1. mSR Series – Competitive Presentation

2. Overview mSR V. MX80L Competitive pressure Relative Pricing mSR80 Competition Review of key value propositions Competitive Analysis mSR100 Competition Review of key value propositions Competitive Analysis

3. Do you have customers in any of these industries? Semiconductor Life Science Electronics Manufacturing

4. Chances are you’ve sold an MX80L Parker’s flagship of miniature positioning High duty performance 2 m/s maximum velocity 5G maximum acceleration Very low velocity ripple Fast settling High precision +/- 0.4 micron repeatability 3.0 micron accuracy 4.0 micron straightness 10 nanometer resolution

5. Over a decade of proven success…

6. Enter the Competition… Danaher(Dover) MMG – developed to mirror the MX80 Aerotech ANT95 Primatics PCR32 Ibex Others….

7. Competitive Pricing

8. Parker’s Solution: Leap Frog the competition.

9. mSR Design Goals Maintain small form factors Design for tailored performance Higher flexibility Better repeatability Industry leading product leadtimes Modular design Delivering the highest value in the smallest package of any miniature stage in the market!

10. mSR 80 Next generation solution for MX80-L applications Allows for higher precision performance (4 X better repeatability) Fits similar volumetric foot print Uses the same ironcore linear motor as its drive Designed with latest encoder technology on board

11. mSR 80 Design Features 1.Integrated high precision square rails Provide guidance, allows for superior straightness /flatness, and stiffness 2.Center driven direct drive motor Produces high thrust in small packaging, yielding excellent dynamic response 3.Integrated linear encoder, home and limits Five encoder options for flexible precision performance, with adjustable onboard limits and home sensing 4.Optional magnetic counterbalance Allows for Z-axis orientation without the need for air 5.Convenient mounting holes and dowel pinning The same mounting as MX80-L for ease of migration

12. mSR 80 Versus MX80L Similar in total volume at a given stroke mSR 80 25 mm stroke Fully retracted MX80L 25 mm stroke Fully extended

13. mSR 80 Versus MX80L PositionerLength (mm) Travel* (mm)Motor PoleMX80L Length mSR080L-025CS128254114.5 mSR080L-035CS138354- mSR080L-050CD183508147 mSR080L-100CD2651008260 mSR080L-150CD3651508360 mSR 80 80 mm 25 mm 80 mm MX80L

14. Square Rail Versus Cross Roller? Cross rollers bearings have long been touted as superior precision bearing over that of recirculating… but is this still the case? Square rail technology has improved significantly over time Eliminates the need to preload the stage, yielding a truer stage

15. Manufacturing. All linear guide bearing rails are machined via grinding process For 20 years use of linear square rails has increased (ease of use, breath of product) Driven the mfg of square rails to attain the same straightness/flatness as a cross roller element Square Rail Versus Cross Roller?

16. Difference in preloading Cross Roller: stage is loaded – flexing the carriage. Square Rail: each truck is preload in a consistent fashion Square Rail Versus Cross Roller?

17. mSR Pricing – 1 Micron Magnetic Encoder

18. mSR Pricing – 1 Micron Optical Encoder

19. mSR Pricing – 0.1 Micron Optical Encoder

20. mSR Pricing – 0.01 Micron Optical Encoder

21. Danaher (Dover) MMG mSR 80Dover MMG Standard Strokes (mm) 25, 35, 50, 100 and 150 25, 50, 100 and 150 Width X Height (mm) 80 X 2592.3 X 25 Bi-Directional Repeatability (µ) 1 0.10.4 Accuracy (Slope Corrected) 1 8 (4)6 (none given) Straightness & Flatness 1 33 Max velocity (mm/sec) 2000 Max acceleration (G’s) 35.6 Located: Boxborough, MA MX80L copy (designed to compete directly with the MX80L at a key OEM) Outdated design – sell the value of the mSR over the MMG 1 Precision Grade, 25 mm, 0.01 µ encoder

22. Pricing MX80L/mSR80 V. MMG Priced to surround the competition with options Use the flexible encoder options to drive out the competition. MX80L - Standard MX80L - Precision mSR80 – 1 micron mag. mSR80 – 1 micronmSR80 – Sin/Cos mSR80 – 0.1 micron mag. Dover MMG List Price ($)

23. Primatics PCR32 Located: Tangent, OR Similar form factor to the MX80L (Rel. 2009) Standard leadtimes 6-8 weeks. mSR 80Primatics PCR32 Standard Strokes (mm) 25, 35, 50, 100 and 150 25, and 135 Width X Height (mm) 80 X 2597.5 X 32 Bi-Directional Repeatability (µ) 1 0.1 Accuracy (Slope Corrected) 1 8 (4)1 (0.3) Straightness & Flatness 1 30.75 Max velocity (mm/sec) 2000500 Max acceleration (G’s) 30.3 1 Precision Grade, 25 mm, 0.01 µ encoder

24. Aerotech ANT95 Located: Pittsburgh, PA Only available with 1 nm encoder $$$$$$$$$ Long leadtimes mSR 80Aerotech ANT95 Standard Strokes (mm) 25, 35, 50, 100 and 150 25, 50, 75 and 100 Width X Height (mm) 80 X 2595 X 33 Bi-Directional Repeatability (µ) 1 0.1 Accuracy (Slope Corrected) 1 8 (4)- (2.5 to 0.25) Straightness & Flatness 1 31 Max velocity (mm/sec) 2000500 Max acceleration (G’s) 35 1 Precision Grade, 25 mm, 0.01 µ encoder

25. Ibex KPX 50 Located: Newburry, CA Small cross roller and enc. – when motor is added size expands drastically Severely under performing motor Each treated as ‘custom’ mSR 80Ibex KPX 50 Standard Strokes (mm) 25, 35, 50, 100 and 150 20, 40 Width X Height (mm) 80 X 2579 + motor X 29 Bi-Directional Repeatability (µ) 1 0.11 count – Really? Accuracy (Slope Corrected) 1 8 (4)2 Straightness & Flatness 1 32.5 Max velocity (mm/sec) 2000600 Max acceleration (G’s) 3None given 1 Precision Grade, 25 mm, 0.01 µ encoder

26. mSR 100 Second size to the mSR Series Allows for smooth precision performance Uses the mL18 miniature ironless linear motor as its drive Provides the best dynamic response of any Parker positioner Designed with latest encoder technology on board

27. mSR 100 Design Features 1.Integrated high precision square rails Provide guidance, allows for superior straightness /flatness, and stiffness 2.Center driven direct drive ironless linear motor With zero cogging this linear motor produces extremely smooth motion, with limited velocity ripple 3.Integrated linear encoder, home and limits Six encoder options for flexible precision performance, with adjustable onboard limits and home sensing 4.Convenient mounting holes and dowel pinning Allowing for multiple mounting options to either an other mSR100, mSR80, or MX80L

28. Primatics PXL33 Located: Tangent, OR Cross roller, ironless motor driven stage Standard leadtimes 6-8 weeks. mSR 100Primatics PCR32 Standard Strokes (mm) 25,, 50, and 50 mm increments to 500 25, 60, and 110 Width X Height (mm) 100 X 3595 X 33 Bi-Directional Repeatability (µ) 1 0.10.15 Accuracy (Slope Corrected) 1 10 (5)3 (0.15) Straightness & Flatness 1 2.51.0 Max velocity (mm/sec) 3000500 Max acceleration (G’s) 33.5 1 Precision Grade, 25 mm, 0.01 µ encoder

29. Aerotech ALS135 Located: Pittsburgh, PA Closest in design to the mSR 100 $$$$ Long leadtimes mSR 100Aerotech ALS135 Standard Strokes (mm) 25,, 50, and 50 mm increments to 500 25, 50, 100, 150, and 200 Width X Height (mm) 100 X 35130 X 40 Bi-Directional Repeatability (µ) 1 0.1 Accuracy (Slope Corrected) 1 10 (5)2.0 (0.3) Straightness & Flatness 1 2.51 Max velocity (mm/sec) 3000300 Max acceleration (G’s) 31 1 Precision Grade, 25 mm, 0.01 µ encoder

30. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Product Series

31. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 mSR Size: -80 -100

32. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Linear Motor Drive

33. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Stroke Length Option 025 – 25 mm stroke 035 – 35 mm stroke* 050 – 50 mm stroke 100 –100 mm stroke 150—150 mm stroke 200 – 200 mm stroke** 250 – 250 mm stroke** 300 –300 mm stroke** 350—350 mm stroke** 400 – 400 mm stroke** 450 – 450 mm stroke** 500 –500 mm stroke** *mSR80 only **mSR 100 only

34. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Grade Option Precision Standard

35. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Motor Option CS –ironcore, single* CD –ironcore, double* *mSR 80 only LS –ironless, single** LD –ironless, double** **mSR 100 only

36. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Encoder Option E1 – 1 micron optical incremental E2 – 0.1 micron optical incremental E3 –0.01 micron optical incremental SC –Sine/Cosine M1—1 micron magnetic incremental R1- 0.05 micron BiSS-C Absolute* *mSR 100 only

37. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Home Sensor Option H0 – No Home Sensor H1 –Home Sensor

38. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Limit Sensor Option L0 –No Limit Sensor L1 –End of travel limit sensors

39. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Cable Options CM01 – No Cable management, 1 meter* CM03 – No Cable management, 3 meter CM13 – Single Cable Carrier, 3 meter** CM23 – Double Cable Carrier, 3 meter** *mSR 80 only **mSR 100 only

40. mSR Part Numbering MSR100L-050PLDE3H1L1CM03X0 Other Options X0 – No options X1 – Magnetic Counterbalance (0.5 N) X2 - Magnetic Counterbalance (2.0 N) X3 – Magnetic Counterbalance (3.0 N) X4 - Magnetic Counterbalance (3.5 N) X5 – Magnetic Counterbalance (4.3 N) X6 - Magnetic Counterbalance (6.3 N) *mSR 80 - 25 mm stroke only

41. Questions or Inquiries EMN_support@parker.com 1-800-358-9070