1. Resistive coating on spacers by ALD 082310
Anil Mane, Qing Peng, Jeffrey Elam
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2. Background work Experimental details Objective:
To coat these spacers uniformly, conformally with “right resistance range” by ALD

3. Photographs of the spacers
3 different spacers loaded in fine mesh bags for ALD
Before ALD R2 R3
Before ALD
R1=0.5mm
R2=1mm R1
R3=2.5mm
Before ALD
After ALD
After ALD
After ALD
Prior to ALD 5min ultrasonic acetone clean
3 different spacers coated simultaneously by ALD
Uniform and conformal deposition on all three spacers
Both end of spacer has rough surface and need fine polishing

4. Spacers resistance after ALD
Resistance measured without electrodes (Do we need electrodes?)
Resistance of spacer has apparent size dependent behavior
Need individual ALD process optimization
Ran out spacers samples
Coatings on spacers look splotchy, while same coatings on quartz and silicon witness substrates look uniform – need better procedure for cleaning the glass spacers (e.g. piranha)
Next Plan:
Once spacers available ALD process optimization for desired resistance