1. MICROMACHINING TECHNOLOGY

2. Introduction Micromachining is used to create parts of size in the order of 10 -6 meters. Materials on a micrometer-scale possess unique properties It is used to create Micro Electro-mechanical systems (MEMs devices), Integrated circuits etc. 2

3. Micromachining Micromachining is derived from traditional machining processes such as turning, milling, laser machining etc., by judicious modification of these machines. Unit metal removal and equipment precision are the key factors to micro machining. Micromachining is used for fabricating micro-channels, drug delivery systems and micro-probes in biotechnology applications. 3

4. Micromachining Processes 4 Machining Phenomena Micromachining Process Materials Mechanical ForceMicro milling, Micro grinding Ceramics, metals, Si AblationExcimer Laser, Femto Second Laser Ceramics, Polymers DissolutionEtching, ECMGlass, Quartz Si Ceramics, Polymers

5. Micro Milling Used to create 3D features in the range of a few microns to a few hundred microns. Micro milling is capable of the fabricating holes several tens of micrometers in size for practical applications. 5

6. Micro Milling Capabilities 6

7. LASER Micromachining Uses a power source (FS laser, Excimer laser) that emits a beam with very high quantum energy. Non-contact machining,Very high resolution, repeatability and aspect ratios. Localized heating, No pre/post processing of material Wide range of materials: fragile, ultra-thin and highly reflective surfaces 7

8. Setup of LASER Micromachining 8

9. Chemical Etching The removal mechanism is based on ionic reaction on the work piece surface. Machining force is almost zero and the surface after machining is free from any damage, residual stress or heat effects. 9

10. 10µm Cavity produced by chemical Etching 10

11. Application of Micromachining Inertia measurement devices. Micro-fluidic devices like inkjet nozzle and flow controllers. Optical switches used in display devices and optical communication. Used in medical diagnosis such as blood pressure sensors. 11

12. Conclusion As regards micro machining, dimensions of the product is one of the good indicator of the levels of technology and request. However, the level of request from the industry varies widely. 12