Definition History Fabrication process Advantages Disadvantages Applications.

Slides:



Advertisements
Similar presentations
A Brief History of Computers From Prehistory to the 21 st Century David A. Lewis Hyndman Middle Senior High School Hyndman, PA
Advertisements

FABRICATION PROCESSES
Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill ) Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus.
CMOS Fabrication EMT 251.
(5.1) Integrated Circuit Processing  Pulling ingots  Wafers  Patterning  Fabrication cycle  Testing  Packaging  CAD design of ICs  Future issues.
ECE 6466 “IC Engineering” Dr. Wanda Wosik
Machine Tools And Devices For Special Technologies Semiconductive component manufacturing Slovak University of Technology Faculty of Material Science and.
INTEGRATED CIRCUITS Dr. Esam Yosry Lec. #6.
Photolithography Photolithography is the transfer of patterns, circuits, device structures, etc. to a substrate or wafer using light and a mask.
Integrated Circuits (ICs)
How a chip is made November 15, 2011.
Electronics Manufacturing Processes Manufacture of Electronics Components Manufacture of Printed Circuit Boards (PCB’s) Assembly of components on PCB’s.
The Physical Structure (NMOS)
ECE 424 – Introduction to VLSI Design Emre Yengel Department of Electrical and Communication Engineering Fall 2012.
Creating Computer Chips Integrated Circuits. What is an IC? In the 1950s computers were built with vacuum tubes A vacuum tube is A single switch Produced.
Device Fabrication Example
EE141 © Digital Integrated Circuits 2nd Manufacturing 1 Manufacturing Process I Dr. Shiyan Hu Office: EERC 518 Adapted and modified from Digital Integrated.
INTEGRATED CIRCUITS.
ETU LECTURE ONE Lecture_1Linear ICs applications Lab1.
Lecture 4 Photolithography.
Z. Feng VLSI Design 1.1 VLSI Design MOSFET Zhuo Feng.
CS/EE 6710 CMOS Processing. N-type Transistor + - i electrons Vds +Vgs S G D.
How Chips Are Made? May 21 st, Agenda Introduction How Chips are made? How Transistors are made? How Chips are made? Question and Answers.
Fabrication of Active Matrix (STEM) Detectors
Lecture on Integrated Circuits (ICs)
INTEGRATED CIRCUITS Dr. Esam Yosry Lec. #2. Chip Fabrication  Silicon Ingots  Wafers  Chip Fabrication Steps (FEOL, BEOL)  Processing Categories 
Integrated Circuit Devices Professor Ali Javey Summer 2009 Fabrication Technology.
1. A clean single crystal silicon (Si) wafer which is doped n-type (ColumnV elements of the periodic table). MOS devices are typically fabricated on a,
SEMINAR ON IC FABRICATION MD.ASLAM ADM NO:05-125,ETC/2008.
I.C. Technology Processing Course Trinity College Dublin.
SEMINAR PRESENTATION ON IC FABRICATION PROCESS
Text Book: Silicon VLSI Technology Fundamentals, Practice and Modeling Authors: J. D. Plummer, M. D. Deal, and P. B. Griffin Class: ECE 6466 “IC Engineering”
Sand. Made up of 25 percent silicon, is, after oxygen, the second most abundant chemical element that's in the earth's crust. Sand, especially quartz,
Introduction to CMOS VLSI Design CMOS Fabrication and Layout Harris, 2004 Updated by Li Chen, 2010.
Introduction to Wafer fabrication Process
Spencer/Ghausi, Introduction to Electronic Circuit Design, 1e, ©2003, Pearson Education, Inc. Chapter 3, slide 1 Introduction to Electronic Circuit Design.
Fabrication of Microelectronic Devices
ISAT 436 Micro-/Nanofabrication and Applications Photolithography David J. Lawrence Spring 2004.
NMOS FABRICATION 1. Processing is carried out on a thin wafer cut from a single crystal of silicon of high purity into which the required p-impurities.
CORPORATE INSTITUTE OF SCIENCE & TECHNOLOGY, BHOPAL DEPARTMENT OF ELECTRONICS & COMMUNICATIONS NMOS FABRICATION PROCESS - PROF. RAKESH K. JHA.
LBSC 690 Module 2 Architecture. Computer Explosion Last week examined explosive growth of computers. What has led to this growth? Reduction in cost. Reduction.
©2008 R. Gupta, UCSD COSMOS Summer 2008 Chips and Chip Making Rajesh K. Gupta Computer Science and Engineering University of California, San Diego.
CMOS VLSI Fabrication.
CMOS FABRICATION.
Introduction to Silicon Processing Dr Vinod V. Thomas SMIEEE Ref: Section 2.2 ASICs : MJS Smith.
Different Types of Integrated Circuits. Introduction: Different Types of Integrated Circuits Every electronic appliance we use.
Antenna Project in Cameron clean room Wafer preparation, conductor deposition, photolithography.
Farooq Ahmad Shah Manufacturing of Microprocessor.
Patterning - Photolithography
CMOS Fabrication EMT 251.
Wisconsin Center for Applied Microelectronics
Photolithography Photolithography is the transfer of patterns, circuits, device structures, etc. to a substrate or wafer using light and a mask.
Contents Electronics (Logic Gates) Logic Gates 1 NOT gate 2 OR gate
Integrated Circuits.
CMOS Fabrication CMOS transistors are fabricated on silicon wafer
What is IC????? An integrated circuit (IC), sometimes called a chip or microchip, is a semiconductor wafer on which thousands or millions of tiny resistors,
Prof. Jang-Ung Park (박장웅)
積體電路元件與製程 半導體物理 半導體元件 PN junction CMOS 製程.
VLSI System Design LEC3.1 CMOS FABRICATION REVIEW
Evolution Of Electronic Device: Diode, Transistor And IC.
Electronics Manufacturing Processes
Device Fabrication And Diffusion Overview
IC Fabrication Overview Procedure of Silicon Wafer Production
Device Fabrication And Diffusion Overview
Photolithography.
CSE 87 Fall 2007 Chips and Chip Making
MICHAEL AND CECILIA IBRU UNIVERSITY AGBARHA-OTOR
Basic Planar Process 1. Silicon wafer (substrate) preparation
Presentation transcript:

Definition History Fabrication process Advantages Disadvantages Applications

Definition History Fabrication process Advantages Disadvantages Applications

INTEGRATED CIRCUIT: Integrated circuit is a microscopic array of electronic circuits and components that are diffused or implanted onto the surface of a single crystal, or chip, of semiconducting material such as silicon.

Definition History Fabrication process Advantages Disadvantages Applications

First integrated circuit was proposed by G.W.A.Dummer in First functional integrated circuit was demonstrated and patented by Jack Kilby in Robert noyce also patented the first integrated circuit in the year 1959.

The number of transistors in an IC doubles for every 18 months.

AAnalog IC’s Ex: op-Amps, voltage regulators DDigital IC’s Ex: Micro processors,Multiplexers,decoders MMixed signal IC’s Ex: ADC,DAC

 Small scale integration( SSI)  Medium scale integration( MSI)  Large scale integration( LSI)  Very large scale integration(VLSI)  Ultra large scale integration(ULSI)

System-on-a-ChipSystem-on-a-Chip (SOC) All the components needed for a system are included on a single chip. Three Dimensional Integrated CircuitThree Dimensional Integrated Circuit (3D-IC) It has two or more layers of active electronic components. Wafer-scale integrationWafer-scale integration (WSI) It uses an entire silicon wafer to produce a single "super-chip".

The first microprocessor was developed by Intel Corporation in It went into commercial production in 1971 as the Intel Intel introduced their 8088 chip in 1979.

Definition History Fabrication process Advantages Disadvantages Applications

The construction & design plans for the chip are prepared on a computer-aided drafting machine

From the construction plans i mage is made into a mask.

UUnder precisely monitored conditions, a pure silicon crystal is grown. HHeated to its melting point of about 2550°F (1400°C). DDiameter is about 1.5 to 4.0 inches (3.8 to 10.2 cm).

A thin, round wafer of silicon is cut off the ingot using a precise cutting machine called a wafer slicer. Each slice is about 0.01 to inches (0.004 to 0.01 cm) thick.

steps involved 1.Wafer cleaning 2.Barrier layer formation 3.Photoresist application 4.Soft baking 5.Mask alignment 6.Exposure and development 7.Hard-baking Photolithography is the process of transferring geometric shapes on a mask to the surface of a silicon wafer.

Dry Dry Etch, PR strip, or clean Rinse

The surfaces of the wafer are coated with a layer of silicon dioxide.

A covering film of protective material is put on top of the insulating silicon dioxide.

UV-light is shown through a mask and onto the chip.

The wafer is developed, rinsed and baked.

The wafer is treated with chemicals in a process called "etching."

Horizontal Furnace Center Zone Flat Zone Distance Temperature Heating Coils Quartz Tube Gas flow Wafers

Silicon substrate Diffusion of reactants

Metal is added to connect the components to each other in a process called metallization.

Photoresist applicationImparting patterns Development

Etching removes the metal not protected by photo resist. This leaves a pattern of metal that is the same as the one described by the mask. Formation of multiple layers

When the final layer of connecting metal wires have been added, the chips on the silicon wafer are tested.

The chips on the wafer are separated with a diamond saw to form individual integrated circuits.

Finally, each chip is packed into the protective casing and subjected to another series of tests.

1.Low cost 2.High reliability 3.Low power requirements 4.High processing speeds 5.Low power dissipation 6.Less weight 7.Less space

CCannot be modified. CCannot be repaired.