1. EasyCluster™ 2.0 Product and Technology Summary
Easy, Fast and Reliable Equipment Control Solution

2. What is EasyCluster ?
HOST
EasyCluster is a framework used to build control systems for various types of equipment - cluster,track and standalone tools - easily, quickly and economically.
EasyCluster is composed of EasyCTC, EasyTMC, EasyPMC and EasyGEM which can be flexibly combined according to target equipment.
EasyCluster can be used for development of new equipment and retrofit of used equipment.
FAB Network
CTC
PMC
PMC
I/F
PMC
PMC
TMC
Intra-tool Network
Machine

3. Advantages Easy and cheap to assemble control system hardware
: User selectable general H/W and S/W, No 3rd party S/W license
Easy to get skilled engineers
: Use of popular S/W tool (C/C++)
Easy to develop applications in a short time
: Easily configured engines, abundant application examples, multiple vendor device drivers
Easy to maintain and re-use
: Object-oriented component-based S/W
Easy to distribute/combine hardware
: Modular S/W structure
Easy to operate
: Well-organized GUI and navigation following Sematech Guidelines

4. S/W Product History Techware Brooks SEMI/MESC RPI PRI Kornic TI ACT
ClusterLink
ClusterLink3
CV Java
RPI
PRI
EquipeSoft
merged
RPCluster
ClusterPro
Kornic
DOS NT
RPCore
ControlPro
EasyCluster
EasyCluster2.0 TI
ACT
ControlWorks
ControlWorks

5. System Requirements - H/W
CTC (User selectable)
Pentium III or Higher, min. 128 MB RAM
Monitor : SVGA (1,024 768)
CD ROM Driver
Input Device : Touchscreen, Mouse, Light pen
LAN Card
TMC/PMCs (User selectable)
Pentium III or higher, min. 64 MB RAM
Monitor : SVGA (can be shared with other module controllers)
CDROM Driver
Real time embedded controller (Plug in board for real time control)
DSP CPU(TMS320C32), 12 ch. A/I, 12 ch. A/O
Communication with PMC via DPRAM

6. System Requirements - S/W
Operating System
Windows NT4.0 Workstation, Windows 2000, Windows XP
Supported Language : English, Japanese, Korean
S/W Development Tools
Visual C/C (Microsoft)
Paintbrush or Adobe Photoshop
EasyCTC, EasyTMC, EasyPMC, EasyGEM (Kornic)
Windows NT
EasyTMC
CTC Application
EasyCTC
EasyGEM
TMC Application
EasyPMC
PMC Application
Ethernet

7. Software architecture (CTC - Module Controller Interface)
Main GUI
User
Module Controller
Local GUI
I/O Manager
Sequence
Code for
Event
Full Duplex
I/O Controller
Real
Equipment
Command
Response
Post
Recovery
TCP/IP
Screen Handling
I/O Handling
Recipe Editor
Scheduler
Datalog Management
I/O Manager (Server)
Event Manager
Alarm Manager
Recipe Analyzer
Alarm Handler

8. Software Architecture (within Module Controller)
Local Graphic User Interface
Sequence Manager
Alarm Handler
Remote
Interface
Module
Application Code
CTC
Driver
Real Equipment
Robot
Cassette
Digital I/O
Analog I/O
User Written #1
User Written #2
I/O Manager
Interlocks

9. Software Architecture

10. System Example 1 FEATURES Standard Implementation
CTC
FEATURES
Standard Implementation
S/W and H/W are both distributed.
Good for multi-PM cluster tools with complicated TM
Each module can have local graphic user interface.
PMC
PMC
PMC
PMC
TMC
Intra-tool Network
Machine

11. System Example 2 FEATURES Economical implementation
CTC/TMC share H/W, PM’s are distributed.
Good for cluster or batch tools with simple transport requirements.
Each module can have local graphic user interface.
Intra-tool Network
PMC
PMC
CTC/TMC
Machine

12. System Example 3 FEATURES Very cheap implementation
All Control S/W on single PC
Good for simple standalone type systems, proof of concept/pilot tools with minimal cycling
CTC/TMC/PMC
Machine

13. CTC Framework for CTC Software
System Definition through text configuration files
Dynamic Scheduler
Recipe Management
Graphic User Interface
Alarm Handling
Datalogging (Event, Alarm, Data) & Plotting
Access Control
Factory Communication

14. System Definition Object Oriented Style System Definition Support For:
Wafer Transfer Systems
AFE: EFEMs,FOUPs, Atmospheric Robots, Aligners
Vacuum Platforms : LoadLocks, Coolers, Vacuum Robots (Multiple configurations)
I/O: Serial, Devicenet, TCP/IP
Process Modules
Up to 32 Process Modules
Cooler

15. Dynamic Scheduler Supports Dual Arm & Dual Finger Robot
Finds Optimal Path for Robot Motion
Sets Priority for Wafer Exchange (Pick & Place)
Supports Active & Passive Wafer Handoff
Supports Serial & Parallel Chamber Processing
Hierarchical Recipe Structure (Lot/Cluster/Process)
Dual Lot Processing
Residence Control
Supports up to 32 Process Modules and 3 Transport Modules

16. Recipe Management Recipe Editor Text Based Recipe Editor Setup
Look and Feel can be customised
Parameter / Single Recipe / Multi Step Recipe Engine
Display of several steps at Same Screen
Step Operation & File Handling Support
( New / Load / Save(as) / Cancel / Delete )

17. Recipe Hierarchy LOT RECIPE CLUSTER RECIPE PROCESS RECIPE Wafer12 3 4 5 6 7 8 9 … 25
PathPM1
PM1 Process Recipe 1
PM1 Process Recipe 2
PM1 Process Recipe 3
PM1 Process Recipe 4
PathPM1
PM2
PM2 Process Recipe 1
PM2 Process Recipe 2
PM2 Process Recipe 3
PM2 Process Recipe 4
PathPM1
PM2
PM3
PM3 Process Recipe 1
PM3 Process Recipe 2
PM3 Process Recipe 3
PM3 Process Recipe 4
LOT RECIPE
CLUSTER RECIPE
PROCESS RECIPE

18. Graphical User Interface
GUI Interface by GUI Definition Files
Completely customizable
Object Oriented Symbols
Includes Standard Background (DLL)
Includes Standard Image Library (DLL)
User can edit/add libraries using VC++
Font Property Definition (Text)
Palette Property Definition(Text)
Text Property Definition (Text)
Page Setup (Text)

19. Alarm Handling
Subsystems post alarm when exception occurs (Local/Remote)
Alarm manager displays alarm details and recovery actions
Operator selects recovery action, Auto-recovery action executed.
Alarm is cleared if successful recovery
Alarm and recovery status is logged
Alarm Manager
TMC, PMCs
Alarm Post
Display
Alarm Message,
Recovery Actions
Action 3
Action 2
Action 1
Call
Alarm Clear
CTC
Select …
Log

20. Data Logging and Plotting
Includes Data logging Engine ( Lot / Process / History / Alarm )
User can add or delete items to be logged
Plotting Engine for current and historical trend
Minimum logging interval : 0.5 sec
Number of items to be logged : Max. 128
Number of items to be plotted at same screen : Max. 8
Datalogging by CTC and PMC
Able to view logs by wafer, PM, Lot or Job

21. Access Control User Account Management
User ID
Password
User Level
Access Limitation according to User level
Activate/Deactivate Buttons

22. FAB Automation SEMI Communication Supported FA pre-test Tool
SECS I(RS232C) / HSMS-SS (Ethernet)
SECS II
GEM : All streams and functions (Standard & Custom)
300mm FA Supported : OSS(Object Service Standards), RMS(Recipe Management Service), PJM(Process Job Management), CJM(Control Job Management), STS(Substrate Service), CMS(Carrier Management )
FA pre-test Tool
SECSim Pro™ (GW Associates)
SECSim Pro
EasyCluster
HOST
CTC
LAN

23. TMC/PMC Framework for TMC/PMC S/W Development Integration with CTC
IO Configuration
Function Management
Interlocks (Setpoint, Value)

24. Integration with CTC Direct & Automatic Alarm Integration
IO Integration
Function Integration
CTC Send
Event + Data
Translate
Event & Data
Local Module
Function
CTC
Module Controller
Message Binding
CTC Sends
Message
Local
User Written Code
CTC
Module Controller

25. I/O Configuration Text-based I/O channel definition I/O channels
Digital (Real/Virtual)
Analog (Real/Virtual), (Linear/Lookup Table)
String
I/O Devices
Direct I/O Boards (A/I, A/O, D/I, D/O)
Serial I/O Board
DeviceNet
Special Devices with Win32 Drivers

26. Function Management Unit level functions coded in C
- Example : Robot_Fcn(Motion, Stn, Slot)
Distributed Architecture with higher level functions calling lower level functions
- Example : Move_Wfr(Srce, Slot, Dstn, Slot) {
Slot_Vlv(CM, Open)
Robot_Fcn(Pick, CM, 1)
Slot_Vlv(PM1, Open)
Robot_Fcn(Place, PM1, 1)
…. }
Parameters are given to the called function as a message
All functions registered in the Function Definition File
Individual function management (kill, compile, reload), able to upgrade portions of the application without shutting down.

27. Interlocks Setpoint Interlocks
Before output action, several input values must be checked.
Example
action( VAT_Valve == Close ) {
condition( Robot_Arm == Retracted ) $alarm = 115; }
Value Interlock
If certain input meet a certain condition, several output channel must be set to pre-defined value immediately.
Example
if ( Pump_Status == Error ) {
Forln_Vlv = Close;
$alarm = 105; }

28. Real-time Controller Available Kornic I/O board for Real Time Control
Temperature Control for RTP, Furnace, etc (SISO, MIMO)
Precise valve timing Control for ALD
End Point Detection for Etching
Embedded Controller Spec.
CPU : DSP (TMS320C32, 50MHz)
I/F with PMC : DPRAM or RS232C
I/O :
A/I : 14-bit resolution, 12 ch.
A/O : 12-bit resolution. 12 ch.
DIO : 24 ch.

29. Remote Monitoring System Monitoring HOST Office using HSMS/SECS
(Fab Network)
or EasyCluster, Faster
(Optional Network)
Diagnosis
Paging Service
HSMS/SECS/GEM
CTC
PMC
PMC
I/F
PMC
PMC
TMC
Intra-tool Network
Machine
TCP/IP

30. Application Example (300mm Asher)
System Spec.
300mm Asher
Two batch Processing chambers
Dual-arm, Dual-pan Robot
Two FOUP Openers
Dual-arm ATM Robot
Cooling and Pre-heating Buffer Stations

31. Application Example (200mm Track)
System Spec.
200mm Track
5 Process Modules
Two Robots
Four Cassette Stages
One Buffer Station

32. Application Example (200mm Track)
System Spec.
200mm Track
16 Process Modules
Four Robots
Four Cassette Stages
Three Buffer Station

33. Application Example (200mm ALD)
System Spec.
200mm ALD Cluster Tool
2 Batch Process Modules
Brooks MX-700 Platform

34. Application Example (300mm CVD)
System Spec.
300mm UHVCVD Cluster Tool
3 Process Modules
Brooks GX-6000 Platform

35. Application Example (200mm CVD)
System Spec.
200mm HDPCVD Cluster Tool
2 Process Modules
Brooks IX Series Platform

36. Application Example (300mm CVD)
System Spec.
300mm PECVD Cluster Tool
4 Process Modules
3 FOUP Loadports
6-sided Vacuum Platform

37. Application Example (200mm Sputter)
System Spec.
200mm Sputtering Cluster Tool
6 Process Modules
- 5 Sputter Modules
- 1 Etching Module
Brooks MX-800 Platform

38. Customers Customer Equipment Q’ty Installed Place Remark 200mm 300mm
XXXXXXXX
Asher 12
Samsung, TSMC
Track 30
Dongbu
XXXXXXX
PECVD 6
Samsung
ALD 3
Hynix, ETRI 1
Hynix
UHVCVD 2
PSC
Japan
ALD, Mask Etcher
DNP
Sputter
Taiwan
HDPCVD
ROHM
Laser Cleaning
Etcher, CVD
KEC

39. EasyCluster Products EasyCTC EasyTMC EasyPMC EasyGEM
Development License
All development environments, manual, templates
Runtime License
Lock keys configured to the equipment
Controller H/W
CTC/TMC/PMCs configured to Equipment
Training
4 weeks
2 weeks
Engineering Service
Depends on the requirements and the complexity of the machine

40. EasyCluster Users’ Requirements
Other S/W Experience
MS Visual C API Level
C Programming Experience & Skill
Full Understanding of Equipment Details
Most Important