1. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. SEM images of (a) one-level piston MMA, (b) one-level tilt MMA, and (c) two-level tilt MMA. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

2. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. Process flow for the fabrication of one-level actuators. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

3. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. Process flow for the fabrication of two-level actuators. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

4. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. AFM image of a 250-nm-thick TiAl film on Si. The roughness (Rq) is about 0.2nm. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

5. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. Dependence of TiAl biaxial film stress on film thickness. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

6. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. Optical constants of TiAl derived from spectroscopic ellipsometry. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

7. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. Calculated and measured reflectance of a 250-nm TiAl layer and a 25–250-nmAl-TiAl stack. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

8. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. X-ray diffractogram of a 250-nm TiAl film on Si. The absence of sharp reflexes confirms the missing long-range order in TiAl thin films. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

9. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. Interferometric topology of (a) one-level piston MMA 1L-P2 composed of a 25/300/25-nm Al-TiAl-Al multilayer, (b) one-level tilt MMA 1L-T2 consisting of a 30/300/30-nm Al-TiAl-Al multilayer, and (c) a single two-level tilt-mirror pixel of sample 2L-T1 consisting of 750- nm Al alloy. All data were taken after removal of the sacrificial layer(s). Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

10. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. Measurement of the temperature dependence of pixel RMS and pixel curvature for Al-TiAl-Al piston MMA (P1-L2). Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

11. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. Deflection-voltage characteristics of (a) one-level piston MMA, (b) one-level tilt MMA, and (c) two-level-tilt actuators. In (c), the electrode-mirror gap and the hinge thickness are indicated as parameters. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230

12. Date of download: 5/28/2016 Copyright © 2016 SPIE. All rights reserved. Test of deflection stability by monitoring of deflection amplitude at fixed address voltage: (a) one-level piston MMA, (b) one-level tilt MMA, and (c) two-level-tilt actuators. Figure Legend: From: Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors J. Micro/Nanolith. MEMS MOEMS. 2008;7(2):021012-021012-8. doi:10.1117/1.2945230