1. ALO Passivation of MCPs: 27% WALO/ALO SEE/400oC anneal
Jeff Elam
Anil Mane
Aileen O’Mahony

2. 100 nm ALO Passivation Passivation MCP R (MΩ) Pre-anneal Post-anneal
R Change %
No passivation 
40.1
82.2
205
42.6
86.0
202
100 nm ALO
55.8
87.5
157
51.0
78.6
154

3. 5 nm ALO Passivation Passivation MCP R (MΩ) Pre-anneal Post-anneal
R Change %
5 nm ALO
47.4
70.0
148
S000659
51.5
77.0
150
76.9
129.0
168
S000667
84.7
138.0
163
No passivation 
S000662
50.0
258

4. Photek Pb MCPs Passivation MCP R (MΩ) Pre-anneal Post-anneal
R change %
100 nm ALO
Photek
23.1
39.1
169
Photek
21.5
24.0
112
Photek
20.7
22.8
110
Photek
26.6
28.5
107
Photek
24.5
Photek
22.9