IC Fabrication Overview Procedure of Silicon Wafer Production

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Presentation transcript:

IC Fabrication Overview Procedure of Silicon Wafer Production Raw material ― Polysilicon nuggets purified from sand Crystal pulling Si crystal ingot A silicon wafer fabricated with microelectronic circuits Final wafer product after polishing, cleaning and inspection (1) Raw material from sand and made into the polysilicon nuggests (2) The polysilicon nuggets are placed into the quartz crucible. Quartz crucible, surrounded by graphite heater, 1600degree C. Metling it rotated. The melted nuggets can be pulled out slowly using a crystal seed. The crystal seed the shape is long thin needle. When it pull out and colled and formed the cylinder shpaed inget. The ingot is single crystal slicon.The diameter of the ingot is deciced by the temperature when melting and the rotating speed when it pulled out. Pure crystal cylindar ingets.temparatue and rate decide the diameter Slicing into Si wafers using a diamond saw 1

OUTLINE What is a Monolithic Integrated Circuit (IC)? Dimensions * 07/16/96 OUTLINE What is a Monolithic Integrated Circuit (IC)? Dimensions State-of-the-art in size and density Materials Basic process sequence Photolithography Define some key terms Typical Device Cross-Sections Packaging Challenges and Opportunities in the Semiconductor Industry For EE Graduates *

BASIC PROCESSING STEPS Design Then Repeated Application Of: * 07/16/96 BASIC PROCESSING STEPS Design Then Repeated Application Of: Oxidation and/or Nitridation Photolithography Wet Etching (Chemical) Dry Etching (Plasma) Ion Implantation and/or Diffusion Evaporation Sputtering Plasma Assisted Deposition Epitaxy Many Processing Steps are at temperatures to 1200°C *

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OTHER DEVICES AND TECHNOLOGIES * 07/16/96 OTHER DEVICES AND TECHNOLOGIES Thin-Film Transistors (TFT) Displays-Liquid Crystal Displays (LCD), Plasma, LED Backlit, etc. Photonic-Light Emitting Diodes (LED), Organic Light Emitting Diodes (OLED), LASERS, Optical Chips, etc.) Photovoltaics-Conventional Crystalline and Flexible Thin-Film Devices and Systems on Flexible Substrates Micro-Electro-Mechanical Systems (MEMS) integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. Electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes) Micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices. *

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