1. SPiiPlus Training Class
Single-Axis Motion

2. Single-Axis Motion
The controller commands single axis motion by generating 3rd order motion profiles.
Generates position, velocity, accel/decel, and jerk command every controller cycle (depends on product model but typically 1ms).
Single axis motion commands:
Point to point
Jog
Halt
Kill
Motion queue
Prerequisites: Axis must be enabled and commutated (if closed loop operation)

3. Point to Point (PTP) Motion
Moves an axis to a location which is specified as absolute or relative to current position.
Follows a 3rd order profile.
PTP command format: PTP[/switches] (axis), desired position, [velocity]
Optional PTP command switches:
PTP/r : make a relative motion to the current position
PTP/v : use defined velocity instead of default VEL
PTP/e : wait for PTP move to end (useful in programs)
PTP/rve: multiple switches allowed in same command

4. Point to Point (PTP) Motion
Example: PTP/v (0), 1000, 2000 moves axis 0 to 1000, desired velocity 2000
Reference velocity
Reference position

5. Motion Queue Motion commands are queued FIFO – for each axis.
A motion queue can contain up to 5 motion commands.
ACSPL+ program execution will immediately pause when a sixth motion command is initiated while five motion commands (for same axis) are currently in progress. Program will immediately resume when first motion is terminated.
Variable GMQU gives number of motions in each motion queue.

6. Motion Queue
BREAK immediately terminates the currently executed motion of the specified axis without building a deceleration profile, and initiates the next motion in the axis motion queue, if it exists
BREAK smoothly transitions into next move.
If no more motion in queue, BREAK has no effect and the current motion continues as normal

7. JOG Motion
Creates motion with constant velocity and no defined end point
Follows a 3rd order profile
JOG command format: JOG[/switches] (axis) [,velocity] [,-]
Optional JOG command switch:
JOG/v: use defined velocity instead of default VEL

8. JOG Motion
Jogging:
Example: JOG (4) Description: move axis 4 in positive direction (default VEL)
Example: JOG/v (2), -300 Description: move axis 2 in negative direction at velocity of -300
Example: JOG (2), - Description: move axis 2 in negative direction (default VEL)

9. Change Motion Parameters On-the-fly
IMM:
Use to change motion parameters VEL, ACC, and DEC during motion
Smoothly transition from current 3rd order motion profile to new 3rd order motion profile

10. Motion Termination Methods
Terminate motion with a deceleration profile:
HALT command – axis will decelerate to zero according to DEC
KILL command – axis will decelerate to zero according to KDEC
Terminate motion without a deceleration profile:
DISABLE command

11. Exercise 1 Application Description: Method:
An axis on a wafer inspection machine needs to move an inspection head to several points across the wafer surface
The first set of points requires no dwell time
The second set of points requires 50ms dwell time to trigger the camera and process results
After inspection, the inspection head needs to move an unspecified distance down the inspection line and stop after 5 seconds of travel
Method:
Load Programming 07 into Program Manager and review code
Open the Communication Terminal (make sure “Show Unsolicited Messages” is selected) and view the output
How many motions in the motion queue are displayed during the PTP moves?

12. Exercise 2
The inspection machine has been reworked for higher throughput, as a result neighboring wafers are closer together. Modify buffer 0 code to do the following:
Double inspection head velocity motion parameter to 10000
Reduce wafer edge position by half (to 5000)
After wafer inspection, only jog axis for 2.5 seconds
Replace HALT with KILL to stop axis faster

13. Exercise 3
In order to improve product quality, a design rev has been issued with a spec change such that trigger points need to occur every user unit between 2000 and Simplify buffer 1 code to do the following:
Remove user arrays specifying absolute positions to move through and replace using relative point to point moves.
Use LOOP to move through the higher number of trigger points to avoid adding many lines of code
Reduce the wait time at each trigger point to 5ms

14. Exercise 4
Another actuator has been added to the inspection machine for inspection head positioning. It needs to move the inspection head close to the wafer at trigger positions, then move back up before executing subsequent moves. Copy exercise 3 and add an additional axis to achieve this task.