1. EasyGem™2.4 Technology Summary for SECS Communication
Easy, Fast and Reliable Equipment FA Control Solution

2. Introduction
HOST
FAB Network
EasyGem is based on Easycluster CTC It supports control and status information between Host and Equipment
EasyGem supports SECS II Protocol, GEM Standards and HSMS Communication
EasyGem has proven reliability and flexibility through multiple OEM installs in different FAB environments.
GEM
CTC
PMC
PMC
I/F
PMC
PMC
Machine
TMC
Intra-tool Network
Easycluster

3. Advantages Easy to build Easy to extend Easy to debug
: Defined using Configuration File or GUI
Easy to extend
: GEM Definition options to change functionality. ( ex : 200mm <-> 300mm, Increased Modules )
Easy to debug
: Comprehensive history and communication data logfiles
( Host<->Gem, Gem<->Equip, Error, Debug Message file )
High Reliability and Flexibility
: Multiple OEM installs in varied End User facilities

4. Features 200mm/300mm FA Scenario Support Full Gem Scenario Support
: 200mm -> Gem Scenario, 300mm -> Gem and Control/Process Job Scenario
Full Gem Scenario Support
: Up to Spooling, Trace, Variable Limit Set/Monitor, Material Movement
Max 64 Process Module Support
: PPID, CEID
User ID Definition : Maximum 3000
: ID => SVID,CEID,ECID,RCMD,ALID
TEPAS Support
: TEPAS( Samsung : Total Equipment Prediction Analysis System )
1 TraceID has maximum 200 SVIDs, minimum 1sec sampling time and maximum 21 hundred million counts. At the same time 10 TraceID is supported
Variable and Flexible Option
: User can configure Option as Fab Request and Equipment System,

5. User Configuration Files
ALID.cfg
: Alarm ID Registry File( link with Equipment Alarm Number )
CEID.cfg
: Collection Event ID Registry File( includes Kornic Provision Event )
ECID.cfg
: Equipment Constant ID Registry File( link with Equipment Parameter IO )
SVID.cfg
: Status Variable ID Registry File( link with Equipment Status IO )
RCMD.cfg
: Remote Command Registry File( includes Kornic Default Command )
Recipe.cfg
: Process Program ID Registry File( link with Process Module Recipe Item )
System.cfg
: EasyGem Option Configuration File

6. Debugging Files SECS Message Log File Report/Event ID Log File
: All messages between Host and Equip. are saved. File is created at 1 hour intervals
Report/Event ID Log File
: Can show ReportID/Event from host in GUI.
The information remains persistent, no need to reload
Equipment Execution Log File
: Command and Event messages between Gem and Equipment
Gem Analysis Error Log File
: If message from host has an error( syntax, format, reject situation ),
the analysis error message is saved.
Communication History and Error Log File
: Ethernet Port Open Fail and Host Communication Start/End Time

7. Architecture Configuration System CEID RCMD SVID PP Body Host ALID
Alarm Manager
System
CEID
RCMD
SVID
PP Body
Configuration
IO Manager
CTC
Application1
Application2
GUI
PMC / TMC .
Easycluster
H/W
Format
Unformat
Analysis
Event
Execution
Data
gathering
EasyGem
Log File
Spooling
Debug
Log
SECS2
Message
Comm
Communication
Task
Host
ALID
SECS2 Format
UnFormat Task

8. System Requirements Control System OS FA Pre-test Tool
Pentium III or Higher, min. 128 MB RAM
Monitor : SVGA (1,024 768)
LAN Card OS
: Window NT 4.0 Workstation, Windows 2000, Windows XP
FA Pre-test Tool
: SECSim Pro™ (GW Associates, Ver2.0)

9. Generic Equipment Model(GEM)
State Models
: Process, Communication, Alarm, Control, Material Movement, Spooling
Establish Communications
: Communication State Display in GUI, Timer Constants, Comm. Enable/Disable
Data Collection
: Collection Event, Host Defined Event Reports, Event Enable/Disable, Status Data Collection, Trace Data Collection, Host Limit monitoring, Variable Name list Req.
Alarm Management
: Set Alarm Enable/Disable/Auto/Semi, Alarm Reporting, Alarm Data Request
Remote Control
: Control Event, Control Status Variable, State Display, Appropriately Accept/Deny
Equipment Constants
: Non-Volatile Storage, Host Data Req. and New Data Set, EC Name List Request

10. Generic Equipment Model(GEM)
Process Program Management
: Host Upload/Download/Delete/Directory request, Process Program Verification
Material Movement
: Port/Wafer Status, Completion Time
Equipment Terminal Services
: Single/Multi Block, Message Display in GUI
Error Messages
: Unrecognized Device ID/Stream/Function, illegal Data, Transaction Timeout
Clock
: Equipment Clock Request/Set
Spooling
: Non-Volatile Storage, Spool Status and Display

11. Supported SEMI Standards
SEMI E SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E High-Speed SECS Message Services (HSMS) Generic Services
SEMI E E High-Speed SECS Message Services Single – Session Mode (HSMS-SS)
SEMI E Object Services Standard : Concepts, Behavior, and Services (OSS)
SEMI E Standard for Processing Management (PJM)
SEMI E E Recipe Management Standard: Concepts, Behavior, and Service(RMS)
SEMI E Specification for Enhanced Carrier Handoff Parallel I/O Interface(PIO)
SEMI E Provisional Specification for Carrier Management (CMS)
SEMI E Specification for Substrate Tracking(STS)
SEMI E Provisional Specification for Control Job Management(CJM)
SEMI E E The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services

12. Supported Stream & Function Msgs.
Primary Function S1
F1,F3,F11,F13,F15,F17,F76 S2
F13,F15,F17,F23,F25,F29,F31,F33,F35,F37,F39,F41,F43,F45,F47 S3
F1,F3,F17,F23,F25 S5
F1,F3,F5,F7 S6
F1,F3,F9,F11,F23 S7
F1,F17,F19,F23,F25,F27,F29,F65 S9
F1,F3,F5,F7,F9,F11,F13
S10
F1,F3,F5,F9
S14
F1,F3,F9,F11
S16
F1,F5,F7,F9,F11,F13,F15,F17,F19,F21,F23,F25,F27,F29
S18
F5,F7,F9,F11,F13

13. Semi Standard Compliance
( E5-0301/SEMI E /SEMI E )
GEM COMPLIANCE STATEMENT
Fundamental GEM Requirements
GEM Section
Implemented
GEM-Compliant
State Models
3.0, 3.1, 3.3
Yes No
Yes
(See NOTE 1)
No
Equipment Processing States
3.4
Host-Initiated S1=F13/F14 Scenario
Event Notification
On-Line Identification
4.2.6
Error Message
4.9
Documentation
8.4
Control ( Operation Initiated)
4.12(except )
Additional Capabilities 
(See NOTE 2)
Establish Communications
4.1, 3.2
Dynamic Event Report Configuration
Variable Data Collection
4.2.2
Trace Data Collection
4.2.3
Status Data Collection
4.2.5
Alarm Management
4.3
Remote Control
4.4
Equipment Constants
4.5
Process Program Management
4.6
Material Movement
4.7
Equipment Terminal Services
4.8
Clock
4.10
Limits Monitoring
4.2.4
Spooling
4.11
Control (Host-Initiated)

14. Semi Standard Compliance
PM COMPLIANCE STATEMENT
Fundamental PM Requirements
PM Section
Implemented
PM Compliant
Single Process Job Execution
8.2
 Yes No
 Yes No
Process Job Milestones
8.2.1 (except , 3)
Process Job Failure Indication
Abort Command
Process Job Object Implementation
8.3, 9
Reject Invalid/Incomplete Parameter
Reject Unsupported Capabilities
11.2
Services Implementation (not per Additional) 10
Yes  No
Resource Pre/Post-conditioning
Stop, Pause and Resume Commands
, 4, 5
Manual Process Start
Process Job Queuing
8.3
Process Tuning
7.5,
Processing of Material Groups
7.6
 Yes  No
Multiple Concurrent Process Jobs
7.7
Multiple Consecutive Process Jobs
7.8
Process Job With No Material
7.9
Event Notification
8.2.2
Enhanced Job Creation
10.4.2
Multiple Job Creation
10.4.3
Duplicate Job Creation
10.4.4

15. Semi Standard Compliance
CMS COMPLIANCE STATEMENT
Fundamental CMS Requirements
CMS Section
Implemented
CMS Compliant
Load Port Number
9.1
■Yes No
Carrier Slot Number
9.2
Load Port Transfer State Model
9.3 – 9.4.3
Carrier Object Implementation 10
Load Port Reservation State Model (internal buffer equipment) 12
Yes ■No
Load Port/Carrier Association State Model 13
Carrier ID Verification Support
14.2
Slot Map Verification Support
14.3
Services Implementation 16
Additional Events Implementation 18
Variable Data Definitions 19
Alarms Implementation 20
Additional CMS Capabilities
Load Port Reservation State Model (fixed buffer equipment)
Reservation Visible Signal
12.2

16. Semi Standard Compliance
STS COMPLIANCE STATEMENT
Fundamental STS Requirements
STS Section
Implemented
STS Compliant
Substrate Tracking
8 (except 8.4)
■Yes No
Substrate Object and State Model 9
Substrate Location Object and State Model 10
Service Message Implementation 11
Variable Data 12
Events
8.4
none

17. Semi Standard Compliance
CJM COMPLIANCE STATEMENT
Fundamental CJM Requirements
CJM Section
Implemented
CJM Compliant
Control Job Object 8
■Yes No
Control Job State Model 9
Control Job Queue Model 10
Carrier Properties 11
Service Message Implementation 12
Variable Data 13
Yes ■No
Events
7.3.2
Additional Requirements 14

18. Related Screens
( Gem Communication )

19. Related Screens
( Gem Configuration )

20. Related Screens
( Host Communication )

21. Related Screens
( Job Manager )

22. EasyGem Install Base Equipment Size Numbers Country/End User
Control Type
(SECS2,GEM,HSMS)
CVD
200mm 4
Korea/Samsung
200mm Gem Scenario
300mm 1
Taiwan/PSC
300mm Job Control Scenario
RTP 7
Asher 3
Taiwan/XXX
Korea : 200mm Extension Gem Scenario
Taiwan : 300mm Job Control Scenario
Track 5
Korea/Dongboo