1. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. Fabrication process of a polymethylmethacrylate (PMMA)-based microfluidic system using laser-patterned wax masks. (a) Laser cutting of the wax-covered plastic paper, which works as a mask for sputtering. (b) Sputtering Au (50 nm). (c) Removal of the wax mask. (d) Laser cutting of the wax-coated plastic paper, which works as the mask for 254-nm deep-UV patterning. (e) Deep-UV exposure of PMMA. (f) The PMMA sheet after UV exposure and development. (g) Bonding, piping, and wiring. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

2. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. (a) Custom-made 254-nm deep-UV exposure box. (b) Laser-patterned wax-covered plastic paper used as a mask for the patterning of the microfluidic channel. (c) PMMA sheet after Au sputtering using the wax-covered plastic paper mask. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

3. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. The microfluidic system with T-shaped microfluidic channels and electrodes after the fabrication process. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

4. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. (a) Schematic diagram of the microfluidic system for droplet generation and detection. (b) Image of an oil droplet in a red-dyed water carrier generated in the PMMA microchannel. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

5. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. The warping of plastic paper during the laser cutting on plastic paper. Minimum spacing of the cut line is 0.5 mm to avoid warping. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

6. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. (a) The laser-cut patterns on wax-covered plastic paper. (b) Corresponding areas (junction of microfluidics channels) on PMMA sheet after development. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

7. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. Optical images of (a) the deep-UV fabricated channels on a 1-mm thick PMMA sheet and (b) laser-ablated microchannels on PMMA sheet. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

8. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. SEM images of (a) the deep-UV fabricated channels on a 1-mm thick PMMA sheet and (b) laser-ablated microchannels on PMMA sheet. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

9. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. Undercut during the deep-UV patterning of PMMA sheet. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

10. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. Profile measurement of the microfluidic channel on a 1-mm PMMA sheet after the deep-UV exposure and development. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

11. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. Comparison of the mask feature size and actual patterned (Au sputtering) feature size with the 1:1 reference line. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

12. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. Channel width comparison of the laser-ablated microchannels with various laser scan speeds and powers. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

13. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. Schematic diagram of the droplet-counting circuit for the demonstrated microfluidics system. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701

14. Date of download: 4/16/2015 Copyright © 2015 SPIE. All rights reserved. Signal measurement of the demonstrated microfluidics system, each peak represents a droplet passing through the electrodes. Figure Legend: From: Laser micromachined wax-covered plastic paper as both sputter deposition shadow masks and deep-ultraviolet patterning masks for polymethylmethacrylate-based microfluidic systems J. Micro/Nanolith. MEMS MOEMS. 2013;12(4):049701. doi:10.1117/1.JMM.12.4.049701