An integrated modular service for microfluidics and mixed technologies microBUILDER An integrated modular service for microfluidics and mixed technologies ”Roadshow” presentation Chapter 1 Introduction

microBUILDER is ... A collaboration of 9 European companies, R&D institutes and universities on microsystem foundry services, focusing on microfluidic applications Part of the EUROPRACTICE network www.europractice.com Supported by the European Union within the Information Society Technology (IST) thematic priority of the 6th Framework program Providing a complete service package for the development and production of new products based on mixed technologies with a focus on microfluidics applications

The Mission Increase the commercial success and competitiveness of European industry Simple and cost-efficient access to mixed technology development and manufacturing through Design & engineering services Prototyping and manufacturing services Specific CoventorWare software modules Training Demonstration of technological capabilities by sample devices SME User club Advises the microBUILDER partners First-hand access to information Open for interested SMEs

Mixed Technology Combination and interaction of different technologies and competences Moulding of plastics Silicon and glass micromachining Packaging and system integration Actuators Electronics Surface functionalisation and modification All technologies and competences are available within the microBUILDER network

Microfluidics Handling of small amounts of liquids and gases Key enabling technology for different application areas: Diagnostics and analytics Drug discovery Drug delivery Medical devices Fuel cells Process control Machinery and automation Microfluidic devices and systems: Lab-on-chip Valves and pumps Flow and gas sensors Chemical micro-reactors

The Offer Complete service package from the first idea to a final product Design and engineering services Silicon prototyping and series production Prototyping and series production of polymer parts CoventorWare software modules Training and education Technologies and processes are documented in a design handbook Easy access to services through one single customer interface

Design & Engineering Services Custom-tailored development services Feasibility and concept studies Proof of principle investigations Design, modelling and simulation Prototyping Test and characterisation Based on a portfolio of validated methods, processes and technologies Design Handbook Specifications of the available technologies and processes Design rules Examples of validated designs Enables experienced users to design their own device

CoventorWare Process Access Kits Library of microBuilder specific process emulation files Specific material property databases Library of parametric elements for system-level and component design Layout template file incl. DRC Materials’ Properties Process Parameters Fabrication @ MicroBuilder (SensoNor, Tronics etc.) System and MEMS Co-design Layout 3D Model FEM/BEM Analysis Target Process

MPW Services at Infineon Technologies SensoNor Bulk micromachining of Si and glass Minimum feature size: 2 µm High-volume approach to production High-precision membrane definition by etch stop against pn-junctions High aspect ratio RIE High stability piezoresistors for sensing elements Triple-stack Glass/Si/Glass anodically bonded Hermetically sealed cavities with electrical feed-throughs Thermal excitation / Piezoresistive detection

MPW and manufacturing services at TRONICS Microsystems Industrialization and manufacturing of Si/Glass products Advancing concepts into reliable products Building supply chains for custom products Prototyping on MPW and semi-custom runs: SOI-HARM (High Aspect Ratio Micromachining) Si-DRIE/Glass under development

Polymer technology Full service: From design and construction to mass production Microfludic design Service Check for mass production Ultra precision milling Quick prototyping Small volume production Mass production by high precision moulding Advanced quality service Add on processes, e.g. hydrophilic coating Micro assembly

Microfluidic Construction Kit The idea: modular concept as an intermediate step on the way to integrated systems Lab on a Chip Microfluidic Functions Concept = Kit

Microfluidic Construction Kit The product: Assembly platform and microfluidic connectors Library of standard slides: pumps, mixers, splitters Customer specific microfluidic slides by high precision moulding Application field examples: Fuel cells Environmental monitoring Biological assay development Pharmaceutical formulation Drug synthesis on demand

Add-on processes – bioactive layers Functional surfaces for attachment of: proteins (antibodies) single stranded oligo-nucleotides glucose molecules … Au or NiCr/Au films on silicon Commercial or customers’ own biochemistry To be combined with lab-on-chip systems K.W. Wee et al. 2005

Add-on processes – hydrophobic surfaces Functional surfaces for inhibiting fluids or for driving fluids through designated areas Teflon (C4F8) or SiO2 on silicon as hydrophobic and hydrophilic surfaces Attractive for making valves and for metering (hydrophobic) and for pumps (hydrophilic) To be combined with lab-on-chip systems Photo: SINTEF Hydrophobic surface Photo: SINTEF Hydrophobic surface utilized to inhibit fluid flow in a channel

Add-on processes – optimizing lab-on-chip systems Au films or piezoresistors for local heating On-chip temperature measurements Sample separation, enrichment and cleaning by electric fields (using e.g. Au thin film electrodes) Avoid inhibition of biochemistry reactions by means of surface coatings Infineon SensoNor process

Add-on processes – piezoelectric thin films Photo: MASCOT Functional surfaces for resonating elements (cantilevers or diaphragms) or for pumps and actuators Attractive for chemical and biochemical sensors Piezorelectric film (PZT) on silicon To be used as stand-alone or to be combined with lab-on-chip systems Prototype acoustic gas sensor in a ceramic package Frequency characteristics of the prototype acoustic gas sensor in CO2 at room temperature

Training Short courses: 1 to 2 days introduction to the microBUILDER foundry processes 2-4 days hands-on training courses: Design training for the microBUILDER foundry processes using state-of-the-art design tools like CoventorWare Web-based distant learning with animation presentation Master level university course with MEMS and microfluidics basics, introduction to microBUILDER foundry processes and hands-on design with design tools

Application Areas Life sciences research Medical diagnostics and analysis Drug discovery Drug delivery Environmental monitoring Process control e.g. oil industry and food industry Food analysis Security devices e.g. detection of explosives Energy technology including fuel cells Photo: SINTEF/Stanford

microBUILDER partners