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Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of the electrochemical micromachining process. Figure Legend: From: Modeling.

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Presentation on theme: "Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of the electrochemical micromachining process. Figure Legend: From: Modeling."— Presentation transcript:

1 Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of the electrochemical micromachining process. Figure Legend: From: Modeling of electrochemical micromachining: comparison to experiments J. Micro/Nanolith. MEMS MOEMS. 2008;7(3):033015-033015-7. doi:10.1117/1.2964215

2 Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Variation of total (pulsed) current and Faradaic current with time. Figure Legend: From: Modeling of electrochemical micromachining: comparison to experiments J. Micro/Nanolith. MEMS MOEMS. 2008;7(3):033015-033015-7. doi:10.1117/1.2964215

3 Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Laboratory setup of electrochemical micromachining. Figure Legend: From: Modeling of electrochemical micromachining: comparison to experiments J. Micro/Nanolith. MEMS MOEMS. 2008;7(3):033015-033015-7. doi:10.1117/1.2964215

4 Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of the electrolyte flow system. Figure Legend: From: Modeling of electrochemical micromachining: comparison to experiments J. Micro/Nanolith. MEMS MOEMS. 2008;7(3):033015-033015-7. doi:10.1117/1.2964215

5 Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Variation of theoretical current density with voltage for different gap thicknesses and a at a constant electrolyte concentration of 0.1M. Figure Legend: From: Modeling of electrochemical micromachining: comparison to experiments J. Micro/Nanolith. MEMS MOEMS. 2008;7(3):033015-033015-7. doi:10.1117/1.2964215

6 Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Variation of theoretical current density with voltage for different electrolyte concentration and at a constant interelectrode gap of 10μm. Figure Legend: From: Modeling of electrochemical micromachining: comparison to experiments J. Micro/Nanolith. MEMS MOEMS. 2008;7(3):033015-033015-7. doi:10.1117/1.2964215

7 Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Comparison of theoretical and experimental MRR with variation of applied voltage at a gap thickness of 10μm. Solid line: Theory; Symbol: Experiment data. Figure Legend: From: Modeling of electrochemical micromachining: comparison to experiments J. Micro/Nanolith. MEMS MOEMS. 2008;7(3):033015-033015-7. doi:10.1117/1.2964215

8 Date of download: 6/1/2016 Copyright © 2016 SPIE. All rights reserved. Comparison of theoretical and experimental MRR with variation of electrode gap at a voltage of 10V. Solid line: Theory; Symbol: Experiment data. Figure Legend: From: Modeling of electrochemical micromachining: comparison to experiments J. Micro/Nanolith. MEMS MOEMS. 2008;7(3):033015-033015-7. doi:10.1117/1.2964215

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