1. Silicon wafer fabrication
Taken from

2. Silicon wafer fabrication – slicing and polishing
Taken from

12. Influenza Virus
50 nm Transistor
6 Level
Metallization

13. IBM 7-Level Cu Metallization

15. Micromachining Ink Jet Nozzles
Microtechnology group, TU Berlin

16. TI Digital Micromirror Device

17. MEMS Gyroscope Chip 1mm Drive 0.01Å Sense
J. Seeger, X. Jiang, and B. Boser

18. Single chip six-degree-of-freedom inertial
measurement unit (uIMU) designed by IMI
principals and fabricated by Sandia National Laboratories

19. Gene chips, proteomics arrays.

20. NEMS: TOWARD PHONON COUNTING: Quantum Limit of Heat Flow.
Roukes
Group
Cal Tech
Tito

21. Biological Nanomotor

22. What is a Microswitch? Surface Micromachined 5-500 Micron Size
5-300 V Actuation

25. Two-Contact Switch
Beam
Drain
Gate
Contact

26. MEMS Microswitch
Contact
Contact
Contact

29. LPCVD Systems