1. DC & CV Lab. CSIE NTU AOI Automatic Optical Inspection Supports quality control objectives through in-process inspection that identifies critical defects Helps prevent recurrence of critical defects by indicating possible process-related sources of error

2. DC & CV Lab. CSIE NTU Basic Structure of AOI Platform

3. DC & CV Lab. CSIE NTU Basic Steps Alignment Observed object moves along the path at constant speed CCD (Charge Coupled Device) cameras scan the object Analyze the image data, calculate the size, position, and the type of the defects on the object Move review cameras to the defect and get the detail

4. DC & CV Lab. CSIE NTU

5. DC & CV Lab. CSIE NTU InVision An in-line AOI platform by Orbotech http://www.orbotech.com In-line: seamless with the product line

6. DC & CV Lab. CSIE NTU Spec.

7. DC & CV Lab. CSIE NTU Standard Features Auto stack comparison Real time classification Video classification system Video image grabbing

8. DC & CV Lab. CSIE NTU Inspection Methods Periodic area/periodic connector area: comparison of pixel with neighboring pixels Non-periodic connector area: die-to-die

9. DC & CV Lab. CSIE NTU Illumination Solid-state LED (Light-Emitting Diode)-based system Why LED? Long life and reliability Provides different levels of intensity and evenness of illumination

10. DC & CV Lab. CSIE NTU Classification Based on a sub-micron-resolution real RGB (Red, Green, Blue) video image Can do go/no-go testing to different channels

11. DC & CV Lab. CSIE NTU Contactless Transport Mechanism The glass is floated at a stable height on a layer of air above the table, avoiding all backside contact Minimizes contamination, scratching and electrostatic damage Results in much smoother motion than conventional transport mechanisms