Digital Camera and Computer Vision Laboratory Department of Computer Science and Information Engineering National Taiwan University, Taipei, Taiwan, R.O.C.

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Digital Camera and Computer Vision Laboratory Department of Computer Science and Information Engineering National Taiwan University, Taipei, Taiwan, R.O.C. AOI ( Automatic Optical Inspection ) Presented by: 傅楸善 & 王林農指導教授 : 傅楸善博士

DC & CV Lab. NTU CSIE Camtek Camtek provides intelligent optical inspection systems. Semiconductor Manufacturing and Packaging High-Density Interconnect Substrates Printed Circuit Board

DC & CV Lab. NTU CSIE Semiconductors Ensuring high production yields and reliable service life of the device. Defects in the active die area, may lead to device failure.

DC & CV Lab. NTU CSIE A Natural Born Defect Hunter Falcons are nature's fastest birds. Their acute eyesight and flying skills enable them to capture their target in mid-air. Trained falcons have been used by royalty for hunting since early ages. Camtek's Falcon offers similar qualities: Keen vision to detect minute defects, and the speed to do it in rapid motion. But training our Falcon is much easier.

DC & CV Lab. NTU CSIE Falcon 500 A series of advanced optical inspection systems for wafers. Designed to ensure known-good die. Detects visible defects that may impact die integrity or interconnect reliability.

DC & CV Lab. NTU CSIE Falcon 500 Working Theory Dedicated algorithms analyze probe marks to determine their size, proximity to pad edge and number of touch-downs. Equipped with the Camtek’s optional Confocal Chromatic Height Sensor (CCS), the Falcon 500 can even plot sampled probe mark profiles. Proprietary optics provides high resolution and contrast.

DC & CV Lab. NTU CSIE Falcon 500 Working Theory(cont’) Bright and dark field illuminations bring surface irregularities out while obscuring normal process variations Working together, the Falcon’s optics, illuminations and sophisticated algorithms provide superb detection with minimal false call rate. Intelligent and intuitive recipe setup adapts detection performance to user preferences.

DC & CV Lab. NTU CSIE Falcon 500

DC & CV Lab. NTU CSIE Falcon 500 Working Theory(cont’) Performance Highlights High throughput for 100% inspection at production rates New adaptive probe marks analyzing algorithm Superb surface defect detection Optional 3D measurement capabilities Fast, easy and intuitive setup