Sphere Option for Helical spring CF16 Bellows Adjustment bolts (horizontal plane) CF38.

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Presentation transcript:

Sphere Option for Helical spring CF16 Bellows Adjustment bolts (horizontal plane) CF38

Compressed air cylinder 200N force at 6 bar stroke 12mm Vacuum side Outside air side

Vertical adjustment (fine) Kinematic mount Horizontal adjustment (fine) Bellows Compressed air connection with 3mm tube

Slot Hole Flat Bellows Connection to vacuum-vessel flange

1300mm 1300mm 15mm Vertical and Horizontal adjustment Hard stops (4x) Horizontal LVDT voice coil (4x) Vessel mount Vessel mount

Table 180kg 145mm thick Holes for balance masses

Movable mass1.6 kg Wire feed holes

Vertical LVDT Voice coil (4x)