System Spec. 300mm PECVD Cluster Tool 4 Process Modules 3 FOUP Loadports 6-sided Vacuum Platform 300mm PECVD Cluster Tool 4 Process Modules 3 FOUP Loadports 6-sided Vacuum Platform

37 EasyCluster 2.0 Application Example (200mm Sputter) System Spec. 200mm Sputtering Cluster Tool 6 Process Modules - 5 Sputter Modules - 1 Etching Module Brooks MX-800 Platform 200mm Sputtering Cluster Tool 6 Process Modules - 5 Sputter Modules - 1 Etching Module Brooks MX-800 Platform

38 EasyCluster 2.0 Customers Customer Equipment Q’tyInstalled PlaceRemark 200mm300mm XXXXXXXXAsher12Samsung, TSMC XXXXXXXXTrack30Dongbu XXXXXXXPECVD 6Samsung XXXXXXXXALD3Hynix, ETRI XXXXXXXXALD1Hynix XXXXXXXXAsher1 XXXXXXXXAsher1 XXXXXXXXUHVCVD2PSCJapan XXXXXXXXALD, Mask Etcher1DNP XXXXXXXXSputter1Taiwan XXXXXXXXHDPCVD1ROHMJapan XXXXXXXXLaser Cleaning1 XXXXXXXXEtcher, CVD3KEC

39 EasyCluster 2.0 EasyCluster Products EasyCTCEasyTMCEasyPMCEasyGEM Development LicenseAll development environments, manual, templates Runtime LicenseLock keys configured to the equipment Controller H/WCTC/TMC/PMCs configured to Equipment Training4 weeks2 weeks Engineering Service Depends on the requirements and the complexity of the machine

40 EasyCluster 2.0 EasyCluster Users’ Requirements Most Important Other S/W Experience MS Visual C API Level C Programming Experience & Skill Full Understanding of Equipment Details


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