1. Institute of Physics ASCR, Prague Strip Sensors R&D for SCT and ITk Marcela Mikeštíková

2. Institute of Physics for ATLAS SCT: sensors 1.Participation in R&D of strip sensors p-on-n for SCT 2. Study of radiation hardness of first prototypes 3.Qualification tests of strip sensors for SCT 2500 sensors tested in total (16% of whole production of discs sensors) in SCT lab of IP ASCR Prague Automatic probe-station in SCT lab of IP ASCR, Prague Prague SCT Lab Detail of disc sensor 2

3. 1.Evaluation of large area n-on-p silicon strip sensors 2009: Study of electrical characteristics of design ATLAS07 large area (10x10cm) sensors at Prague SCT lab J. Bohm, M. Mikestikova, A. Affolder, P.P. Allport, … Z. Dolezal, P.Kodyš, et al. NIM A636 (2011) S104-S110 3 Interstrip Capacitance -bias voltage scan Interstrip capacitance – strip scan Institute of Physics for ATLAS Upgrade ITk – strip sensors  Bias Voltage scans (IV, CV, Cint, Rint)  Full strip scans (automatic probe station)  Interstrip Capacitance and Resistance  AC Coupling Capacitance  Polysilicon Bias Resistance  Leakage Current to a strip ATLAS07

4. 2. Study of radiation damage of ATLAS07 and ATLAS12 strip sensors  Samples: miniature (1x1cm) sensors n-strip in p-type material (FZ)  Barrel and Endcap mini sensors : different layouts, pitches, types of stray strip ganging and types of PTP structures  Irradiation:  protons (up to 2E15 n eq /cm 2 ): CERN, Birminham, Karlsruhe, CYRIC  neutrons : from reactors in Řež (Prague), Ljubljana  gamma (up to dose 10MRad): BNL  Studies  IV (Current, Break down voltage), CV (Full depletion voltage)  Surface radiation damage: Interstrip Resistance and Capacitance Punch Trough Protection Structure (Beam loss protection) AC Coupling Capacitance Polysilicon Bias Resistance  Measurements condition:  probe station with cooled chuck (up to -30°C)  with Nitrogen flow, rel. humidity <5% 4 Institute of Physics for ATLAS Upgrade ITk

5. Laboratory Equipment of Silicon Lab in IP ASCR Prague For Quality Assurance - Sensors tests 5 Silicon Lab (24 m 2 ) - with temperature and humidity control, vertical air flow, - electrically conductive flooring

6. Laboratory Equipment of Silicon Lab in IP ASCR Prague For Quality Assurance - Sensors tests 6 Manual probe station with cooled chuck (-30°C) Nitrogen flow in probe station, humidity < 5% Automatic probe station KarlSuss PA200 equipped with probe heads with vacuum and magnetic support, microscope, video camera and monitor - for strip integrity tests and for visual inspection Measuring devices:  LCR meter HP4284A  SMU Keithley 237  HP34401A multimeter  Picoammeter Keithley 487  Electometer K6517A  HV Supply K248 up to 3000V  Switching system 4x5 Matrix Switch Clean storage cabinet with Nitrogen purge for ~200 sensors

7. clean room (6m 2 ) level 10 000 - temperature and humidity control, overpressure Laboratory Equipment in IP ASCR Prague BINDER: Environmental simulation chamber for cyclical temperature (-40°+180°C) Flowbox with HEPA filters 7

8. Backup

9. Step NoName & DeceptionEquipment NeededQA Specs 1Arrival Unpacking? Storage of components Storage Cabinets (if not packaged) Humidity <5% 2Visual Inspection Check for scratches, broken edges, dust etc. Check edge chip spec: no chips or cracks Optical Microscope with automated inspection software ‘Nice and Clean sensor’ 3Metrology Survey XY geometry Z profile Optical (non contact) CMM Total Bow <200  m 4aI-V Probe Station with N 2 /humidity control/chiller Sensor held on jig using clamps (not vac) in dry conditions (N 2 ) 0-800V in 10v steps with 10s interval I < 200  A (as spec) No onset of micro-disharge T = Normalised to 20 o C 4bC-VAs Above0-800V in 10v steps with 5s interval T = Normalised to 20 o C 9 1 - Sensors (Bart + Kristin) ITK Week - Feb 2015Andy Blue Quality assurance - Lab requirements

10. Step No Name & DeceptionEquipment NeededQA Specs 5aFull Strip Test Probe Station Multichannel probe card Starts at 5-10% Reduce to 1-2% 5bAdditional Tests PTP, C INT, R INT Probe StationSame sensors as 5a 7Database Sensor is registered Data uploaded PC / Laptop 8Decision Grading of Sensor is made Good, Pass, Hold or Fail 10 1 - Sensors (Bart + Kristin) Andy BlueITK Week - Feb 2015 Quality assurance - Lab requirements