1. Date of download: 6/3/2016 Copyright © 2016 SPIE. All rights reserved. (a) Segment Voronoi diagram under L∞ metric, with five distinct sites S1,S2,S3,S4,S5, for interiors of segments and their endpoints. The lightly shaded portion is the Voronoi region of the endpoints of the segment S5, dark shaded portion is the Voronoi region of the interior of the segment S5. The thick black dashed line is the Voronoi edge separating the faces defined by segments S5 and S2, (b) Voronoi diagram (in black) of two design polygons (in gray), w is the width parameter and is encoded by a Voronoi edge shown in black dashed line, and s is the space parameter encoded by a Voronoi edge shown in thick black line. Figure Legend: From: Layout pattern analysis using the Voronoi diagram of line segments J. Micro/Nanolith. MEMS MOEMS. 2016;15(1):013504. doi:10.1117/1.JMM.15.1.013504

2. Date of download: 6/3/2016 Copyright © 2016 SPIE. All rights reserved. Different gauge suggestions. Figure Legend: From: Layout pattern analysis using the Voronoi diagram of line segments J. Micro/Nanolith. MEMS MOEMS. 2016;15(1):013504. doi:10.1117/1.JMM.15.1.013504

3. Date of download: 6/3/2016 Copyright © 2016 SPIE. All rights reserved. Different gauge locations in a portion of design layout: shapes in gray are design polygons, Voronoi diagram of design polygons is shown by dashed lines. Figure Legend: From: Layout pattern analysis using the Voronoi diagram of line segments J. Micro/Nanolith. MEMS MOEMS. 2016;15(1):013504. doi:10.1117/1.JMM.15.1.013504

4. Date of download: 6/3/2016 Copyright © 2016 SPIE. All rights reserved. An example showing different gauges with their scoring formula: (a) internal gauge with score=w, (b) external gauge with score=s, (c) sandwich gauge with score=0.5×d, and (d) comb gauge with score=0.75×dtb, the score of a T gauge is computed similarly with score=0.80×dtb. Figure Legend: From: Layout pattern analysis using the Voronoi diagram of line segments J. Micro/Nanolith. MEMS MOEMS. 2016;15(1):013504. doi:10.1117/1.JMM.15.1.013504

5. Date of download: 6/3/2016 Copyright © 2016 SPIE. All rights reserved. Block diagram of flow for the pattern selection using segment Voronoi diagram. Figure Legend: From: Layout pattern analysis using the Voronoi diagram of line segments J. Micro/Nanolith. MEMS MOEMS. 2016;15(1):013504. doi:10.1117/1.JMM.15.1.013504

6. Date of download: 6/3/2016 Copyright © 2016 SPIE. All rights reserved. Variation of markers covered w.r.t. the window size. Figure Legend: From: Layout pattern analysis using the Voronoi diagram of line segments J. Micro/Nanolith. MEMS MOEMS. 2016;15(1):013504. doi:10.1117/1.JMM.15.1.013504

7. Date of download: 6/3/2016 Copyright © 2016 SPIE. All rights reserved. Variation of useful gauges w.r.t. the window size. Figure Legend: From: Layout pattern analysis using the Voronoi diagram of line segments J. Micro/Nanolith. MEMS MOEMS. 2016;15(1):013504. doi:10.1117/1.JMM.15.1.013504

8. Date of download: 6/3/2016 Copyright © 2016 SPIE. All rights reserved. Variation of runtimes of the experiments w.r.t. the window size. Figure Legend: From: Layout pattern analysis using the Voronoi diagram of line segments J. Micro/Nanolith. MEMS MOEMS. 2016;15(1):013504. doi:10.1117/1.JMM.15.1.013504