2. Ultrahigh-Purity Fluoropolymer 3-Way Diaphragm Valve
Pneumatically Actuated
Swagelok has recently introduced a 3-way addition to its ultrahigh-purity fluoropolymer diaphragm valve line.

3. DRP Series 3-Way Valves
Designed for switching flow streams into or from a common port in UHP chemical systems
High cycle life
Pressure ratings are the same in both directions
Flow can be switched from a single inlet to two outlets or from two inlets to a common outlet.
Customizations
Fine thread flare, Nippon Pillar®, and ISO and other end connections
Custom porting
Customized manifold configurations
Proven DRP series technologies
The new DRP series 3-way valve is designed for switching flow streams into or from a common port in UHP chemical systems features:
High cycle-life
Meets SEMI F
Pressure ratings are the same in both directions
Flow can be switched from a single inlet to two outlets or from tow inlets to a common outlet.
Offers a choice of Nippon Pillar, Fine Threaded Flare, ISO and other end-connections
Is available with custom porting, end connection configurations, and manifolds
Developed with proven DRP technologies.

4. Features Utilizes existing patented DRP series technology
Position indicator
Modified PTFE wetted surfaces meet
SEMI® F
Viton® GFLT O-rings
for durability
Unique diaphragm shape minimizes areas of entrapment
Angled ports
improve flow
The DRP series 3-way valve utilizes existing patented DRP technology.
Machined modified PTFE body meets SEMI® F Using machined bodies enables Swagelok to customize configurations and porting.
Viton® GFLT O-rings are highly durable
Semi-hemispherical bowl and optimized flow path creates a fully swept flow path for cleaner operation and minimal fluid shear.
The unique diaphragm shape minimizes entrapment, minimizes permeation, and reduces stress on the diaphragm, providing both cleanliness and durability.
The position indicator displays the valve position .
The integral mounting bracket helps make installation fast and easy.
Fully swept flow path ensures cleaning and minimizes shear
Integral mounting bracket

5. Applications UHP chemical distribution systems and equipment
Aggressive chemical mechanical planerization (CMP) slurry
DI water systems
Bulk chemical delivery systems
Aggressive acids, bases, and other chemicals
DRP series valves are manufactured to meet SEMI standard F specifications for UHP chemical distribution system and equipment and offers solutions for:
Aggressive chemical mechanical planerization (CMP) slurry systems;
DI water systems
Bulk chemical delivery systems
Aggressive acids, bases and other chemical applications.

6. DRP Series 3-Way Valves Switching two lines to a common port A B C C A
The new DRP series valve is designed for switching flow streams into or from a common port in UHP chemical systems. This example illustrates switching two flow streams (A or B) out of a common port (C).
Switching two
lines to a common port

7. DRP Series 3-Way Valves Switching two lines to a common port A B C C B
Animation no notes
Switching two
lines to a common port

8. From a single inlet to two outlets
DRP Series 3-Way Valves A B C C A B
This example demonstrates switching from a common port, C, to ports A or B.
From a single inlet to two outlets

9. Switching a fluid from a common port C to ports A or B
DRP Series 3-Way Valves A B C C A B
Animation – no notes.
Switching a fluid from a common port C to ports A or B

10. Product Line Small platform Medium platform Fine Thread Flare (FTF)
¼ to ½ in. sizes
Medium platform
½ to 1 in. sizes
Fine Thread Flare (FTF)
Nippon Pillar
Other
ISO
NPT
DRP series 3-way valves are available with standard fine threaded flare end connections. Nippon Pillar, Space Maker (Space Saver), ISO, NPT, and other end connections are available on request.