Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 1 SYSTEMS ON SILICON MANUFACTURING CO. PTE LTD “TOWARDS SAFETY EXCELLENCE” 29 July 2008 By Reactive Ion Etcher (RIE) A quick glance……..  8 inch wafer foundry  Producing deep sub-micron processes for complex logic chips & Systems-on-chip  Joint venture between NXP Semiconductor & TSMC Improvement Area : Failure Analysis Laboratory

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 2 Techniques to be used : 8D (Problem solving) HIRA (Risk assessment) Fishbone (Root cause analysis) Brainstorming & SCAMPER technique (Generate ideas) JSA/PSO (Hazard identification) D1 : Define Team D2 : Describe Problem D3 : Implement Containment Action D4 : Define and Verify Root Causes D5 : Choose and Verify Permanent Corrective Action D6 : Implement Corrective Action D7 : Prevent Recurrence D8 : Congratulate Team (Benefits) “Fishbone Diagram” root cause analysis “JSA/PSO” to identify hazards “Brainstorming” & “SCAMPER” technique Idea generation Analysis Techniques “HIRA” for risk assessment

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 3 8D Problem Solving Approach D1 : Define Team D2 : Describe the Problem

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 4 Facilitator –Tan Seng Hin (FA Manager) Leader –Oh Siew Khim (FA Assistant Engineer) Member –Teresa Jee Meng Goak (FA Technician) –Lee Sui Lan (FA Technician) –CK Wong (Vendor) D1 : Define Team

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 5 Annual review of FA lab activities –Through JSA & PSO Identify new potential hazards New potential hazards identified on one activity –“Clearance of condensed corrosive oil on RIE machine” –Identified during PSO –Hazard identification & risk assessment (HIRA) found the risk to be high D2 : Describe The Problem

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 6 Corrosive oil mist (ph2 level) condensed from exhaust every few weeks D2 : Describe The Problem Oil mist from RIE machine pump Connected to acid exhaust Reactive Ion Etch (RIE) machine valve Installed a valve and extension pipe for clearing accumulated oil Extension pipe Valve to discharge oil Transparent pipe to check accumulation of oil Up to acid exhaust Oil accumulated Background

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 7 D2 : Describe The Problem Procedure to clear accumulated corrosive oil Place chemical bag over pipe Open valve to discharge oil Wait for oil to fully discharge and stop dripping Close valve & clean pipe Background Job Safety Analysis (JSA)

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 8 D2 : Describe The Problem Peer Safety Observation (PSO) 3 potential hazards identified

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 9 D2 : Describe The Problem Prolong bending during clearance resulting in backache (ergonomic) Oil drip on floor if chemical bag torn by sharp object resulting in slip & fall

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 10 D2 : Describe The Problem Improper closure or faulty valve resulting in corrosive oil substance dripping on floor (environmental pollution) Corrosive oil substance contact with live wires resulting in electrocution Power cable Slip & fall hazard resulting in physical injury

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 11 D2 : Describe The Problem Need immediate attention !!

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 12 D2 : Describe The Problem Team Goals electrocutioncriticallow –Reduce the risk of electrocution from critical to low. slip & fallmediumlow –Reduce the risk of slip & fall from medium to low. backachehighlow –Reduce the risk of backache from high to low. –Timeline : 12 June 2008

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 13 D2 : Describe The Problem

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 14 seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D3: Implement and Verify Containment Action

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 15 Cover pipe opening with chemical bag to contain unforeseen corrosive oil leak –Slip & Fall –Contact with live wires Procedure to check chemical bag before use & use double bags Awareness briefing –Straighten back when performing task (ergonomic) –Personnel with backache problem not allowed to perform task D3 : Containment Action

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 16 D3 : Containment Action Containment actions

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 17 seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D4: Define and Verify the Root Causes

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 18 Man Did not follow safe work procedure Do not know safe work procedure Did not use PPE Did not attend safety training Reliability Parts wear-out No warning signs Low working height Machine/ tool Material Wrong PPE Inferior quality No PPE Wrong material Unreliable clearance bag Method No safe work procedure No safety communication Incorrect safe work procedure Confuse safe work procedure Procedure not updated Environment Dim lighting Man Machine/ tool Material Method Environment Space constraint PPE, pipe, bag Capability (old injury, physical built) PPE, pipe, bag Potential hazards on condensed oil mist clearance activity Procedure too manual D4 : Verify Root Causes

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 19 D4 : Verify Root Causes

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 20 D4 : Verify Root Causes Depend much on administrative control –Personnel constant monitoring of procedure Constantly holding on to chemical bag during clearance –Ergonomic (Low working height) –Constant exposure to corrosive oil Constantly ensuring oil do not drip or leak onto floor during clearance Need to ensure valve is properly closed Need to monitor functionality of valve Unreliable material used –Chemical bag possibly torn by sharp object Design engineering control solution Review material used in new solution

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 21 seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D5: Choose and Verify Corrective Action

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 22 Engineering solution criteria : Protection against electrocution Protection against slip & fall Protection against contact with corrosive oil Solve ergonomic issue No other hazard introduced Ease of use Ease of maintenance

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 23. funnel Waste bottle Facility pipe Idea 1 Waste container fit direct to pipe Clamp Facility pipe Idea 2 D5: Choose and Verify Corrective Action

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 24. Waste bottle direct to pipe Facility pipe Sitting block Facility pipe Remove waste bottle Idea 3 D5: Choose and Verify Corrective Action

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 25 Safety cabinet Collection Tray Idea 4 D5: Choose and Verify Corrective Action Door

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 26 S ubstitute C ombine A dapt M odify /M inify P ut to other use E liminate R earrange D5: Choose and Verify Corrective Action SCAMPER TECHNIQUE Combine good ideas Put good idea to other use Adapt good ideas Generated 1 GREAT idea!!

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 27 Waste bottle Flooring Movable pipe fit into facility pipe and to waste bottle D5: Choose and Verify Corrective Action Idea 1 Movable funnel Waste bottle Idea 2 Fit into facility pipe. Combining idea 1 and 2 : Movable pipe that fit into facility pipe and ability to slide in and out of waste bottle. Corrosive oil flow direct into waste bottleCorrosive oil flow direct into waste bottle Personnel has no direct exposure to oilPersonnel has no direct exposure to oil Any leak is contained within the piping into the bottle.Any leak is contained within the piping into the bottle.

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 28 D5: Choose and Verify Corrective Action Idea 4 Prevent direct contact with corrosive oil Flooring Movable pipe insert through hole with shoulder resting on surface of cabinet to prevent sliding down At the same time, cover over facility pipe Safety cabinet design Adapt idea 4 safety cabinet design : Concealed on all sides for double protection Contain any unforeseen spill within cabinet.

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 29 D5: Choose and Verify Corrective Action Idea 4 Collection tray Flooring Put to other use idea 4 collection tray concept into containment tray Contain oil leak or spill e.g. if bottle is crack Contain oil leak or spill e.g. if bottle is crack Containment tray

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 30 Flooring Movable pipe design with shoulder Safety cabinet Door Waste bottle Containment tray Facility pipe

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 31 D5: Choose and Verify Corrective Action Flooring Corrosive oil substance accumulation How it works :

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 32 Open valve D5: Choose and Verify Corrective Action Oil flows through facility pipe direct down to waste bottle via movable pipe. Waste bottle How it works : Flooring

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 33 Close valve D5: Choose and Verify Corrective Action How it works : Flooring

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 34 Slide movable pipe up to disconnect from waste bottle D5: Choose and Verify Corrective Action How it works : Flooring

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 35 D5: Choose and Verify Corrective Action Open door How it works : Flooring

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 36 D5: Choose and Verify Corrective Action Remove waste bottle, cap it and dispose as Toxic Industrial Waste How it works : Flooring

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 37 D5: Choose and Verify Corrective Action How it works : Replace new bottle Flooring

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 38 D5: Choose and Verify Corrective Action Slide movable pipe down to connect to new waste bottle How it works : Flooring

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 39 RIE safety cabinet D5: Choose and Verify Corrective Action Advantages : Ease of use Ease of removing waste bottle User do not need to constantly perform and monitor task Engineering control Oil leak due to improper valve closure or faulty valve is contained within cabinet and waste bottle. Protect personnel (double protection besides PPE) Overcome ergonomic problem Easy to clean (detachable parts) No new hazard introduced RIE Safety Cabinet Flooring

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 40 seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D6: Implement Permanent Corrective Action

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 41 D6: Permanent Corrective Action RIE Safety Cabinet installed to piping Waste bottle Safety cabinet Containment tray Movable pipe Door Facility pipe User in operation during discharging oil (Engineering Control)

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 42 D6: Permanent Corrective Action After discharging, slide up pipe Remove waste bottle Slide up movable pipe Replace new waste bottle and slide pipe into bottle Slide down movable pipe into waste bottle

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 43 D6: Permanent Corrective Action Before Administrative control After Engineering control implemented Before Potential oil leak causing hazards After Cabinet provide round the clock protection to contain potential leak

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 44 D6: Permanent Corrective Action Protective cable cover for double protection against potential contact with corrosive oil

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 45 D6: Permanent Corrective Action No further hazard

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 46 D6: Permanent Corrective Action Containment actions Effective measures reduced risks further

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 47 seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D7: Preventive Actions

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 48 D7: Preventive Actions Standardization HIRA and safe work procedure updated and communicated ( ) Yearly review of documents Education & Awareness Train current staff on use of RIE Safety Cabinet Train new staff in OJT program Monitoring Weekly check on condition of RIE Safety Cabinet, piping, valve and joints Prevention is better than cure

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 49 seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 8D Problem Solving Approach D8: Benefits & Future Improvement

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 50 Contribute to 0 EHS incident Engineering control over administrative control –Risk of electrocution reduced from critical to low –Risk of slip and fall reduced from medium to slight –Risk of sustaining backache eliminated Innovative solution –Simple & creative customized solution (not available commercially) –Recognized as Best Known Method in SSMC innovation circle Easily replicated for solving problems similar in nature Environment & cost effectiveness –Cabinet fabricate in-house from waste material –Waste bottle recycle from disposed chemical container –Eliminate use of chemical bags which are disposed after used

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance 51 Cultivated innovative mindset –Innovative solution can be simple and equally effective Cultivated safety mindset in workplace (proactive behavior) Develop teamwork and bonding Learning : Important of regular review of activities to identify new hazards Staffs acquired proper hazard identification skill and put into practise

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 52 Review for future improvement Flooring Waste bottle holder to prevent potential bottle toppling Waste bottle

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 53 Next Project and Plan Next project –Prevent beaker toppling during chemical etching using hotplate –Medium risk

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 54 That’s our journey towards “Safety Excellence”

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 55

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 56 Acid exhaust Machine Small amount of condensation takes place Machine

Internal seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance Internal 57 E – engineering control (no incidence) D – PPE (once in 9 yrs). Partial eng. C – Admin control (did not follow procedure)