Valves & Controls for Semiconductor Fabs

Executive Summary: Engineered thermoplastic valves, automatic controls, and specialty piping components that provide performance, longevity, and value that is superior to all other brands. Standard and custom products that solve pressure and flow control problems. PVC, Corzan CPVC, Natural Polypro, PTFE, Kynar PVDF, and custom materials. Manufactured in USA since 1967.

Products for Improving Performance in: PVAC ICW, PCW, RO WATER DI WATER AQUEOUS CHEMICALS ACID WASTE

Pressure Reducing Valves ICW, PCW RO WATER DI WATER AQUEOUS CHEMICALS

The most significant advantage of a Plast-O-Matic regulator is flow capacity. As you can see from the next performance curve, the Plast- O-Matic regulators have much higher flow capacities than the Competition. These higher flow capacities are achieved at much lower pressure losses resulting in greater sensitivity,finer adjustability and superior accuracy.

Now Available: New design features non-rising stem No exposed external fasteners Same superior flow performance of standard Plast-O-Matic Regulator

HIGHLY CONFIDENTIAL – PROPRIETARY DATA PRHM RE-DESIGN OLD NEW

HIGHLY CONFIDENTIAL – PROPRIETARY DATA SUMMARY OF IMPROVEMENTS SERIES PRHM ¾ & 1 (Molded Body) Non-Rising Stem Overall Height Reduced Upper Housing Ribs Extended & Strengthened ALL Elastomers now Metal Ion- Free EPDM Connection Hubs Enlarged & Strengthened Shaft & Seat Redesigned Base Plate Cross Section Increased Bolts Recessed Mounting Support Holes Added

HIGHLY CONFIDENTIAL – PROPRIETARY DATA SUMMARY OF IMPROVEMENTS SERIES PRH 1½ & 2 (Machined Body) ALL Elastomers now Metal Ion- Free EPDM; optional FFKM or Kalrez Shaft & Seat Redesigned Base Plate Cross Section Increased Bolts Recessed Mounting Support Holes Added

HIGHLY CONFIDENTIAL – PROPRIETARY DATA PVDF SHAFT RE-DESIGN OLD NEW NO metal components in flow area Smooth flow design tapered seat & lower profile has improved flow performance by 13%

HIGHLY CONFIDENTIAL – PROPRIETARY DATA Summary Depicting Finite Element Analysis (FEA) performed on 1 pc stem – Loadings from Pressure

HIGHLY CONFIDENTIAL – PROPRIETARY DATA Summary Depicting FEA performed on 1 pc stem, continued Pro-Mechanica analysis of stem P/N 7828 used in PRH075EP-U & PRH100EP-U. These loadings represent 125 PSI outlet pressure with no spring load (worst case). The tensile strength is 7,450 PSI. The maximum stress is 4,563 PSI.

HIGHLY CONFIDENTIAL – PROPRIETARY DATA EFFECT OF BODY, BASE & SHAFT RE-DESIGN FULLY OPEN FULLY CLOSED

Lowest Cost of Ownership: Best Performance

Assumes Plast-O-Matic initial cost $4300. (PRH200EPU1-PF). Plast-O-Matic is inspected and serviced with seal kit every 1,000,000 cycles; competitive valve requires replacement every 400,000 cycles or less.

Connections Available in: Virgin Polypro PVDF PTFE PVDF or PTFE Body

Plast-O-Pure, continued

THOUSANDS of Plast-O-Matic Pressure Regulators are White Paper specified & installed at Intel Fabs worldwide.

HIGHLY CONFIDENTIAL – PROPRIETARY DATA Summary of Upgrades & Differences between standard Plast-O-Matic Regulators and High-Purity PVDF Regulators: Includes Spigot Connections Proprietary Cleaning Process Two Day DI Hot & Cold Rinse Contracted Class 10 Clean & Double-Bag Procedure

HIGHLY CONFIDENTIAL – PROPRIETARY DATA METAL ION-FREE EPDM TEST DATA

HIGHLY CONFIDENTIAL – PROPRIETARY DATA METAL ION-FREE EPDM BENCHMARK OF SUCCESS: Since 2008, ALL Plast-O-Matic Series PRHM/PRH-U Pressure Regulators have been shipped with Metal Ion-Free EPDM Rolling Diaphragms… Part # Installed Population with Metal Ion-Free EPDM Rolling Diaphragm: 1210 Installed Population with ALL elastomers (including U-Cups, Seat, Rolling Diaphragm) Metal Ion-Free EPDM / CDB Procedure: 250

HIGHLY CONFIDENTIAL – PROPRIETARY DATA Kynar PVDF Resin & Extruded Rod TEST DATA Click image for EXCEL file Source: Arkema/Balasz Labs

HIGHLY CONFIDENTIAL – PROPRIETARY DATA Plast-O-Matic Proprietary 2-Part Cleaning Process (Prior to CDB Procedure) 1.Surface is treated to be amenable to the scavenging of metallic residues, mold release agents and ancillary contaminants. 2.SEMI F-57 compatible agents are then used to scour the activated surface of the previously indicated classes of contaminants. The contaminants and scouring agents are then flushed from the EPDM parts with 18 meg ohm water for 16 hrs. Internal valve components are carefully cleaned and scrubbed using 18 meg ohm water. The valves are then assembled in our clean room prior to secondary CDB procedure.

CONFIDENTIAL: Independent test data from a semiconductor fab customer.

SUPERIOR FLOW PERFORMANCE HAS BEEN MAINTAINED THROUGHOUT THIS PROCESS… HIGHLY CONFIDENTIAL – PROPRIETARY DATA

POM PRHM Exceeds requirements Parker PR3 GF V182 COMPARATIVE ANALYSIS 1 Pressure Regulator Droop Performance Curves Industry requirement PSI droop Do not meet requirements

HIGHLY CONFIDENTIAL – PROPRIETARY DATA Valve Body, Shaft/Seat Retainer and Base Plate Redesigned ALL Clean Kynar, All standard Elastomers now Metal Ion-Free EPDM, or optional Kalrez or FFKM, Cleaning procedures standardized Improved Flow Performance

HIGHLY CONFIDENTIAL – PROPRIETARY DATA ULTRA-PURE REGULATOR RE-DESIGNED NO WETTED ELASTOMERS IN DEVELOPMENT ALL WETTED MATERIALS SEMI F-57 COMPLIANT: TFM BODY PTFE DIAPHRAGM PVDF SPIGOTS

The best case for POM Regulators: White Paper specs & thousands of valves at Intel Fabs worldwide…

Pressure Sustaining Valves ICW, PCW RO WATER DI WATER AQUEOUS CHEMICALS

Also known as Relief Valves, Backpressure Valves, Bypass Valves, and Backpressure Regulators The most significant advantage of a Plast-O-Matic pressure sustaining valve is flow capacity. As you can see from the next performance curve, the Plast-O-Matic valves have much higher flow capacities than the Competition. These higher flow capacities provide significant improvements in system performance, with far less wear and tear on the pump.

Lowest Cost of Ownership: Best Performance

The Difference is inside… Plast-O-Matic orifice Competitors orifice Better engineering results in superior flow capacity

Now Available: PTFE flanged PSV for use on Lined CS for CUP Chemical Applications

PROCESS COOLING WATER APPLICATIONS Lateral Drops: LMBV Manifolds Custom Products Supply Side: PCWS Custom Products Return Side: PCWR Ball Valve or Diaphragm Valve Custom Products

PROCESS COOLING WATER APPLICATIONS Plast-O-Matic Lateral Ball Valves are White Paper specified & installed at Intel Fabs worldwide.

PROCESS COOLING WATER APPLICATIONS Process Cooling Water Sticks Supply & Return, Fully Customizable

ADVANTAGES OF PLAST-O-MATIC WATER STICKS VS. METAL Superior pressure regulator performance No corrosion, no maintenance 2 connections per stick Lower cost One tag number per stick Molded, Machined & Assembled in USA 100% tested at the factory No glue joints Smaller footprint Easily adapts to any piping configuration

Standardizing on Plast-O-Matic Summary of Benefits: Plast-O-Matic exceeds all equipment regulator specifications for flow Plast-O-Matic has the highest purity level of any valve supplier Plast-O-Matic is moving towards Semi F57 standards on all UHP regulators and is currently the UHP standard in many FABs