Examples and disciptions for measurements On pixel and strip sensors

General Comments If you are not sure about the setup, settings or obtained results: CONTACT THE EXPERT!!! BUT check before: Is everything switched on? Connect cable in a prober way? Check if bias ring is connected to ground (switch light on (0V!!!) and see if current flow) Same for pixel if you have doubts Move chuck up and down 3x, test again 3 Needle measurements (special Cint) could be problematic if the contact is lost -> check all 3 curves! Be careful if the needles are in contact and you touch the probe station or close it -> go to seperation before WedgeCard handle: Fix X; Move Y to the right position and fix it, needle high (Z-direction) change with fixing!!!; Contact Z /06/2016 DESY Zeuthen 2

CHECK THAT !!!

How to measure irradiated sensors Open dry air valves and cool down the Chuck to -10*C –LOOK that the pressure not drops below 5bar! –Open the outer door of the lap and switch on the air system Take the sensor from the fridge & put it into the station. –Close the climate chamber and look if water is on the probe station / sensor and wait until everything is dry! (COMMENT: If this takes longer than 1-2 minutes something is maybe wrong!) Cool down to -20*C and have a look to the pressure. If it drops to strong close dry air valves. WAIT 1 minute after reaching goal temperature that everything is stabilized! –Look if no Water/Ice is on the sensor. If this happen you have to warm the chuck again and wait until everything is dry again!!! –Needles cool down during measurement -> first time it could be that you loose the contact => CHECK THAT. Note the time (if greater than 5 minutes; in 5 minute steps) the sensor was approximately over 0*C in the field: “Additional comment” as: “Sensor was warmed approximately … minutes” After measurement: Warm the Chuck to -5*C and take the sensor out and bring it back to fridge (ASAP!!!)

02/06/2016DESY Zeuthen5 I/V - Bias ring / Guard ring (Change Ampere meter) -Voltage source: 0…(700)1000V for (120;200um)320um thickness; 300/500V for 100 and 50 um [ OR maximum Voltage before break] in 5V steps 100 -!!!Type (p -> ’-’; n -> ’+’) !!!! -T = 22 / -20 ˚C (non-irradiated / irradiated) -Currentlimit: 50  A / 1mA (non-irradiated / irradiated) A V DC Sample Chuck BP Bias Ring Guard Ring Additional Measurement for Irrad. (if possible and current not to high) -75…75V in 1V for Region 5,6,7 “-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7

02/06/2016DESY Zeuthen6 C/V - Bias ring / Guard ring - 1V !!! Open correction !!! - Voltage source: |5…450V| or max Volt in 5V 200V - !!! Type (p -> ’-’; n -> ’+’) !!! - T = 22 / -20˚C (non-irradiate / irradiate) - Please ramp voltage back in 50V steps -Currentlimit: 50  A / 1mA (non-irradiated / irradiated) Bias Adapter LCR Meter BP Bias Ring Guard Ring H L Additional Measurement for Irrad. (if possible and current not to high) -75…75V in 1V for Region 5 If there is some influence : “-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7 and also first measurement for Region 6,7

02/06/2016DESY Zeuthen7 Inter pixel capacitance “C int ” - 1V !!!Open correction !!! - Voltage source: |5…500V| or maximum voltage before break in 5V steps 100V !!! Type (p -> ’-’; n -> ’+’) !!! -T = 22 / -20˚C (non-irradiated / irradiated) -Currentlimit: 50  A / 1mA (non-irradiated / irradiated) -Ramp voltage back in 50V steps LCR Meter BP Bias Ring H L Guard Ring Additional Measurement for Irrad. (if possible and current not to high) -75…75V in 1V for Region 5 for one Pixel If there is some influence : “-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7 and also first measurement for Region 6,7

02/06/2016 DESY Zeuthen 8 - Bias Voltage: 500V or maximum voltage before break - !!! Type (p->’-’; n->’+’) !!! - Voltage source: -2.5…2.5V in 0.25V steps -T = 22 / -20˚C (non irradiated / irradiated) -Currentlimit: 50  A / 1mA (non-irradiated / irradiated) V DC BP A Bias Ring Guard Ring DC-PADs H Inter pixel Resistance “R int ”

02/06/2016DESY Zeuthen9 I/V – DC-Pad “I 3Pixel ” -Voltage source: 0…(700)1000V for (120;200um)320um thickness; 300/500V for 100 and 50 um [OR maximum Voltage before break] in 1V steps 100V -!!!Type (p -> ’-’; n -> ’+’) -T = 22 / -20˚C (non irradiated / irradiated) -Currentlimit: 50  A / 1mA (non-irradiated / irradiated) Bias Ring A DC-PADs BP Guard Ring Additional Measurement for Irrad. (if possible and current not to high) -75…75V in 1V for Region 5,6,7 “-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7

02/06/2016DESY Zeuthen10 For OLD Probestation

02/06/2016DESY Zeuthen11 C/V – DC-Pad “C 3Pixel ” 1V !!! Open correction !!! -Voltage source: |5…450V| or max voltage in 5V 200V -!!! Type (p -> ’-’; n -> ’+’) !!! -T = 22 / -20˚C (non irradiated / irradiated) -Ramp voltage back in 50V steps Bias Adapter LCR Meter BP Guard Ring L H Bias Ring Additional Measurement for Irrad. (if possible and current not to high) -75…75V in 1V for Region 5 If there is some influence : “-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7 And also first measurement for Region 6,7

02/06/2016DESY Zeuthen12 For OLD Probestation

02/06/2016DESY Zeuthen13 R Bias “Poly silicon” - Bias Voltage: 500V !!! Type (p -> ’-’; n -> ’+’) !!! or maximum voltage before break - Voltage source: - 2.5…2.5V in 0.25V steps - T = 22 / -20˚C (non irradiated / irradiated) - R bias : = V/(I meas (V) – I leak (0V) ) V DC Sample Chuck BP Bias Ring A DC-PAD Guard Ring H L in H out Additional Measurement for Irrad. (if possible and current not to high) Check for Region 5: +50V and -50V bias voltage --- if no difference: Its ok; if not: Contact supervisor

R bias ”Punch Through” I R PT U V DC Sample Chuck BP Bias Ring PAD Guard Ring Internal voltage from K2410 -Bias Voltage: 500V or maximum voltage before break -!!! Type (p -> ’-’; n -> ’+’) !!! -T = 22 / -20˚C (non irradiated / irradiated) -Methode1: Make voltage scan and find break; max 50V! Begin with voltage ramp 5V before break in 100mV steps -Methode2: Current source: 50, 100, 200, 500p/nA + 1uA R PT V DC Sample Chuck BP Bias Ring PAD Guard Ring A Additional Measurement for Irrad. (if possible and current not to high) Check for Region 5: +50V and -50V bias voltage --- if no difference: Its ok; if not: Contact supervisor L

R bias ”Punch Through revers” -Bias Voltage: 500V or maximum voltage before break -!!! Type (p -> ’-’; n -> ’+’) !!! -Make voltage scan and find break; max 50V! -Begin with voltage ramp 5V before break in 100mV steps Don’t take to less steps, there are needed for fitting! R PT V DC Sample Chuck BP Bias Ring Guard Ring A Setup 1 A

Pinhole - 10V between AC & DC - Bias Voltage: 500V or maximum voltage before break !!! Type (p -> ’-’; n -> ’+’) !!! - T = 22 / -20˚C (non irradiated / irradiated) Pinole  I= >200pA V DC BP A Bias Ring Guard Ring AC DC

Coupling Capacitance - LCR: 1V !!! Open correction !!! - Bias Voltage: 500V or maximum voltage before break !!! Type (p -> ’-’; n -> ’+’) !!! - T = 22 / -20˚C (non irradiated / irradiated) LCR Meter BP Bias Ring H L Guard Ring AC DC

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